公开(公告)号：US20230408393A1

公开(公告)日：2023-12-21

申请号：US17749056

申请日：2022-05-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： En Tian LIN ,  Chih-Chiang TSENG ,  Chwen YU ,  Chiao-Ling WENG

IPC: G01N15/08 ,  H01L21/67 ,  B01D65/02 ,  B01D65/10 ,  B01D63/06

CPC classification number: G01N15/08 ,  H01L21/67017 ,  B01D65/02 ,  B01D65/10 ,  B01D63/067 ,  B01D2321/2058 ,  B01D2313/44 ,  B01D2313/18 ,  B01D2313/50 ,  B01D2321/04 ,  B01D2321/40 ,  G01N2015/084

Abstract: The present disclosure is directed to various methods and systems for monitoring real time efficiency of filters as well as testing the filters with tests that are similar to real world use of the filters to update technical specifications of the filters. The methods and systems monitoring the real time efficiency of the filters may utilize one or more particle counters to monitor their efficiency in real time. The data collected by the particle counters may be utilized to determine whether respective ones of the filters need to be replaced or regenerated by a backwash regeneration process. The updated technical specifications from the real world testing of the filters may be utilized in determining whether respective ones of the filters need to be replaced or regenerated. These real world testing and real time monitoring reduces the likelihood that workpieces are exposed to contaminant particles reducing scrap costs.