公开(公告)号：US20240356465A1

公开(公告)日：2024-10-24

申请号：US18635344

申请日：2024-04-15

Applicant: TOTO LTD.

Inventor： Masafumi IKEGUCHI ,  Kouta KOBAYASHI ,  Yutaka MOMIYAMA

IPC: H02N13/00 ,  B23Q3/15

CPC classification number: H02N13/00 ,  B23Q3/15

Abstract: An electrostatic chuck 10 includes: a dielectric substrate 100; a base plate 200 formed of a metal material; and a joining layer 300 which is provided between the dielectric substrate 100 and the base plate 200. When a thickness of the joining layer 300 is T (μm) and a Young's modulus of the joining layer 300 at −100° C. is E (MPa), a condition expressed as E≤0.04×T−0.04 is satisfied.

公开(公告)号：US20240283379A1

公开(公告)日：2024-08-22

申请号：US18443441

申请日：2024-02-16

Applicant: TOTO LTD.

Inventor： Shunya MIYAZAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Ikuo ITAKURA

IPC: H02N13/00 ,  C23C16/458

CPC classification number: H02N13/00 ,  C23C16/458

Abstract: An electrostatic chuck includes: a dielectric substrate on which at least one first gas hole is formed; a base plate on which at least one second gas hole is formed; and a joining layer which is provided between the dielectric substrate and the base plate and which is formed of an insulating material. A first opening being an end of the at least one first gas hole is formed on a surface of the dielectric substrate. A second opening being an end of the at least one second gas hole is formed at a position which differs from the at least one first opening on a surface of the base plate. A communication groove is formed on the surface of the base plate.

公开(公告)号：US20210074521A1

公开(公告)日：2021-03-11

申请号：US17009265

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Minoru SUZUKI ,  Hitoshi SASAKI ,  Tsukasa SHIGEZUMI

IPC: H01J37/32 ,  H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is less than an average electrical resistance of the first portion.

公开(公告)号：US20200303232A1

公开(公告)日：2020-09-24

申请号：US16825318

申请日：2020-03-20

Applicant: TOTO LTD.

Inventor： Hitoshi SASAKI ,  Yutaka MOMIYAMA

IPC: H01L21/683 ,  B23Q3/15 ,  H01J37/32

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first electrode layer. The ceramic dielectric substrate has first and second major surfaces. The first electrode layer is provided inside the ceramic dielectric substrate. The first electrode layer is connected to a high frequency power supply. The first electrode layer has a first surface at the first major surface side and a second surface at a side opposite to the first surface. The first electrode layer includes a first portion including the first surface. The first electrode layer includes a ceramic component and a metal component. A concentration of the metal component in the first portion is higher than an average concentration of the metal component in the first electrode layer.

公开(公告)号：US20150255805A1

公开(公告)日：2015-09-10

申请号：US14641085

申请日：2015-03-06

Applicant: TOTO LTD.

Inventor： Shuhei TANAKA ,  Naoki WATANABE ,  Nobuo ISAKA ,  Masaki SATO ,  Takuya HOSHIKO ,  Osamu OKAMOTO ,  Shigeru ANDO ,  Seiki FURUYA ,  Yutaka MOMIYAMA ,  Yasuo KAKINUMA ,  Kiyoshi HAYAMA

IPC: H01M8/02 ,  H01M8/12

CPC classification number: H01M8/0247 ,  H01M4/64 ,  H01M4/70 ,  H01M8/0206 ,  H01M8/0232 ,  H01M8/0256 ,  H01M8/0271 ,  H01M8/0286 ,  H01M8/0297 ,  H01M8/12 ,  H01M8/124 ,  H01M8/2404 ,  H01M8/2425 ,  H01M8/243 ,  H01M8/2457 ,  H01M2008/1293 ,  H01M2300/0074 ,  Y02P70/56

Abstract: To provide SOFC and method for manufacturing same, capable of preventing breakage of fuel cell electrodes, and of securing an electrical connection between fuel cells and a current collector. SOFC 1 comprising a cell array composed of fuel cells 16, and current collector 82 connected to electrodes formed on fuel cells 16, wherein current collector 82 is a metal plate on which attaching holes 84 are formed; elastic pieces 84a are provided on each attaching hole 84; current collector 82 is attached to the cell array using elastic pieces 84a, by the insertion of fuel cell 16 into attaching holes 84; and elastic pieces 84a are affixed to fuel cells 16 by electrode protective layer 152 so that the positions of elastic pieces 84a are not displaced relative to the electrodes on fuel cells 16.

Abstract translation: 提供用于制造其的SOFC及其制造方法，能够防止燃料电池电极的断裂，并且确保燃料电池与集电体之间的电连接。 包括由燃料电池16构成的电池阵列的SOFC 1和与燃料电池16上形成的电极连接的集电体82，其中集电器82是形成有连接孔84的金属板; 弹性件84a设置在每个安装孔84上; 通过将燃料电池16插入到安装孔84中，使用弹性片84a将集电器82附接到电池阵列; 并且弹性片84a通过电极保护层152固定到燃料电池16，使得弹性片84a的位置不相对于燃料电池16上的电极移位。

公开(公告)号：US20150004520A1

公开(公告)日：2015-01-01

申请号：US14311929

申请日：2014-06-23

Applicant: TOTO LTD.

Inventor： Shuhei TANAKA ,  Naoki WATANABE ,  Nobuo ISAKA ,  Takuya HOSHIKO ,  Masaki SATO ,  Yutaka MOMIYAMA ,  Shigeru ANDO ,  Seiki FURUYA ,  Kiyoshi HAYAMA ,  Osamu OKAMOTO

IPC: H01M8/02

CPC classification number: H01M8/2404 ,  H01M8/0267 ,  H01M8/0271 ,  H01M8/0273 ,  H01M8/0276 ,  H01M8/0282 ,  H01M8/2425 ,  H01M8/243 ,  H01M8/2457 ,  H01M8/2475 ,  H01M8/2485 ,  H01M2008/1293 ,  Y02P70/56

Abstract: The present invention is a manufacturing method for a solid oxide fuel cell apparatus in which multiple fuel cells are adhered and affixed to a first affixing member attached within a fuel cell module, the method includes steps of: inserting one end portion of each fuel cell into respective insertion holes provided in a first affixing member; respectively positioning one end portion of each fuel cell inserted into each insertion hole relative to a fuel cell module; respectively positioning the other end portion of each fuel cell at a predetermined position relative to the fuel cell module; applying ceramic adhesive onto the first affixing member into which each of the fuel cells is inserted; and hardening the applied ceramic adhesive and affixing each of the fuel cells to the first affixing member.

Abstract translation: 本发明是一种固体氧化物燃料电池装置的制造方法，其中多个燃料电池被附着并固定在附着在燃料电池组件内的第一固定件上，该方法包括以下步骤：将每个燃料电池的一个端部插入 相应的插入孔设置在第一固定构件中; 分别相对于燃料电池模块定位插入每个插入孔中的每个燃料电池的一个端部; 分别将每个燃料电池的另一端部相对于燃料电池模块定位在预定位置; 将陶瓷粘合剂施加到每个燃料电池插入其中的第一固定构件上; 并使应用的陶瓷粘合剂硬化并将每个燃料电池固定到第一固定构件。

公开(公告)号：US20210074571A1

公开(公告)日：2021-03-11

申请号：US17009365

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Minoru SUZUKI ,  Hitoshi SASAKI ,  Tsukasa SHIGEZUMI

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the fourth surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US20210074525A1

公开(公告)日：2021-03-11

申请号：US17009216

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Minoru SUZUKI ,  Hitoshi SASAKI ,  Tsukasa SHIGEZUMI

IPC: H01J37/32 ,  H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is greater than an average electrical resistance of the first portion.

公开(公告)号：US20200035468A1

公开(公告)日：2020-01-30

申请号：US16523686

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01J37/32 ,  H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided inside the ceramic dielectric substrate and connected to a high frequency power supply. The first electrode layer is provided between the first major surface and the second major surface. The first electrode layer has a first surface and a second surface. The first electrode layer includes a first region including the first surface, a second region including the second surface, and a third region positioned between the first region and the second region. A porosity of the first region is lower than a porosity of the third region.

公开(公告)号：US20160133977A1

公开(公告)日：2016-05-12

申请号：US14937098

申请日：2015-11-10

Applicant: TOTO LTD.

Inventor： Seiki FURUYA ,  Shigeru ANDO ,  Yutaka MOMIYAMA ,  Kiyoshi HAYAMA ,  Osamu OKAMOTO ,  Naoki WATANABE ,  Nobuo ISAKA ,  Masaki SATO ,  Yasuo KAKINUMA ,  Shuhei TANAKA ,  Hironobu MURAKAMI ,  Takuya HOSHIKO

IPC: H01M8/10 ,  H01M8/02 ,  H01M8/12

CPC classification number: H01M8/1004 ,  H01M4/8621 ,  H01M4/886 ,  H01M4/9025 ,  H01M8/0202 ,  H01M8/1213 ,  H01M8/1246 ,  H01M2008/1293 ,  H01M2300/0074 ,  Y02E60/525 ,  Y02P70/56

Abstract: To provide a solid oxide fuel cell with improved durability while obtaining sufficient electricity generating performance. The present invention is a method for manufacturing solid oxide fuel cells (16) in which electricity generating elements (16a) are connected by an interconnector (102), including: a support body forming step (S1); surface deposition steps (S4, S9) for forming in sequence a first and second functional layer on a porous support body; an outermost layer deposition step (S13) for forming an outermost functional layer (101) in which slurry in liquid droplet form is continuously jetted to form dots, and an outermost functional layer is formed by the agglomeration of dots to be thicker than a first functional layer (98); and a sintering step (S14) for sintering functional layers; wherein in the outermost functional layer, traces of agglomerated dots remain and ring-shaped cracks surrounding each dot trace are formed by the sintering process.

Abstract translation: 提供具有改善的耐久性的固体氧化物燃料电池，同时获得足够的发电性能。 本发明是一种固体氧化物燃料电池（16）的制造方法，其中发电元件（16a）通过互连器（102）连接，包括：支撑体形成步骤（S1）; 表面沉积步骤（S4，S9），用于依次在多孔支撑体上形成第一和第二功能层; 用于形成最外层功能层（101）的最外层沉积步骤（S13），其中液滴形式的浆液被连续地喷射以形成点，最外层的功能层通过点集合而形成，比第一功能层 层（98）; 和烧结功能层的烧结步骤（S14） 其中在最外层的功能层中残留有痕迹的团聚点，并且通过烧结工艺形成围绕每个点迹的环状裂纹。