公开(公告)号：US20200208251A1

公开(公告)日：2020-07-02

申请号：US16816181

申请日：2020-03-11

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Shunsuke Sato ,  Reiji Terada ,  Naoko Mikami

IPC: C23C14/04 ,  H01L51/00 ,  C23C14/58

Abstract: A method includes: sandwiching a plastic layer between a glass substrate and a metal plate made of an iron-nickel alloy and joining the metal plate to the glass substrate with the plastic layer in between; forming a mask portion including a plurality of mask holes from the metal plate; joining a surface of the mask portion that is opposite to a surface of the mask portion that is in contact with the plastic layer to a mask frame, which has a higher rigidity than the mask portion and is in a shape of a frame surrounding the mask holes of the mask portion; and peeling off the plastic layer and the glass substrate from the mask portion.

公开(公告)号：US11180843B2

公开(公告)日：2021-11-23

申请号：US16816181

申请日：2020-03-11

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Shunsuke Sato ,  Reiji Terada ,  Naoko Mikami

IPC: H01L51/00 ,  C23C14/04 ,  C23C14/58

Abstract: A method includes: sandwiching a plastic layer between a glass substrate and a metal plate made of an iron-nickel alloy and joining the metal plate to the glass substrate with the plastic layer in between; forming a mask portion including a plurality of mask holes from the metal plate; joining a surface of the mask portion that is opposite to a surface of the mask portion that is in contact with the plastic layer to a mask frame, which has a higher rigidity than the mask portion and is in a shape of a frame surrounding the mask holes of the mask portion; and peeling off the plastic layer and the glass substrate from the mask portion.

公开(公告)号：US11746407B2

公开(公告)日：2023-09-05

申请号：US17510345

申请日：2021-10-25

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Shunsuke Sato ,  Reiji Terada ,  Naoko Mikami

IPC: H01L51/00 ,  C23C14/04 ,  C23C14/58 ,  H10K71/16

CPC classification number: C23C14/042 ,  C23C14/588 ,  C23C14/5813 ,  H10K71/166

Abstract: A method includes: sandwiching a plastic layer between a glass substrate and a metal plate made of an iron-nickel alloy and joining the metal plate to the glass substrate with the plastic layer in between; forming a mask portion including a plurality of mask holes from the metal plate; joining a surface of the mask portion that is opposite to a surface of the mask portion that is in contact with the plastic layer to a mask frame, which has a higher rigidity than the mask portion and is in a shape of a frame surrounding the mask holes of the mask portion; and peeling off the plastic layer and the glass substrate from the mask portion.