公开(公告)号：US20180159020A1

公开(公告)日：2018-06-07

申请号：US15831630

申请日：2017-12-05

Applicant: TDK CORPORATION

Inventor： Hitoshi SAKUMA ,  Tomohisa AZUMA ,  Kenta ISHII

IPC: H01L41/08 ,  H01L41/047 ,  H01L41/18 ,  H01L41/113 ,  B41J2/14

CPC classification number: H01L41/0815 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2202/03 ,  G11B5/483 ,  G11B21/10 ,  H01L41/0477 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/1132 ,  H01L41/18 ,  H01L41/1873 ,  H01L41/316

Abstract: A piezoelectric thin film-stacked body is provided. A piezoelectric thin film-stacked body has a first electrode layer, a first oxide layer stacked on the first electrode layer, a second oxide layer stacked on the first oxide layer, and a piezoelectric thin film stacked on the second oxide layer, the electrical resistivity of the first oxide layer is higher than the electrical resistivity of the second oxide layer, the first oxide layer includes K, Na, and Nb, and the piezoelectric thin film includes (K,Na)NbO3.

公开(公告)号：US20130162108A1

公开(公告)日：2013-06-27

申请号：US13712426

申请日：2012-12-12

Applicant: TDK CORPORATION

Inventor： Hideaki SONE ,  Tomohisa AZUMA ,  Masahito FURUKAWA ,  Satoko UEDA

IPC: H01L41/187

CPC classification number: H01L41/1873 ,  C04B35/495 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3244 ,  H01L41/083

Abstract: A piezoelectric ceramic with environmental friendliness including a composition as the main component composed of a composite oxide free from lead (Pb) as a constituent element, and with excellent piezoelectric characteristics such as the relative dielectric constant, the electromechanical coupling factor, and the piezoelectric constant, and a piezoelectric device using the piezoelectric ceramic, are provided. A piezoelectric ceramic including a composition represented by the following general formula as the main component: (K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTaz-Zru)O3 (wherein, x, y, z, w, v, u and m in the formula satisfy the following conditions respectively: 0.4

Abstract translation: 一种具有环境友好性的压电陶瓷，其包含作为主要成分的组合物，其由不含铅（Pb）作为构成元素的复合氧化物组成，并且具有优异的压电特性，例如相对介电常数，机电耦合系数和压电常数 ，以及使用该压电陶瓷的压电元件。 包含由以下通式表示的组合物作为主要成分的压电陶瓷：（K1-xyw-vNaxLiyBawSrv）m（Nb1-z-uTaz-Zru）O3（其中，x，y，z，w，v，u和 m分别满足以下条件：0.4

公开(公告)号：US20170288127A1

公开(公告)日：2017-10-05

申请号：US15470314

申请日：2017-03-27

Applicant: TDK CORPORATION

Inventor： Tomohisa AZUMA ,  Masaru NANAO ,  Kenta ISHII

IPC: H01L41/18 ,  H01L41/08 ,  H01L41/047

CPC classification number: H01L41/18 ,  C23C14/088 ,  C23C14/165 ,  C23C14/3414 ,  H01L41/047 ,  H01L41/0805 ,  H01L41/1873 ,  H01L41/316

Abstract: A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least Nb (niobium), the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains; and the average particle diameter of the crystal grains is larger than 3 μm and not larger than 30 μm.

公开(公告)号：US20170288128A1

公开(公告)日：2017-10-05

申请号：US15466344

申请日：2017-03-22

Applicant: TDK CORPORATION

Inventor： Tomohisa AZUMA ,  Masaru NANAO ,  Tatsuji SANO ,  Masahito FURUKAWA ,  Kenta ISHII

IPC: H01L41/187 ,  H01L41/297 ,  C23C14/08 ,  H01L41/047 ,  H01J37/34 ,  C23C14/34

CPC classification number: H01L41/1873 ,  C23C14/088 ,  C23C14/3407 ,  C23C14/3414 ,  H01J37/3426 ,  H01L41/0471 ,  H01L41/297 ,  H01L41/316

Abstract: A piezoelectric ceramic sputtering target containing a perovskite type oxide represented by chemical formula (I) of ABO3 as a main component, wherein the component A of the chemical formula (I) contains at least K (potassium) and/or Na (sodium), the component B of the chemical formula (I) contains at least one selected from the group consisting of Nb (niobium), Ta (tantalum) and Zr (zirconium) with Nb (niobium) as a necessity, the piezoelectric ceramic sputtering target is composed of a plurality of crystal grains and grain boundaries existing among the crystal grains, and in the grain boundary, the molar ratio of at least one of Nb (niobium), Ta (tantalum), and Zr (zirconium) in the B components is higher than the molar ratio in the interior of the crystal grains by 30% or more.

公开(公告)号：US20140339962A1

公开(公告)日：2014-11-20

申请号：US13893865

申请日：2013-05-14

Applicant: TDK CORPORATION

Inventor： Masahito FURUKAWA ,  Tomohisa AZUMA ,  Taku MASAI

IPC: H01L41/047

CPC classification number: H01L41/0477 ,  H01L41/0815 ,  H01L41/1873 ,  H01L41/313

Abstract: A piezoelectric device includes a first electrode film, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. At least one of the first and second electrode films is composed of an alloy, and a main component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn. The piezoelectric film has a main composition represented by (K1-x-y-w-vNaxLiyBawSrv)m(Nb1-z-uTazZru)O3 (1), where x, y, z, w, v, u, and m in formula (1) satisfy 0.4

Abstract translation: 压电装置包括第一电极膜，设置在第一电极膜上的压电膜和设置在压电膜上的第二电极膜。 第一电极膜和第二电极膜中的至少一个由合金构成，合金的主要成分为选自Ti，Al，Mg，Zn的金属。 压电膜具有由（K1-xyw-vNaxLiyBawSrv）m（Nb1-z-uTazZru）O3（1）表示的主要组成，其中式（1）中的x，y，z，w，v，u和m满足 0.4

公开(公告)号：US20140339458A1

公开(公告)日：2014-11-20

申请号：US13893930

申请日：2013-05-14

Applicant: TDK CORPORATION

Inventor： Masahito FURUKAWA ,  Tomohisa AZUMA ,  Taku MASAI ,  Yasuhiro AIDA

IPC: H01L41/187

CPC classification number: H01L41/1873 ,  H01L41/43

Abstract: A piezoelectric ceramic contains a major proportion of potassium sodium niobate and has a carbon content after firing of 55 to 1,240 ppm by mass.

Abstract translation: 压电陶瓷含有主要比例的铌酸钾钠，烧成后的碳含量为55〜1,240质量ppm。