公开(公告)号：US11088162B2

公开(公告)日：2021-08-10

申请号：US16284128

申请日：2019-02-25

Applicant: Toshiba Memory Corporation

Inventor： Kotaro Fujii ,  Satoshi Nagashima ,  Yumi Nakajima

IPC: H01L29/76 ,  H01L27/11582 ,  H01L27/11556 ,  H01L21/8234 ,  G11C16/04 ,  H01L27/1157 ,  H01L27/11524 ,  H01L27/11565 ,  G11C16/26 ,  G11C16/08 ,  H01L27/11519

Abstract: According to one embodiment, a semiconductor memory device includes: a first insulating layer provided between first and second interconnection layers; a first semiconductor layer provided between the first interconnection layer and the first insulating layer; a second semiconductor layer provided between the second interconnection layer and the first insulating layer; a first charge storage layer provided between the first interconnection layer and the first semiconductor layer; a second charge storage layer provided between the second interconnection layer and the second semiconductor layer; and a second insulating layer provided between the first interconnection layer and the second interconnection layer, between the first semiconductor layer and the second semiconductor layer, and between the first charge storage layer and the second charge storage layer.

公开(公告)号：US10600771B2

公开(公告)日：2020-03-24

申请号：US16126018

申请日：2018-09-10

Applicant: TOSHIBA MEMORY CORPORATION

Inventor： Jun Iijima ,  Yumi Nakajima

IPC: H01L23/48 ,  H01L23/52 ,  H01L25/18 ,  H01L25/065 ,  H01L25/00 ,  H01L23/00

Abstract: In one embodiment, a semiconductor device includes a first interconnection including a first extending portion extending in a first direction, and a first curved portion curved with respect to the first extending portion. The device further includes a second interconnection including a second extending portion extending in the first direction and adjacent to the first extending portion in a second direction, and a second curved portion curved with respect to the second extending portion. The device further includes a first plug provided on the first curved portion, or on a first non-opposite portion included in the first extending portion and not opposite to the second extending portion in the second direction. The device further includes a second plug provided on the second curved portion, or on a second non-opposite portion included in the second extending portion and not opposite to the first extending portion in the second direction.