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公开(公告)号：US20250006463A1
公开(公告)日：2025-01-02
申请号：US18815903
申请日：2024-08-27
Applicant: TRUMPF Huettinger Sp. Z O. O.
Inventor： Andrzej Klimczak , Andrzej Gieraltowski , Michal Balcerak
IPC: H01J37/32
Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The HP generator is at least partially directly liquid cooled, by being immersed in a dielectric cooling liquid.
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公开(公告)号：US11674981B2
公开(公告)日：2023-06-13
申请号：US17161768
申请日：2021-01-29
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
IPC: G01R19/00 , G01R19/165 , G01R27/02 , H01J37/34 , H01J37/32
CPC classification number: G01R19/0061 , G01R19/16566 , G01R27/02 , H01J37/32082 , H01J37/3476 , H01J2237/24564 , H01J2237/332
Abstract: An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.
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公开(公告)号：US09818579B2
公开(公告)日：2017-11-14
申请号：US14325499
申请日：2014-07-08
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Pawel Ozimek , Rafal Bugyi , Robert Dziuba , Andrzej Klimczak , Marcin Zelechowski
CPC classification number: H01J37/32064 , H01J37/32091 , H01J37/32174 , H01M10/42 , H01M10/425 , H01M10/4264 , H01M10/44 , H05H1/36 , Y02E60/12
Abstract: According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.
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公开(公告)号：US20240420922A1
公开(公告)日：2024-12-19
申请号：US18814717
申请日：2024-08-26
Applicant: TRUMPF Huettinger Sp. Z O. O.
Inventor： Andrzej Klimczak , Andrzej Gieraltowski , Michal Balcerak
IPC: H01J37/32
Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The HP generator further includes a respective damping circuit positioned between each pair of adjacent LP generators of the plurality of LP generators in an open chain configuration. The damping circuit includes a resistor and/or an inductor.
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公开(公告)号：US11798786B2
公开(公告)日：2023-10-24
申请号：US17161808
申请日：2021-01-29
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
CPC classification number: H01J37/32174 , H03F3/2176
Abstract: A power converter configured to generate a high-frequency power signal comprises at least one amplifier stage having first and second amplifier paths each having an amplifier, the first amplifier path outputting a first amplifier path output signal and the second amplifier path outputting a second amplifier path output signal that, has a phase shift relative to the first amplifier path output signal greater than 0° and less than 180°. The first and second amplifier paths are connected to a phase-shifting coupler that is configured to couple the first and second amplifier path output signals to form the high-frequency power signal. At least one amplifier of the first and second amplifier paths comprises a SiC MOSFET.
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Patent Agency Ranking
公开(公告)号：US20210159872A1
公开(公告)日：2021-05-27
申请号：US17163605
申请日：2021-02-01
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Marcin Golan , Pawel Ozimek
Abstract: A balun configured for a power range between 500 W and 5 kW output includes a balanced signal port comprising a first connection and a second connection and further includes a single-ended signal port comprising a third connection and a fourth connection, the fourth connection being connected to ground. In addition, the balun includes a first capacitor disposed between the first connection and a first end of a first resistor and a second capacitor disposed between the second connection and the first end of the first resistor. A second end of the first resistor is connected to ground.
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公开(公告)号：US20240421604A1
公开(公告)日：2024-12-19
申请号：US18814669
申请日：2024-08-26
Applicant: TRUMPF Huettinger Sp. Z O. O.
Inventor： Andrzej Klimczak , Andrzej Gieraltowski , Michal Balcerak
Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a contribution of each LP generator to an output value of the HP generator, in a way that one or a combination of following is accomplished: (i) the output of the coupling and/or the output of the HP generator is a step function, (ii) the plurality of LP generators is activated sequentially during a pulse, (iii) at least one amplitude step is lower than 1 kV, and (iv) the plurality of LP generators is connected by switching only.
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公开(公告)号：US20210156893A1
公开(公告)日：2021-05-27
申请号：US17161768
申请日：2021-01-29
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Konrad Lewandowski , Marcin Golan
IPC: G01R19/00 , G01R19/165 , G01R27/02 , H01J37/34 , H01J37/32
Abstract: An arc detector for detecting arcs in an RF plasma system includes at least two inputs configured to connect to an RF source, at least one output configured to connect to a plasma load, and a 3 dB coupler connected to the at least two inputs and the at least one output. The arc detector further includes a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, and a differentiator configured to differentiate the evaluation quantity. The arc detector additionally includes a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.
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公开(公告)号：US20140320015A1
公开(公告)日：2014-10-30
申请号：US14325499
申请日：2014-07-08
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Pawel Ozimek , Rafal Bugyi , Robert Dziuba , Andrzej Klimczak , Marcin Zelechowski
IPC: H01J37/32
CPC classification number: H01J37/32064 , H01J37/32091 , H01J37/32174 , H01M10/42 , H01M10/425 , H01M10/4264 , H01M10/44 , H05H1/36 , Y02E60/12
Abstract: According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.
Abstract translation: 根据本发明的第一方面，通过等离子体处理电源电路来实现减少存储在负载中的电能或用于连接电源与负载的一个或多个引线中的电能，该等离子体处理电源电路包括与至少一个 导线用于启用/中断负载电源; 第一电气非线性装置; 与第一电气非线性装置串联布置的能量存储装置; 以及与所述能量存储装置可操作地连接的预充电电路，所述预充电电路被配置为在能量到所述负载的电力的同时将所述能量存储装置充电到预定的能量水平。
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公开(公告)号：US20240429025A1
公开(公告)日：2024-12-26
申请号：US18817255
申请日：2024-08-28
Applicant: TRUMPF Huettinger Sp. z o. o.
Inventor： Andrzej Klimczak , Andrzej Gieraltowski , Michal Balcerak
IPC: H01J37/32
Abstract: A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the LP generators are electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the LP generators. The control unit is configured to select a respective contribution of each LP generator in order to generate a rise and/or a decay of a pulse at the output of the coupling. A charging energy of the LP generators is supplied over a transformer with a primary winding and a secondary winding for each LP generator. The secondary winding is connected to a rectifier, which is connected to the energy storage component of the corresponding LP generator, and/or a plurality of the primary windings is connected in series.
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