公开(公告)号：US09687868B2

公开(公告)日：2017-06-27

申请号：US14556608

申请日：2014-12-01

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Yasuhiro Sasaki ,  Mitsuru Kano

IPC: C23C16/00 ,  B05B13/02 ,  C23C14/56 ,  C23C16/455 ,  C23C16/54 ,  B65H20/02

CPC classification number: B05B13/0221 ,  B65H20/02 ,  B65H2301/51145 ,  C23C14/562 ,  C23C16/45551 ,  C23C16/545

Abstract: A rolled film formation apparatus including a first chamber in which a first precursor is applied to a substrate, a second chamber in which a second precursor is applied to the substrate such that the first and second precursors react with each other and that an atomic layer is deposited on the substrate, a third chamber in which a purge gas is applied to the substrate, and conveyance roller pairs which are positioned in the first, second and third chambers, and convey the substrate. Each conveyance roller pair includes a first roller and a second roller which sandwich the substrate in a thickness direction of the substrate. At least one of the first and second rollers has an outer peripheral surface having a surface unevenness. The substrate is moved back and forth among the first, second and third chambers. The atomic layer is deposited more than once on the substrate.

公开(公告)号：US20140020627A1

公开(公告)日：2014-01-23

申请号：US14034207

申请日：2013-09-23

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Mitsuru KANO ,  Yasuhiro Sasaki

IPC: C23C16/54

Abstract: A roll-to-roll thin film coating machine of the invention includes: a first vacuum chamber into which a first precursor gas is introduced; a second vacuum chamber into which a second precursor gas is introduced; a third vacuum chamber into which a purge gas is introduced, the purge gas discharging the first precursors and the second precursors; and a transfer mechanism transferring a windable base member through the first vacuum chamber, the second vacuum chamber, and the third vacuum chamber, the transfer mechanism including a holding unit holding both end portions of the base member in a width direction thereof.

Abstract translation: 本发明的卷对卷薄膜包衣机包括：第一真空室，其中引入第一前体气体; 第二真空室，其中引入第二前体气体; 第三真空室，其中引入吹扫气体，所述吹扫气体排出所述第一前体和所述第二前体; 以及传送机构，其通过所述第一真空室，所述第二真空室和所述第三真空室传送可卷绕基材，所述传送机构包括保持所述基部构件的宽度方向的两端部的保持单元。