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    Chemical mechanical polishing apparatus having conditioning cleaning device
    3.
    发明申请
    Chemical mechanical polishing apparatus having conditioning cleaning device 失效
    具有调理清洗装置的化学机械抛光装置

    公开(公告)号：US20050070215A1

    公开(公告)日：2005-03-31

    申请号：US10947332

    申请日：2004-09-23

    申请人： Tae-Bong Kim

    发明人： Tae-Bong Kim

    IPC分类号： H01L21/304 ,  B08B3/02 ,  B08B3/10 ,  B24B37/04 ,  B24B53/007 ,  B24B5/00

    CPC分类号： B24B53/017 ,  B08B3/02 ,  B08B3/102

    摘要： A chemical mechanical polishing apparatus having a conditioning cleaning device capable of efficiently cleaning a diamond pad is disclosed. The conditioner cleaning device of the present invention is capable of increasing cleaning efficiency by uniformly spraying a cleaning solution on upper and side faces of a diamond disk. When the diamond disk is efficiently cleaned, the process reliability of a wafer is increased.

    摘要翻译： 公开了一种具有能够有效地清洗金刚石垫的调理清洁装置的化学机械抛光装置。 本发明的调理剂清洗装置能够通过在金刚石圆盘的上侧面和侧面均匀地喷涂清洗液来提高清洁效率。 当金刚石盘被有效地清洁时，晶片的工艺可靠性增加。

    Microwave oven with different phase microwave streams
    4.
    发明授权
    Microwave oven with different phase microwave streams 失效
    微波炉具有不同相位的微波流

    公开(公告)号：US5932131A

    公开(公告)日：1999-08-03

    申请号：US923288

    申请日：1997-09-04

    申请人： Ki-Hun Joo ,  Tae-Bong Kim ,  Eung-Sup Lee ,  Jong-Sup Shin

    发明人： Ki-Hun Joo ,  Tae-Bong Kim ,  Eung-Sup Lee ,  Jong-Sup Shin

    IPC分类号： F24C7/02 ,  H05B6/70 ,  H05B6/74

    CPC分类号： H05B6/708

    摘要： A microwave oven is disclosed in which the structure of the wave guiding tube is improved such that the variation of the impedance is minimized in spite of the variation of the load of the food, thereby making it possible to maintain the output of the microwave oven at a constant level regardless of the load of the food. The microwaves are divided into a plurality of wave streams, and the wave streams are made to have different phases. The microwave oven includes an input wave guiding tube coupled with a magnetron, for receiving microwaves from the magnetron. A first output wave guiding tube communicates to the input wave guiding tube, for receiving the microwaves from the input wave guiding tube to diffusely irradiate the microwaves into a cavity. A second wave guiding tube communicates to the input wave guiding tube, for converting the microwaves to a phase different from that of the first wave guiding tube to irradiate them into the cavity.

    摘要翻译： 公开了一种微波炉，其中改进波导管的结构，使得尽管食物的负载变化，阻抗的变化最小化，从而使得可以将微波炉的输出保持在 一个恒定的水平，不管食物的负担。 微波被分成多个波流，波流被制成具有不同的相位。 微波炉包括与磁控管耦合的输入波导管，用于从磁控管接收微波。 第一输出波导管与输入波导管连通，用于接收来自输入波导管的微波，以将微波漫射到空腔中。 第二波导管与输入波导管连通，用于将微波转换成与第一波导管不同的相位，以将它们照射到腔中。

    Chemical mechanical polishing apparatus having conditioning cleaning device
    5.
    发明授权
    Chemical mechanical polishing apparatus having conditioning cleaning device 失效
    具有调理清洗装置的化学机械抛光装置

    公开(公告)号：US07025663B2

    公开(公告)日：2006-04-11

    申请号：US10947332

    申请日：2004-09-23

    申请人： Tae-Bong Kim

    发明人： Tae-Bong Kim

    IPC分类号： B24B7/22 ,  B24B53/00

    CPC分类号： B24B53/017 ,  B08B3/02 ,  B08B3/102

    摘要： A chemical mechanical polishing apparatus having a conditioning cleaning device capable of efficiently cleaning a diamond pad is disclosed. The conditioner cleaning device of the present invention is capable of increasing cleaning efficiency by uniformly spraying a cleaning solution on upper and side faces of a diamond disk. When the diamond disk is efficiently cleaned, the process reliability of a wafer is increased.

    摘要翻译： 公开了一种具有能够有效地清洗金刚石垫的调理清洁装置的化学机械抛光装置。 本发明的调理剂清洗装置能够通过在金刚石圆盘的上侧面和侧面均匀地喷涂清洗液来提高清洁效率。 当金刚石盘被有效地清洁时，晶片的工艺可靠性增加。

    Microwave oven
    6.
    发明授权
    Microwave oven 失效
    微波炉

    公开(公告)号：US6066841A

    公开(公告)日：2000-05-23

    申请号：US131170

    申请日：1998-08-07

    申请人： Tae-Bong Kim ,  Ki-Hun Joo ,  Jong-Sup Shin ,  Eung-Sup Lee

    发明人： Tae-Bong Kim ,  Ki-Hun Joo ,  Jong-Sup Shin ,  Eung-Sup Lee

    IPC分类号： H05B6/70 ,  H05B6/72 ,  H05B6/74

    CPC分类号： H05B6/707 ,  H05B6/6402

    摘要： A microwave oven adapted to radiate microwaves of mutually reverse phases to minimize impedance variation of a waveguide in response to load change of foodstuff, thereby maintaining an output of the microwave at a constant level regardless of load amount of the foodstuff and maintaining an electric field distribution in a cavity at a constant level as well.

    摘要翻译： 一种适于辐射相互相反的微波的微波炉，以使得响应于食品的负载变化的波导的阻抗变化最小化，从而将微波的输出保持在恒定水平，而与食品的负载量无关并保持电场分布 在恒定水平的空腔中。

    Microwave oven having vertically adjustable turntable
    7.
    发明授权
    Microwave oven having vertically adjustable turntable 失效
    微波炉具有可调节的转台

    公开(公告)号：US5695672A

    公开(公告)日：1997-12-09

    申请号：US680817

    申请日：1996-07-16

    申请人： Tae-Bong Kim

    发明人： Tae-Bong Kim

    IPC分类号： H05B6/78 ,  F24C7/02 ,  F24C7/08 ,  F24C15/16 ,  H05B6/68 ,  H05B6/80

    CPC分类号： H05B6/6411

    摘要： A microwave oven has a cooking chamber in which a vertically movable turntable is disposed. During the onset of a cooking operation, a control mechanism automatically raises the turntable in step-by-step fashion, and the amount of high frequency waves reflected from the cooking chamber is detected at each vertical position of the turntable. Then, the vertical position of the turntable at which the detected amount of reflective frequency was the lowest is determined, and the turntable is set at that position to continue the cooking operation. If the detected amount of reflective frequency changes, a new vertical position of the turntable at which the amount of reflective frequency is lowest, is re-determined, and the turntable is set at that new position.

    摘要翻译： 微波炉具有设置有可升降转台的烹调室。 在烹饪操作开始时，控制机构以逐步的方式自动升高转盘，并且在转盘的每个垂直位置处检测从烹饪室反射的高频波的量。 然后，确定反射频率的检测量最低的转盘的垂直位置，并将转台设定在该位置以继续烹饪操作。 如果检测到的反射频率的变化，则重新确定反射频率的量最小的转盘的新的垂直位置，并将转盘设定在该新位置。