公开(公告)号：US20190148203A1

公开(公告)日：2019-05-16

申请号：US16044765

申请日：2018-07-25

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chueh-Chi KUO ,  Tsung-Yen LEE ,  Chia-Hsin CHOU ,  Tzung-Chi FU ,  Li-Jui CHEN ,  Po-Chung CHENG ,  Che-Chang HSU

IPC: H01L21/683 ,  G03F1/24 ,  G03F7/20

Abstract: A reticle holding tool is provided. The reticle holding tool includes a housing including a top housing member and a lateral housing member. The lateral housing member extends from the top housing member and terminates at a lower edge. The reticle holding tool further includes a reticle chuck. The reticle chuck is positioned in the housing and configured to secure a reticle. The reticle holding tool also includes a gas delivery assembly. The gas delivery assembly is positioned within the housing and configured to supply gas into the housing.

公开(公告)号：US20200350194A1

公开(公告)日：2020-11-05

申请号：US16926935

申请日：2020-07-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chueh-Chi KUO ,  Tsung-Yen LEE ,  Chia-Hsin CHOU ,  Tzung-Chi FU ,  Li-Jui CHEN ,  Po-Chung CHENG ,  Che-Chang HSU

IPC: H01L21/683 ,  G03F1/24 ,  G03F7/20

Abstract: A reticle holding tool is provided. The reticle holding tool includes a housing, a reticle chuck, and a gas delivery assembly. The housing includes an opening, a top housing member, and a lateral housing member extending from the top housing member and terminating at a lower edge which is located on a predetermined plane. The reticle chuck is positioned in the housing and has an effective surface configured to secure a reticle. The effective surface is located between the predetermined plane and the top housing member. The reticle chuck is movable between two boundary lines that are perpendicular to the effective surface. A width of the opening is greater than a distance between the two boundary lines. The gas delivery assembly is positioned within the housing and configured to supply gas into the housing.