公开(公告)号：US20150364670A1

公开(公告)日：2015-12-17

申请号：US14304460

申请日：2014-06-13

Applicant: TDK CORPORATION

Inventor： Ryu OHTA ,  Hitoshi SAKUMA ,  Yuiko HIROSE

IPC: H01L41/18 ,  H01L41/047

CPC classification number: H01L41/0805 ,  H01L41/0973 ,  H01L41/1873 ,  H01L41/316

Abstract: A piezoelectric element exhibiting a small leakage current density and high reliability as compared with a KNN thin film piezoelectric element in the related art is provided. The piezoelectric element is characterized by including a lower electrode, a piezoelectric layer primarily made from potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, and an upper electrode, wherein the piezoelectric layer is present between the lower electrode and the upper electrode, and the piezoelectric layer has the value determined by dividing the maximum value of intensity of a diffraction peak, where the angle of 2θ is within the range of 21.1°≦2θ≦23.4° in the X-ray diffraction pattern (2θ/θ), by the intensity of a diffraction peak, where 2θ is within the range of 30.1°≦2θ≦33.3°, of 0.04 or less.

Abstract translation: 提供了一种与现有技术中的KNN薄膜压电元件相比表现出小的漏电流密度和高可靠性的压电元件。 压电元件的特征在于包括下电极，主要由铌酸钾钠制成的压电层，其为由通式ABO 3表示的钙钛矿型化合物和上电极，其中压电层存在于下电极 和上电极，并且压电层具有通过除以2θ的角度的衍射峰的强度的最大值所确定的值; 在X射线衍射图（2＆amp; Thetas;）中的21.1°＆nlE; 2＆amp; Thetas;＆amp; NlE; 23.4°的范围内，由衍射峰的强度，其中2＆ 在30.1°＆nlE; 2＆thetas;＆nlE; 33.3°，0.04以下的范围内。

公开(公告)号：US20160218271A1

公开(公告)日：2016-07-28

申请号：US15006395

申请日：2016-01-26

Applicant: TDK CORPORATION

Inventor： Hitoshi SAKUMA ,  Ryu OHTA

IPC: H01L41/047 ,  G11B5/48 ,  B41J2/14 ,  H01L41/09 ,  H01L41/113

CPC classification number: H01L41/0477 ,  B41J2/14233 ,  G11B5/483 ,  H01L41/0805 ,  H01L41/09 ,  H01L41/0973 ,  H01L41/1132 ,  H01L41/1873

Abstract: The present invention provides a piezoelectric thin film element having a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein the pair of electrode layers are composed of platinum (Pt), oxide particles are contained in at least one of the electrode layers, and the oxide particles are oxide particles of at least one element constituting the piezoelectric thin film or oxide particles of Pt.

Abstract translation: 本发明提供一种压电薄膜元件，其具有一对电极层和夹在该对电极层之间的压电薄膜，其中该一对电极层由铂（Pt）构成，氧化物颗粒包含在至少一个 的电极层，氧化物粒子是构成压电薄膜的至少一种元素或Pt的氧化物粒子的氧化物粒子。

公开(公告)号：US20160133825A1

公开(公告)日：2016-05-12

申请号：US14934988

申请日：2015-11-06

Applicant: TDK CORPORATION

Inventor： Masahiro OISHI ,  Atsuo MATSUTANI ,  Ryu OHTA

IPC: H01L41/18 ,  C01G33/00 ,  H01L41/257

CPC classification number: C01G33/006 ,  B41J2/14233 ,  B41J2202/03 ,  C01P2002/34 ,  C01P2002/82 ,  C01P2006/40 ,  G01N21/65 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1132 ,  H01L41/1873 ,  H01L41/316

Abstract: A piezoelectric layer made of potassium sodium niobate which is a perovskite type compound represented by the formula ABO3, wherein, in the Raman spectroscopy measurement of the piezoelectric layer which is performed while the piezoelectric layer is rotated in the in-plane direction, the measured intensity of the lattice vibration region of the perovskite type compound in the Raman spectrum obtained in polarized Raman spectroscopy measurement (yx) has a periodicity of approximately 90°, wherein, the polarized Raman spectroscopy measurement (yx) is performed while the piezoelectric layer is rotated in the in-plane direction and Raman scattering light is polarized in a direction perpendicular to that of the incident light.

Abstract translation: 由铌酸钾钠制成的压电层，其为由式ABO3表示的钙钛矿型化合物，其中，在压电层在面内方向上旋转时进行的压电层的拉曼光谱测量中，测量的强度 在偏振拉曼光谱测量（yx）中获得的拉曼光谱中的钙钛矿型化合物的晶格振动区域的周期约为90°，其中在压电层旋转的同时进行极化拉曼光谱测量（yx） 面内方向和拉曼散射光在垂直于入射光的方向上极化。

公开(公告)号：US20150109372A1

公开(公告)日：2015-04-23

申请号：US14058912

申请日：2013-10-21

Applicant: TDK CORPORATION

Inventor： Yasuhiro AIDA ,  Ryu OHTA ,  Yoshitomo TANAKA ,  Hiroshi CHIHARA ,  Hitoshi SAKUMA ,  Kazuhiko MAEJIMA

IPC: H01L41/08 ,  G01L1/16 ,  B41J2/045 ,  H01L41/187

CPC classification number: H01L41/0805 ,  B41J2/045 ,  B41J2/14233 ,  B41J2202/03 ,  G01L1/16 ,  G01L9/008 ,  H01L41/0973 ,  H01L41/1873 ,  H01L41/316

Abstract: The displacement as an actuator or the sensitivity as a sensor of a piezoelectric element can be increased and, in addition, the electric power consumption can be reduced by providing a thin film of potassium-sodium niobate, which is a perovskite type compound represented by a general formula ABO3, as a piezoelectric layer, wherein a crystal orientation of a crystal structure of potassium-sodium niobate has in-plane fourfold symmetry as a whole piezoelectric layer, where a first axis of rotational symmetry is a thickness direction of the piezoelectric layer.

Abstract translation: 可以增加作为致动器的位移或作为压电元件的传感器的灵敏度，并且另外可以通过提供作为钙钛矿型化合物的铌酸钾钠的薄膜来降低电力消耗， 通式ABO3作为压电层，其中铌酸钾钠的晶体结构的晶体取向作为整体压电层的面内四重对称，其中旋转对称的第一轴是压电层的厚度方向。