公开(公告)号：US20180374861A1

公开(公告)日：2018-12-27

申请号：US16056827

申请日：2018-08-07

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Huang-Chun Wen ,  Richard Allen Bailey ,  Antonio Guillemo Acosta ,  John A. Rodriguez ,  Scott Robert Summerfelt ,  Kemal Tamer San

IPC: H01L27/11507 ,  H01L21/02 ,  H01L21/56 ,  H01L23/31 ,  H01L23/00

Abstract: Curing of a passivation layer applied to the surface of a ferroelectric integrated circuit so as to enhance the polarization characteristics of the ferroelectric structures. A passivation layer, such as a polyimide, is applied to the surface of the ferroelectric integrated circuit after fabrication of the active devices. The passivation layer is cured by exposure to a high temperature, below the Curie temperature of the ferroelectric material, for a short duration such as on the order of ten minutes. Variable frequency microwave energy may be used to effect such curing. The cured passivation layer attains a tensile stress state, and as a result imparts a compressive stress upon the underlying ferroelectric material. Polarization may be further enhanced by polarizing the ferroelectric material prior to the cure process.