公开(公告)号：US10759710B2

公开(公告)日：2020-09-01

申请号：US16296934

申请日：2019-03-08

Applicant: TOTO LTD.

Inventor： Junichi Iwasawa ,  Hiroaki Ashizawa ,  Takuma Wada ,  Ryoto Takizawa ,  Toshihiro Aoshima ,  Yuuki Takahashi ,  Atsushi Kinjo

IPC: B32B9/00 ,  C04B35/505 ,  C01B11/24 ,  C01F7/02 ,  C01G25/02 ,  C04B35/622 ,  H01J37/28 ,  H01L21/67 ,  H01L21/687 ,  C01F17/206 ,  C01F17/265

Abstract: Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.