公开(公告)号：US20190106784A1

公开(公告)日：2019-04-11

申请号：US16206346

申请日：2018-11-30

Applicant: TOSOH CORPORATION

Inventor： Masami MESUDA ,  Keitaro MATSUMARU ,  Koyata TAKAHASHI ,  Ryou KIKUCHI ,  Tetsuo SHIBUTAMI

IPC: C23C14/34 ,  C22C29/16 ,  H01J37/34 ,  C04B35/58 ,  C04B35/626 ,  C04B41/88 ,  C04B35/645 ,  C04B37/02 ,  C04B41/00 ,  C04B41/51

Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.