公开(公告)号：US20190173451A1

公开(公告)日：2019-06-06

申请号：US16314125

申请日：2017-06-29

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Antti JAAKKOLA ,  Tuomas PENSALA ,  Aarne OJA ,  Panu PEKKO ,  James R DEKKER

IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007

Abstract: The present disclosure describes micromechanical resonator, a resonator element for the resonator, and a method for trimming the resonator. The resonator comprises a resonator element having a length, a width, and a thickness, where the length and the width define a plane of the resonator element. The resonator element comprises at least two regions (52, 53) in the plane of the resonator element, wherein the at least two regions have different thicknesses.

公开(公告)号：US20190173450A1

公开(公告)日：2019-06-06

申请号：US16313655

申请日：2017-06-29

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Antti JAAKKOLA ,  Panu PEKKO

IPC: H03H9/02 ,  H03H9/24

Abstract: The present disclosure describes a micromechanical resonator comprising a resonator element (40) having a length (l1) and a width (w1) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1.8 to 2.2. The resonator element is suspended to a support structure with two or more anchors (41, 43). Each of the two or more anchors is attached to a first location or a second location. The first location is at a shorter side (42) of the resonator element. The first location divides the width (w1) of the resonator element into a larger portion (w3) and a smaller portion (w2) such that a ratio between said smaller portion (w2) and the whole width (w1) is in a range of 0.10 to 0.28. The second location is at a longer side (44). The second location divides the length (l1) of the resonator element into a larger portion (l3) and a smaller portion (l2) such that a ratio between said smaller portion (l2) and the whole length (l1) is in a range of 0.36 to 0.48.

公开(公告)号：US20190112181A1

公开(公告)日：2019-04-18

申请号：US16090308

申请日：2017-03-31

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Antti JAAKKOLA ,  Tuomas PENSALA ,  Mika PRUNNILA ,  Panu PEKKO ,  Jyrki KIIHAMÄKI ,  Aarne OJA

IPC: B81B3/00 ,  B81C1/00

Abstract: The invention provides a micromechanical device comprising a support structure and a deflecting element connected to the support structure, wherein the deflecting element comprises at least one deformable member adapted to deform extensionally, flexurally or torsionally with respect to a deformation axis for allowing deflection of the deflecting element with respect to the support structure. Further, there are means for statically deflecting the deflecting element or detecting the magnitude of static deflection of the deflecting element. According to the invention, the deformable member is made of silicon doped with an n-type doping agent to a doping concentration of at least 1.1*1020 cm−3. The invention allows for manufacturing micromechanical devices whose mechanical operation is not affected by prevailing temperature conditions.