公开(公告)号：US20240282612A1

公开(公告)日：2024-08-22

申请号：US18443461

申请日：2024-02-16

Applicant: TOTO LTD.

Inventor： Shunya MIYAZAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Ikuo ITAKURA

IPC: H01L21/683 ,  C23C16/458 ,  C23C16/46

CPC classification number: H01L21/6833 ,  C23C16/4586 ,  C23C16/463

Abstract: An electrostatic chuck 10 includes: a dielectric substrate 100 which includes a surface 110 on which a substrate W is to be placed and in which through holes (gas holes 150 and lift pin holes 160) that penetrate the surface 110 are formed; an electrode terminal 121 which is provided on a surface 120 of the dielectric substrate 100 on an opposite side to the surface 110; a base plate 200 to be joined to the surface 120 of the dielectric substrate 100; and a joining layer 300 which is provided between the dielectric substrate 100 and the base plate 200 and which is formed of an insulating material. When viewed from a direction perpendicular to the surface 110, spaces 340 are formed at positions within the joining layer 300 that do not overlap with any of the through holes and the electrode terminal 121.

公开(公告)号：US20240279810A1

公开(公告)日：2024-08-22

申请号：US18443418

申请日：2024-02-16

Applicant: TOTO LTD.

Inventor： Shunya MIYAZAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Ikuo ITAKURA

IPC: C23C16/458 ,  C23C16/455

CPC classification number: C23C16/4583 ,  C23C16/45561

Abstract: An electrostatic chuck includes: a dielectric substrate on which a plurality of first gas holes are formed; a base plate on which a second gas hole is formed; and a joining layer which is provided between the dielectric substrate and the base plate and which is formed of an insulating material. A first opening being an end of each of the first gas holes is formed in plurality on a surface of the dielectric substrate on a side of the joining layer. A second opening being an end of the second gas hole is formed on a surface of the base plate on a side of the joining layer. The second opening is communicated with the plurality of first openings via a communication groove formed on the surface of the base plate on the side of the joining layer.

公开(公告)号：US20240283379A1

公开(公告)日：2024-08-22

申请号：US18443441

申请日：2024-02-16

Applicant: TOTO LTD.

Inventor： Shunya MIYAZAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Ikuo ITAKURA

IPC: H02N13/00 ,  C23C16/458

CPC classification number: H02N13/00 ,  C23C16/458

Abstract: An electrostatic chuck includes: a dielectric substrate on which at least one first gas hole is formed; a base plate on which at least one second gas hole is formed; and a joining layer which is provided between the dielectric substrate and the base plate and which is formed of an insulating material. A first opening being an end of the at least one first gas hole is formed on a surface of the dielectric substrate. A second opening being an end of the at least one second gas hole is formed at a position which differs from the at least one first opening on a surface of the base plate. A communication groove is formed on the surface of the base plate.