Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure Spatial Atomic Layer Deposition Process

    公开(公告)号:US20250034706A1

    公开(公告)日:2025-01-30

    申请号:US18783878

    申请日:2024-07-25

    Abstract: An atomic layer deposition system comprises: a depositor head having an active surface configured to discharge a first precursor gas, a second precursor gas, and an inert gas that separates the first precursor gas and the second precursor gas; a substrate spaced apart from the active surface of the depositor head; an XY motion device operably coupled to the substrate or the depositor head; and a controller configured to execute a program stored in the controller to move the XY motion device such that the substrate or the depositor head moves in a path, wherein a position of the substrate relative to the depositor head varies in both an X direction and a Y direction when the substrate or the depositor head follows the path. Also disclosed are a method for atomic layer deposition, and a method for reducing non-uniformity of a film produced by atomic layer deposition.

    Transparent nanowire architectures for marine anti-fouling

    公开(公告)号:US11377734B2

    公开(公告)日:2022-07-05

    申请号:US17182791

    申请日:2021-02-23

    Abstract: A rational design and fabrication of ZnO/Al2O3 core-shell nanowire architectures with tunable geometries (length, spacing, branching) and surface chemistry is provided. The fabricated nanowires significantly delay or even prevent marine biofouling. In some embodiments, hydrophilic nanowires can reduce the fouling coverage by up to approximately 60% after 20 days compared to planar control surfaces. The mechanism of the fouling reduction is mainly due to two geometric effects: reduced effective settlement area and mechanical cell penetration. Further, superhydrophobic nanowires can completely prevent marine algal fouling for up to 22 days. Additionally, the developed nanowire surfaces are transparent across the visible spectrum, making them applicable to windows and oceanographic sensors.

    Method of improved performance in metal electrodes for batteries

    公开(公告)号:US11145861B2

    公开(公告)日:2021-10-12

    申请号:US16094123

    申请日:2017-04-17

    Abstract: Disclosed are methods for pre-conditioning or pre-treating the surface of a metal (e.g., lithium) electrode such that the cycle life and efficiency of the electrode within an electrochemical cell are improved through the prevention of dendrite growth. The pretreatment process includes the use of an alternating current to modify the surface properties of the metal electrode, such that a more uniform flux of metal ions is transferred across the electrode-electrolyte Interface in subsequent electrodeposition and electrodissolution processes. As a result, an electrode treated with such a process exhibits improved performance and durability, including markedly lower overpotentials and largely improved metal (e.g., lithium) retention in strip plate tests as compared with untreated electrodes.

    Method of Improved Performance in Metal Electrodes For Batteries

    公开(公告)号:US20190131622A1

    公开(公告)日:2019-05-02

    申请号:US16094123

    申请日:2017-04-17

    Abstract: Disclosed are methods for pre-conditioning or pre-treating the surface of a metal (e.g., lithium) electrode such that the cycle life and efficiency of the electrode within an electrochemical cell are improved through the prevention of dendrite growth. The pretreatment process includes the use of an alternating current to modify the surface properties of the metal electrode, such that a more uniform flux of metal ions is transferred across the electrode-electrolyte Interface in subsequent electrodeposition and electrodissolution processes. As a result, an electrode treated with such a process exhibits improved performance and durability, including markedly lower overpotentials and largely improved metal (e.g., lithium) retention in strip plate tests as compared with untreated electrodes.

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