公开(公告)号：US20140329392A1

公开(公告)日：2014-11-06

申请号：US14333829

申请日：2014-07-17

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： William Robert MORRISON ,  Mark Christopher FISHER ,  Murali HANABE ,  Ganapathy Subramaniam SIVAKUMAR ,  Simon Joshua JACOBS

IPC: B81C1/00 ,  H01L21/02

CPC classification number: B81C1/00984 ,  B81B3/0005 ,  B81B7/0032 ,  B81C1/00261 ,  B81C1/0096 ,  B81C2201/112 ,  H01L21/02112 ,  H04W4/02 ,  Y10S257/914

Abstract: A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.

Abstract translation: 器件具有微机电系统（MEMS）部件，其中至少一个表面和涂层设置在表面的至少一部分上。 该涂层具有式M（C n F 2n + 10）的化合物，其中M是极性头基，其中n≥2r。 n的值可以在2至约20的范围内，并且r的值可以在1至约10的范围内.n加r的值可以在3至约30的范围内，并且n：r的比可以具有值 为约2：1至约20：1。