公开(公告)号：US10759710B2

公开(公告)日：2020-09-01

申请号：US16296934

申请日：2019-03-08

Applicant: TOTO LTD.

Inventor： Junichi Iwasawa ,  Hiroaki Ashizawa ,  Takuma Wada ,  Ryoto Takizawa ,  Toshihiro Aoshima ,  Yuuki Takahashi ,  Atsushi Kinjo

IPC: B32B9/00 ,  C04B35/505 ,  C01B11/24 ,  C01F7/02 ,  C01G25/02 ,  C04B35/622 ,  H01J37/28 ,  H01L21/67 ,  H01L21/687 ,  C01F17/206 ,  C01F17/265

Abstract: Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.

公开(公告)号：US09153417B2

公开(公告)日：2015-10-06

申请号：US14287016

申请日：2014-05-24

Applicant: TOTO LTD. ,  Hitachi High-Technologies Corporation

Inventor： Toshihiro Aoshima

IPC: H01J37/26 ,  G21K5/04 ,  H01J37/244 ,  H01J37/29 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/24475

Abstract: It is an object of the present invention to provide a back scattered electron detector suitable for implementing a method for determining beforehand in which region of a sample an X-ray detector can obtain an accurate X-ray detection image and perform an appropriate analysis. A Coax-BSE detector which is a back scattered electron detector includes a BSE element, a support member that supports the BSE element, and a fixing member to fix the support member to the X-ray detector, in which the fixing member fixes the support member by clamping a side portion on the distal end side which is an X-ray receiving side of a housing that covers the X-ray detector.

Abstract translation: 本发明的目的是提供一种背散射电子检测器，其适用于预先确定X射线检测器可以在哪个区域获得准确的X射线检测图像并进行适当的分析的方法。 作为背散射电子检测器的同轴BSE检测器包括BSE元件，支撑BSE元件的支撑构件和将支撑构件固定到X射线检测器的固定构件，其中固定构件固定支撑件 通过夹持作为覆盖X射线检测器的壳体的X射线接收侧的前端侧的侧部来构成。

公开(公告)号：US20140284477A1

公开(公告)日：2014-09-25

申请号：US14356191

申请日：2012-11-12

Applicant: Hitachi High-Technologies Corporation ,  TOTO LTD

Inventor： Yuta Ebine ,  Shinichi Tomita ,  Sukehiro Ito ,  Toshihiro Aoshima

IPC: H01J37/244 ,  H01J37/26 ,  H01J37/252

CPC classification number: H01J37/244 ,  H01J37/023 ,  H01J37/252 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24415 ,  H01J2237/24475

Abstract: In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15)

Abstract translation: 为了提供一种能够在执行X射线元素分析之前的阶段中对经过X射线分析的样本中的分析位置进行评估和区分的带电粒子辐射装置，并且使分析人员能够 本发明提供了一种具有X射线检测器的带电粒子辐射装置，其中第一背散射电子检测器（15）在同一轴线上 X射线检测器（12（25-30））的X射线检测面与X射线检测器（12）一体地或独立地设置，X射线检测器（X射线检测器 12）与第一背散射电子检测器（15）的背散射电子信号的检测同时或分开，

公开(公告)号：US11623898B2

公开(公告)日：2023-04-11

申请号：US16246852

申请日：2019-01-14

Applicant: TOTO LTD.

Inventor： Junichi Iwasawa ,  Toshihiro Aoshima

IPC: C04B35/505 ,  C04B35/622 ,  C23C4/12 ,  C23C16/44 ,  C04B41/87 ,  C04B41/50 ,  C04B41/00 ,  C23C24/04 ,  H01L21/683 ,  H01L21/687

Abstract: According to an aspect of the invention, there is provided a plasma-resistant member including: a base member; and a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant, the layer structural component including a first uneven structure, and a second uneven structure formed to be superimposed onto the first uneven structure, the second uneven structure having an unevenness finer than an unevenness of the first uneven structure.

公开(公告)号：US10221105B2

公开(公告)日：2019-03-05

申请号：US14651503

申请日：2013-12-27

Applicant: TOTO LTD.

Inventor： Junichi Iwasawa ,  Toshihiro Aoshima

IPC: C04B35/505 ,  C23C4/12 ,  H01L21/683 ,  H01L21/687 ,  C04B41/87 ,  C23C16/44 ,  C04B41/50 ,  C04B41/00 ,  C04B35/622 ,  C23C24/04

Abstract: According to an aspect of the invention, there is provided a plasma-resistant member including: a base member; and a layer structural component formed at a surface of the base member, the layer structural component including an yttria polycrystalline body and being plasma resistant, the layer structural component including a first uneven structure, and a second uneven structure formed to be superimposed onto the first uneven structure, the second uneven structure having an unevenness finer than an unevenness of the first uneven structure.

公开(公告)号：US09053902B2

公开(公告)日：2015-06-09

申请号：US14356191

申请日：2012-11-12

Applicant: Hitachi High-Technologies Corporation ,  TOTO LTD.

Inventor： Yuta Ebine ,  Shinichi Tomita ,  Sukehiro Ito ,  Toshihiro Aoshima

IPC: H01J37/26 ,  G21K5/00 ,  H01J37/252 ,  H01J37/244

CPC classification number: H01J37/244 ,  H01J37/023 ,  H01J37/252 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24415 ,  H01J2237/24475

Abstract: In order to provide a charged-particle radiation apparatus capable of evaluating and distinguishing the analysis position in a sample subjected to X-ray analysis in the stage before performing X-ray elemental analysis, and also making it possible for an analyst to perform, in a short period of time and without reworking, analysis for which high reliability is ensured, the present invention provides a charged-particle radiation apparatus provided with an X-ray detector, wherein a first back scattered electron detector (15) on the same axis as the X-ray detection surface of the X-ray detector (12 (25-30)) is disposed integrally with or independently from the X-ray detector (12), an X-ray signal being detected by the X-ray detector (12) simultaneously with or separately from detection of a back scattered electron signal by the first back scattered electron detector (15).

Abstract translation: 为了提供一种能够在执行X射线元素分析之前的阶段中对经过X射线分析的样本中的分析位置进行评估和区分的带电粒子辐射装置，并且使分析人员能够 本发明提供了一种具有X射线检测器的带电粒子辐射装置，其中第一背散射电子检测器（15）在同一轴线上 X射线检测器（12（25-30））的X射线检测面与X射线检测器（12）一体地或独立地设置，X射线检测器（X射线检测器 12）与第一后向散射电子检测器（15）的背散射电子信号的检测同时或分开。

公开(公告)号：US20140339436A1

公开(公告)日：2014-11-20

申请号：US14287016

申请日：2014-05-24

Applicant: TOTO LTD. ,  Hitachi High-Technologies Corporation

Inventor： Toshihiro Aoshima

IPC: H01J37/244 ,  H01J37/29

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/24475

Abstract: It is an object of the present invention to provide a back scattered electron detector suitable for implementing a method for determining beforehand in which region of a sample an X-ray detector can obtain an accurate X-ray detection image and perform an appropriate analysis. A Coax-BSE detector which is a back scattered electron detector includes a BSE element, a support member that supports the BSE element, and a fixing member to fix the support member to the X-ray detector, in which the fixing member fixes the support member by clamping a side portion on the distal end side which is an X-ray receiving side of a housing that covers the X-ray detector.

Abstract translation: 本发明的目的是提供一种背散射电子检测器，其适用于预先确定X射线检测器可以在哪个区域获得准确的X射线检测图像并进行适当的分析的方法。 作为背散射电子检测器的同轴BSE检测器包括BSE元件，支撑BSE元件的支撑构件和将支撑构件固定到X射线检测器的固定构件，其中固定构件固定支撑件 通过夹持作为覆盖X射线检测器的壳体的X射线接收侧的前端侧的侧部来构成。