Method and apparatus for irradiation of active energy beam
    1.
    发明申请
    Method and apparatus for irradiation of active energy beam 失效
    用于辐射活性能量束的方法和装置

    公开(公告)号:US20040178363A1

    公开(公告)日:2004-09-16

    申请号:US10794672

    申请日:2004-03-05

    Abstract: A target object to be irradiated is transported into an irradiating chamber through a transport inlet for irradiation with an active energy beam under an inert gas atmosphere in an active energy beam irradiating section included in the irradiating chamber and, then is transported out of the irradiating chamber. When the object is subject to above steps, the gas flow resistance at the transport outlet is controlled such that the active energy beam irradiation is carried out under the condition of X/Ynull1, where X represents the gas amount passing through the transport inlet, and Y represents the gas amount passing through the transport outlet.

    Abstract translation: 要照射的目标物体通过用于在惰性气体气氛中的活性能量束照射的输送入口在包含在照射室中的活性能量束照射部分中被输送到照射室中,然后被运送到照射室 。 当物体经受上述步骤时,控制输送出口处的气体流动阻力,使得活性能量束照射在X / Y> = 1的条件下进行,其中X表示通过运输的气体量 入口,Y表示通过运输出口的气体量。

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