公开(公告)号：US20170288128A1

公开(公告)日：2017-10-05

申请号：US15466344

申请日：2017-03-22

Applicant: TDK CORPORATION

Inventor： Tomohisa AZUMA ,  Masaru NANAO ,  Tatsuji SANO ,  Masahito FURUKAWA ,  Kenta ISHII

IPC: H01L41/187 ,  H01L41/297 ,  C23C14/08 ,  H01L41/047 ,  H01J37/34 ,  C23C14/34

CPC classification number: H01L41/1873 ,  C23C14/088 ,  C23C14/3407 ,  C23C14/3414 ,  H01J37/3426 ,  H01L41/0471 ,  H01L41/297 ,  H01L41/316

Abstract: A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least one selected from the group consisting of Nb (niobium), Ta (tantalum) and Zr (zirconium) with Nb (niobium) as a necessity, the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains and grain boundaries existing among the crystal grains, and in the grain boundary, the molar ratio of at least one of Nb (niobium), Ta (tantalum), and Zr (zirconium) in the B components is higher than the molar ratio in the interior of the crystal grains by 30% or more.