ELECTROSTATIC CHUCK
    1.
    发明申请

    公开(公告)号:US20210074521A1

    公开(公告)日:2021-03-11

    申请号:US17009265

    申请日:2020-09-01

    Applicant: TOTO LTD.

    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is less than an average electrical resistance of the first portion.

    SOLID OXIDE FUEL CELL SYSTEM
    2.
    发明申请
    SOLID OXIDE FUEL CELL SYSTEM 有权
    固体氧化物燃料电池系统

    公开(公告)号:US20130209903A1

    公开(公告)日:2013-08-15

    申请号:US13852364

    申请日:2013-03-28

    Applicant: TOTO LTD.

    Abstract: The present invention provides a solid oxide fuel cell system capable of preventing excess temperature rises while increasing overall energy efficiency. The present invention is a solid oxide fuel cell system, including: a fuel cell module, a fuel supply device, a heat storing material, and a controller which, based on power demand, increases the fuel utilization rate when output power is high and to lower it when output power is low, and changes the electrical power actually output at a delay after changing the fuel supply amount. The controller has a stored heat estimating circuit for estimating the residual heat based on fuel supply and on power output at a delay relative thereto. When a utilizable amount of heat is accumulated in the heat storage material, the fuel supply is reduced so that the fuel utilization rate increases relative to the same electrical power.

    Abstract translation: 本发明提供一种固体氧化物燃料电池系统,其能够在提高整体能量效率的同时防止过度的温度升高。 本发明是一种固体氧化物型燃料电池系统,其特征在于,包括:燃料电池模块,燃料供给装置,蓄热材料以及控制装置,其根据电力需求,提高输出功率高时的燃料利用率, 在输出功率低时将其降低,并且在改变燃料供给量之后以延迟实际输出电力。 所述控制器具有存储的热估计电路,用于基于燃料供应估计剩余热量,并且在相对于其延迟的情况下估计功率输出。 当可利用的热量积聚在蓄热材料中时,燃料供应减少,使得燃料利用率相对于相同的电力而增加。

    ELECTROSTATIC CHUCK
    3.
    发明申请

    公开(公告)号:US20210074572A1

    公开(公告)日:2021-03-11

    申请号:US17009432

    申请日:2020-09-01

    Applicant: TOTO LTD.

    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the third surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

    SOLID OXIDE FUEL CELL DEVICE
    4.
    发明申请
    SOLID OXIDE FUEL CELL DEVICE 审中-公开
    固体氧化物燃料电池装置

    公开(公告)号:US20140234736A1

    公开(公告)日:2014-08-21

    申请号:US14260699

    申请日:2014-04-24

    Applicant: TOTO LTD.

    Abstract: The present invention is a solid oxide fuel cell device with a load following function for changing a fuel supply rate in response to a load defined as a required power determined by demand power. The solid oxide fuel cell device comprises a fuel cell module having a fuel cell stack composed of a plurality of solid oxide fuel cells and a reformer for reforming fuel and supplying the fuel to the fuel cells; an inverter for receiving electrical power generated by the fuel cell module and converting the power to alternating power; a command power value setting device for setting a command power value to be generated by the fuel cell module based on the amount of load; a fuel control device for determining an fuel supply rate and supplying the fuel by the fuel supply rate to the fuel cells so as to generate the command power value; an inverter permitted power value instruction device for instructing to the inverter an inverter permitted power value corresponding to the command power value, which is the permitted amount of power to be extracted from the fuel cell module, after the fuel has been supplied by the fuel supply rate to the fuel cells by the fuel control device; and an inverter permitted power value change device for changing an amount of change per unit time in a next inverter permitted power value based on a temperature inside the fuel cell module and outputting the amount of change per unit time to the inverter permitted power value instruction device; wherein the inverter permitted power value change device changes the amount of change per unit time in the inverter permitted power value to be larger, the higher the temperature is, in a temperature region equal to or lower than a first predetermined temperature, and to be smaller, the higher the temperature is, in a temperature region equal to or higher than a second predetermined temperature.

    Abstract translation: 本发明是一种固体氧化物燃料电池装置,其具有负载跟随功能,用于响应于被定义为由需求功率确定的所需功率的负载来改变燃料供应速率。 固体氧化物型燃料电池装置具备燃料电池模块,该燃料电池模块具有由多个固体氧化物燃料电池构成的燃料电池堆和用于重整燃料并将燃料供给燃料电池的重整器; 用于接收由燃料电池模块产生的电力并将电力转换成交流电力的逆变器; 指令功率值设定装置,用于根据负载量设定燃料电池模块生成的指令功率值; 燃料控制装置,用于确定燃料供应速率并通过燃料供应速率向燃料电池供应燃料,以产生指令功率值; 逆变器允许电力值指示装置,用于向所述逆变器指示在由所述燃料供给供给燃料之后,所述逆变器允许功率值对应于所述指令功率值,所述指令功率值是从所述燃料电池模块提取的电力的允许量 通过燃料控制装置对燃料电池的速率; 以及逆变器允许电力值变更装置,用于根据燃料电池模块内的温度来改变下一个逆变器允许电力值中的每单位时间的变化量,并将每单位时间的变化量输出到逆变器允许电力值指示装置 ; 其中,所述逆变器允许功率值变更装置将所述逆变器允许功率值中的每单位时间的变化量变更为越高,所述温度越高,在等于或低于第一预定温度的温度区域中,并且变小 在等于或高于第二预定温度的温度区域中,温度越高。

    ELECTROSTATIC CHUCK
    5.
    发明申请

    公开(公告)号:US20210074571A1

    公开(公告)日:2021-03-11

    申请号:US17009365

    申请日:2020-09-01

    Applicant: TOTO LTD.

    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the fourth surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

    ELECTROSTATIC CHUCK
    6.
    发明申请

    公开(公告)号:US20210074525A1

    公开(公告)日:2021-03-11

    申请号:US17009216

    申请日:2020-09-01

    Applicant: TOTO LTD.

    Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is greater than an average electrical resistance of the first portion.

Patent Agency Ranking