METHOD FOR PRODUCING ORGANIC SOLVENT SOLUTION OF QUATERNARY AMMONIUM HYDROXIDE

    公开(公告)号:US20240228428A1

    公开(公告)日:2024-07-11

    申请号:US18615802

    申请日:2024-03-25

    CPC classification number: C07C211/63

    Abstract: A treatment liquid composition for semiconductor production including: a quaternary ammonium hydroxide; and a first organic solvent dissolving the quaternary ammonium hydroxide, the first organic solvent being a water-soluble organic solvent having a plurality of hydroxy groups, wherein a water content in the composition is no more than 1.0 mass % on the basis of the total mass of the composition; contents of Na, Mg, Al, K, Ca, Ti, Cr, Mn, Fe, Ni, Cu, and Zn in the composition are each no more than 100 mass ppb on the basis of the total mass of the composition; and a content of Cl in the composition is no more than 100 mass ppb on the basis of the total mass of the composition.

    INHIBITOR FOR RuO4 GAS GENERATION AND METHOD FOR INHIBITING RuO4 GAS GENERATION

    公开(公告)号:US20240182404A1

    公开(公告)日:2024-06-06

    申请号:US18440134

    申请日:2024-02-13

    CPC classification number: C07C211/63 H01L21/3212 H01L21/32134

    Abstract: Provided are an inhibitor for RuO4 gas generation used in a manufacturing process of a semiconductor element, that inhibits a RuO4 gas generated when a semiconductor wafer containing ruthenium and a treatment liquid are brought into contact, and a method for inhibiting the RuO4 gas. Specifically, provided is an inhibitor for RuO4 gas generation for inhibiting a RuO4 gas generated when a semiconductor wafer containing ruthenium and a treatment liquid are brought into contact in semiconductor formation steps, wherein the inhibitor includes an onium salt consisting of an onium ion and a bromine-containing ion. Also provided is a method for inhibiting RuO4 gas generation by adding the inhibitor to a ruthenium treatment liquid or a ruthenium-containing liquid used in semiconductor formation steps.

    CAGE SILICATE AND METHOD FOR PRODUCING THE SAME

    公开(公告)号:US20240051913A1

    公开(公告)日:2024-02-15

    申请号:US18274967

    申请日:2023-02-15

    CPC classification number: C07C211/63 C07C209/68 C07C209/84 C07B2200/13

    Abstract: An object is to provide a cage silicate that can be industrially safely and simply produced by using an alkali silicate solution that does not generate alcohol as a Si raw material and using non-toxic quaternary ammonium, and a method for producing the same. The problem is solved by the following cage silicate:



    A cage silicate consisting of anion component 1 represented by following formula (1), anion component 2 which is a mineral acid ion, cation component 1 represented by following formula (2), and cation component 2 which is an alkali ion, in which, to the mole number in terms of SiO2, a ratio of the mole number of water, (H2O/SiO2), is 0.7 to 30, a ratio of the mole number of alkali ions, (alkali ions/SiO2), is 1.0×10−7 to 1.0×10−2, and a ratio of the mole number of the mineral acid ions, (mineral acid ions/SiO2), is 1.0×10−7 to 1.0×10−3.








    In formula (2), R represents an alkyl group having 2 to 20 carbon atoms.

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