公开(公告)号：US20230317495A1

公开(公告)日：2023-10-05

申请号：US18121627

申请日：2023-03-15

Applicant: TOTO LTD.

Inventor： Akihito ONO ,  Tetsuro ITOYAMA ,  Tomoki UMETSU ,  Jumpei UEFUJI

IPC: H01L21/683 ,  H01J37/32 ,  H05B3/26

CPC classification number: H01L21/6833 ,  H01J37/32715 ,  H05B3/265 ,  H01J2237/2007

Abstract: An electrostatic chuck includes a base plate, a first heater element, and a plurality of first power feeding terminals. The base plate includes a communicating path having a spiral shape. The first heater element includes a plurality of first zones. The plurality of first power feeding terminals feeds power to the plurality of first zones. Each of the plurality of first zones includes a first heater line and a pair of first power feeding portions feeding power to the first heater line. The pair of first power feeding portions is electrically connected to the plurality of first power feeding terminals. The plurality of first power feeding terminals includes a first and a second annular portion. The communicating path includes a first circumferential portion surrounding the second annular portion between the first annular portion and the second annular portion when viewed along a stacking direction.

公开(公告)号：US20230311258A1

公开(公告)日：2023-10-05

申请号：US18121647

申请日：2023-03-15

Applicant: TOTO LTD.

Inventor： Akihito ONO ,  Masafumi IKEGUCHI ,  Tomoki UMETSU ,  Jumpei UEFUJI

IPC: B23Q3/15

CPC classification number: B23Q3/15 ,  H01L21/6833

Abstract: An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction. The second direction is perpendicular to the first direction. The second direction is from the other side surface toward the one side surface of the pair of side surfaces. The plurality of concave portions is convex in an opposite direction of the second direction.

公开(公告)号：US20250006540A1

公开(公告)日：2025-01-02

申请号：US18753835

申请日：2024-06-25

Applicant: TOTO LTD.

Inventor： Tetsuro ITOYAMA ,  Jumpei UEFUJI ,  Tomoki UMETSU

IPC: H01L21/683 ,  C23C16/458

Abstract: An electrostatic chuck includes a dielectric substrate, a base plate which is a metallic member joined to the dielectric substrate and in which a gas hole is formed, and a vent plug arranged inside the gas hole. The vent plug has a porous section which is a section made of a porous ceramic with air permeability, and a dense section which is a section made of a dense ceramic without air permeability, and which surrounds a whole circumference of the porous section from an outer circumference side. The porous section and the dense section are formed together into one piece by sintering without sandwiching a joining material made of a material other than a ceramic.

公开(公告)号：US20220310433A1

公开(公告)日：2022-09-29

申请号：US17693623

申请日：2022-03-14

Applicant: TOTO LTD.

Inventor： Akihito ONO ,  Jumpei UEFUJI ,  Tomoki UMETSU ,  Tatsuya HAYAKAWA

IPC: H01L21/683 ,  H01J37/32

Abstract: An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The ceramic dielectric substrate includes a first major surface, a second major surface, a groove part, and a plurality of cooling gas holes. The groove part includes first and second circumferential grooves, and first and second radial-direction grooves. The plurality of cooling gas holes includes first and second holes. The first hole overlaps the first radial-direction groove. The second hole overlaps the second radial-direction groove. The base plate includes a gas inlet path that supplies the cooling gas to the first and second holes. The first circumferential groove includes first and second end portions. The second circumferential groove includes third and fourth end portions. The third end portion and the fourth end portion do not overlap the first end portion in the radial direction.

公开(公告)号：US20250105045A1

公开(公告)日：2025-03-27

申请号：US18883506

申请日：2024-09-12

Applicant: TOTO LTD.

Inventor： Tetsuro ITOYAMA ,  Jumpei UEFUJI ,  Tomoki UMETSU

IPC: H01L21/683 ,  H01J37/32

Abstract: An electrostatic chuck (10) includes a dielectric substrate (100) and a heater unit (300) configured to heat the dielectric substrate (100). The heater unit (300) includes a power supply portion (390) configured to receive a supply of power from an external source, a heat generation portion (331) that is a conductor drawn in a linear shape and configured to receive the supply of power from the power supply portion (390) and generate heat, and a bypass layer (370) connecting the power supply portion (390) and the heat generation portion (331). The heat generation portion (331) includes a widened portion (332) that is a section in which a line width of the heat generation portion (331) is locally widened. The bypass layer (370) is connected to the heat generation portion (331) at a plurality of locations in the widened portion (332).

公开(公告)号：US20250006539A1

公开(公告)日：2025-01-02

申请号：US18753761

申请日：2024-06-25

Applicant: TOTO LTD.

Inventor： Tetsuro ITOYAMA ,  Jumpei UEFUJI ,  Tomoki UMETSU

IPC: H01L21/683 ,  C23C16/458

Abstract: An electrostatic chuck includes a dielectric substrate, a base plate which is a metallic member joined to the dielectric substrate and in which a gas hole is formed, and a vent plug arranged inside the gas hole. The vent plug has a porous section which is a section made of a porous ceramic with air permeability, and a dense section which is a section made of a dense ceramic without air permeability, and which surrounds a whole circumference of the porous section from an outer circumference side. The porous section and the dense section are formed together into one piece by sintering without sandwiching a joining material made of a material other than a ceramic.