公开(公告)号：US11668561B2

公开(公告)日：2023-06-06

申请号：US17750580

申请日：2022-05-23

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Riikka Puurunen ,  Feng Gao

IPC: G01B21/08 ,  G01B21/00 ,  C23C16/52 ,  C23C16/04

CPC classification number: G01B21/08 ,  C23C16/045 ,  C23C16/52 ,  G01B21/00

Abstract: An apparatus associated with an analysis of a thin film layer comprises two layer structures (100, 102) with a cavity (104) therebetween, and an opening (110) through one of the layer structures (102) to the cavity (104), the cavity (104) being configured to receive, through the opening (110), material used to form a thin film layer (900) inside the cavity (104). At least one of the two layer structures (100, 102) comprises at least one positional indicator (108) for an analysis associated with the thin film layer (900).

公开(公告)号：US11385049B2

公开(公告)日：2022-07-12

申请号：US16096083

申请日：2017-04-25

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： Riikka Puurunen ,  Feng Gao

IPC: G01B21/08 ,  G01B21/00 ,  C23C16/52 ,  C23C16/04

Abstract: An apparatus associated with an analysis of a thin film layer comprises two layer structures (100, 102) with a cavity (104) therebetween, and an opening (110) through one of the layer structures (102) to the cavity (104), the cavity (104) being configured to receive, through the opening (110), material used to form a thin film layer (900) inside the cavity (104). At least one of the two layer structures (100, 102) comprises at least one positional indicator (108) for an analysis associated with the thin film layer (900).