Crystallization and bleaching of diamond-like carbon and silicon oxynitride thin films
    6.
    发明授权
    Crystallization and bleaching of diamond-like carbon and silicon oxynitride thin films 有权
    金刚石样碳和氮氧化硅薄膜的结晶和漂白

    公开(公告)号:US09328422B2

    公开(公告)日:2016-05-03

    申请号:US14193173

    申请日:2014-02-28

    CPC classification number: C23C16/56 C23C14/5813 C23C16/26 C23C16/308

    Abstract: Optically transparent diamond-like carbon (DLC) thin films are formed using relatively low-temperature deposition conditions followed by a post-deposition bleaching step. The bleaching can include exposure of an as-deposited thin film to UV laser radiation, which reduces the concentration of defects in the film. The method is compatible with temperature-sensitive substrates, and can be used to form water clear DLC layers on glass substrates, for example, which can be used in display applications.

    Abstract translation: 使用相对低温的沉积条件,然后进行后期漂白步骤,形成光学透明的类金刚石碳(DLC)薄膜。 漂白可以包括将沉积的薄膜暴露于UV激光辐射,这降低了膜中缺陷的浓度。 该方法与温度敏感性基材兼容,并且可用于在玻璃基板上形成水清洁DLC层,例如可用于显示应用中。

    Thin film deposition method
    8.
    发明授权
    Thin film deposition method 有权
    薄膜沉积法

    公开(公告)号:US09011649B2

    公开(公告)日:2015-04-21

    申请号:US13496090

    申请日:2010-09-30

    Abstract: The subject of the invention is a process for obtaining a substrate coated on at least part of its surface with at least one film of oxide of a metal M the physical thickness of which is 30 nm or less, said oxide film not being part of a multilayer comprising at least one silver film, said process comprising the following steps: at least one intermediate film of a material chosen from the metal M, a nitride of the metal M, a carbide of the metal M and an oxygen-substoichiometric oxide of the metal M is deposited by sputtering, said intermediate film not being deposited above or beneath a titanium-oxide-based film, the physical thickness of said intermediate film being 30 nm or less; and at least part of the surface of said intermediate film is oxidized using a heat treatment, during which said intermediate film is in direct contact with an oxidizing atmosphere, especially air, the temperature of said substrate during said heat treatment not exceeding 150° C.

    Abstract translation: 本发明的主题是用至少一种金属M的氧化物的至少一部分获得涂覆在其表面的至少一部分的基板的方法,其物理厚度为30nm以下,所述氧化膜不是 所述方法包括以下步骤:选自金属M,金属M的氮化物,金属M的碳化物和氧化合物的氧化物的至少一种中间膜 金属M通过溅射沉积,所述中间膜不沉积在氧化钛基膜之上或之下,所述中间膜的物理厚度为30nm或更小; 并且所述中间膜的表面的至少一部分通过热处理而被氧化,在此期间所述中间膜与氧化气氛,特别是空气直接接触,所述热处理期间所述基板的温度不超过150℃。

    PROCESS FOR OBTAINING METALOXIDES BY LOW ENERGY LASER PULSES IRRADIATION OF METAL FILMS
    9.
    发明申请
    PROCESS FOR OBTAINING METALOXIDES BY LOW ENERGY LASER PULSES IRRADIATION OF METAL FILMS 审中-公开
    通过低能量激光脉冲获得金属氧化物的方法金属膜的辐照

    公开(公告)号:US20140227457A2

    公开(公告)日:2014-08-14

    申请号:US13715568

    申请日:2012-12-14

    CPC classification number: C23C14/5813 B05D3/06 C23C14/18 C23C14/35 C23C14/5853

    Abstract: The present invention relates to processes for obtaining metal oxides by irradiation of low energy laser pulses of metal layers, wherein said metals can be formed as simple metals, alloys, or multilayers. The present invention performs the oxidation of a thin metal film deposited on a substrate; e.g., glass (SiO2) or silicon (Si) by a laser-irradiation time of a few nanoseconds to femtoseconds at high repetition rate, time necessary to achieve a stoichiometry and a well-defined microscopic structure. Through the processes of the invention, it is possible to obtain complex structures and metal oxides at room temperature in a very short time and with very low energy consumption.

    Abstract translation: 本发明涉及通过照射金属层的低能量激光脉冲来获得金属氧化物的方法,其中所述金属可以形成为简单金属,合金或多层。 本发明对沉积在基板上的薄金属膜进行氧化; 例如通过几个纳秒的激光照射时间以高重复率飞秒的玻璃(SiO 2)或硅(Si),达到化学计量所需的时间和明确的微观结构。 通过本发明的方法,可以在非常短的时间内以非常低的能量消耗在室温下获得复杂的结构和金属氧化物。

    Method of manufacturing gallium nitride-based compound semiconductor light-emitting device, gallium nitride-based compound semiconductor light-emitting device, and lamp
    10.
    发明授权
    Method of manufacturing gallium nitride-based compound semiconductor light-emitting device, gallium nitride-based compound semiconductor light-emitting device, and lamp 有权
    制造氮化镓系化合物半导体发光元件,氮化镓系化合物半导体发光元件及灯的方法

    公开(公告)号:US08207003B2

    公开(公告)日:2012-06-26

    申请号:US12297989

    申请日:2007-04-23

    Abstract: Provided are a method of manufacturing a gallium nitride-based compound semiconductor light-emitting device with a low driving voltage (Vf) and high light outcoupling efficiency, a gallium nitride-based compound semiconductor light-emitting device, and a lamp. In the method of manufacturing the gallium nitride-based compound semiconductor light-emitting device, a transparent conductive oxide film 15 including a dopant is laminated on a p-type semiconductor layer 14 of a gallium nitride-based compound semiconductor device 1. The transparent conductive oxide film 15 is subjected to a laser annealing process using a laser after the lamination of the transparent conductive oxide film 15.

    Abstract translation: 提供一种制造具有低驱动电压(Vf)和高的光输出耦合效率的氮化镓基化合物半导体发光器件的方法,氮化镓基化合物半导体发光器件和灯。 在制造氮化镓系化合物半导体发光元件的方法中,在氮化镓系化合物半导体器件1的p型半导体层14上层叠包含掺杂剂的透明导电氧化物膜15.透明导电性 在透明导电氧化物膜15层压之后,使用激光对氧化膜15进行激光退火处理。

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