公开(公告)号：US20240297199A1

公开(公告)日：2024-09-05

申请号：US18613895

申请日：2024-03-22

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC

发明人： Francois Leonard ,  Maurice Garcia-Sciveres ,  Mi-Young Im ,  Yuan Mei ,  Andrew Nonaka ,  Aikaterini Papadopoulou ,  Archana Raja ,  Grigory Tikhomirov

IPC分类号： H01L27/146 ,  H01L31/02 ,  H01L31/0352 ,  H01L31/18

CPC分类号： H01L27/14652 ,  H01L27/14683 ,  H01L31/02005 ,  H01L31/035227 ,  H01L31/18 ,  H01L31/035218

摘要： A pixelated electronic sensor is disclosed for imaging from infra-red to ultraviolet wavelengths, composed of a CMOS integrated circuit plus layers of nano-materials monolithically integrated via low temperature post-processing. Co-design, simulation, and integration methods for the device are described. Each pixel has color-resolved single photon sensitivity without dark counts and without inefficiency. The device operates at temperatures above 70° Kelvin. Current state of the art imagers that can color-resolve single photons are of bolometric or filter type. Bolometric devices must operate at temperature below 1° Kelvin and are limited to few pixels. Devices that use filters are inefficient as all the photons rejected by a filter are wasted. Single photon imagers that operate at non-cryogenic temperature (like Silicon Photomultipliers) have large dark counts typically measured in MHz/cm2. Imaging applications include astronomical telescopes, exoplanet imaging, distant galaxy imaging, microscopic imaging, medical devices, and hyperspectral imaging.