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公开(公告)号：US20200350487A1
公开(公告)日：2020-11-05
申请号：US16935029
申请日：2020-07-21
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Mingyuan SONG , Chwen YU , Shy-Jay LIN
Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
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公开(公告)号：US20210362291A1
公开(公告)日：2021-11-25
申请号：US16952730
申请日：2020-11-19
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor： Chwen YU , Chih-Chiang TSENG , Yi-Chung LAI , Tzu-Sou CHUANG , Yun-Ju CHIA
IPC: B24B37/04 , C04B38/00 , C04B41/00 , C04B41/48 , C04B41/83 , B01D63/08 , B01D63/06 , B01D69/02 , B01D69/12 , B01D71/02 , B01D65/02 , H01L21/67
Abstract: A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane made of a ceramic material, and a plurality of through holes. The base membrane is coated with a coating material.
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公开(公告)号：US20190355895A1
公开(公告)日：2019-11-21
申请号：US15982743
申请日：2018-05-17
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Mingyuan SONG , Chwen YU , Shy-Jay LIN
Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
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公开(公告)号：US20200152865A1
公开(公告)日：2020-05-14
申请号：US16743981
申请日：2020-01-15
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor： Shy-Jay LIN , Chwen YU , William J. GALLAGHER
Abstract: In a method of manufacturing a semiconductor device, a magnetic random access memory (MRAM) cell structure is formed. The MRAM cell structure includes a bottom electrode, a magnetic tunnel junction (MTJ) stack and a top electrode. A first insulating cover layer is formed over the MRAM cell structure. A second insulating cover layer is formed over the first insulating cover layer. An interlayer dielectric (ILD) layer is formed. A contact opening in the ILD layer is formed, thereby exposing the second insulating cover layer. A part of the second insulating cover layer and a part of the first insulating cover layer are removed, thereby exposing the top electrode. A conductive layer is formed in the opening contacting the top electrode. The second insulating cover layer has an oxygen getter property.
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公开(公告)号：US20230408393A1
公开(公告)日：2023-12-21
申请号：US17749056
申请日：2022-05-19
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： En Tian LIN , Chih-Chiang TSENG , Chwen YU , Chiao-Ling WENG
CPC classification number: G01N15/08 , H01L21/67017 , B01D65/02 , B01D65/10 , B01D63/067 , B01D2321/2058 , B01D2313/44 , B01D2313/18 , B01D2313/50 , B01D2321/04 , B01D2321/40 , G01N2015/084
Abstract: The present disclosure is directed to various methods and systems for monitoring real time efficiency of filters as well as testing the filters with tests that are similar to real world use of the filters to update technical specifications of the filters. The methods and systems monitoring the real time efficiency of the filters may utilize one or more particle counters to monitor their efficiency in real time. The data collected by the particle counters may be utilized to determine whether respective ones of the filters need to be replaced or regenerated by a backwash regeneration process. The updated technical specifications from the real world testing of the filters may be utilized in determining whether respective ones of the filters need to be replaced or regenerated. These real world testing and real time monitoring reduces the likelihood that workpieces are exposed to contaminant particles reducing scrap costs.
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Patent Agency Ranking
公开(公告)号：US20230337550A1
公开(公告)日：2023-10-19
申请号：US18333397
申请日：2023-06-12
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： MingYuan SONG , Chwen YU , Shy-Jay LIN
CPC classification number: H10N50/80 , G11C11/161 , H10N50/01 , H10N50/85
Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
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公开(公告)号：US20220297170A1
公开(公告)日：2022-09-22
申请号：US17477453
申请日：2021-09-16
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chih-Ming TSAO , Tzu-Sou CHUANG , Chwen YU
Abstract: A method includes: generating a contaminant distribution map by sampling an environment of a cleanroom; selecting a first fabrication tool of the cleanroom by comparing the contaminant distribution map with at least one diffusion image in a first database; comparing parameters of the first fabrication tool against process utility information in a second database; and when the parameters are consistent with the process utility information, taking at least one action. The one action may include moving a cleaning tool to a location associated with a contaminant concentration of the contaminant distribution map; turning on a fan of the cleaning tool; stopping pod transit to the first fabrication tool; or halting production by the first fabrication tool.
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公开(公告)号：US20170229278A1
公开(公告)日：2017-08-10
申请号：US15017559
申请日：2016-02-05
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor： Chwen YU , Chih-Ming TSAO
CPC classification number: H05K9/00 , G12B17/00 , G12B17/02 , H01J37/09 , H01J37/3002 , H01J2237/0264 , H05K9/0001 , H05K9/0003
Abstract: A board includes a first magnetic conductive plate and a second magnetic conductive plate. The first magnetic conductive plate has a first magnetic conductive direction. The second magnetic conductive plate overlaps with the first magnetic conductive plate. The second magnetic conductive plate has a second magnetic conductive direction. The first magnetic conductive direction and the second magnetic conductive direction cross.
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公开(公告)号：US20250108417A1
公开(公告)日：2025-04-03
申请号：US18980249
申请日：2024-12-13
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chih-Ming TSAO , Tzu-Sou CHUANG , Chwen YU
IPC: B08B15/00 , B01D46/44 , G05B15/02 , G06V10/75 , G06V20/00 , H01J49/00 , H01J49/40 , H01L21/67 , H01L21/677
Abstract: A method includes: generating a contaminant distribution map by sampling an environment of a cleanroom; selecting a first fabrication tool of the cleanroom by comparing the contaminant distribution map with at least one diffusion image in a first database; comparing parameters of the first fabrication tool against process utility information in a second database; and when the parameters are consistent with the process utility information, taking at least one action. The one action may include moving a cleaning tool to a location associated with a contaminant concentration of the contaminant distribution map; turning on a fan of the cleaning tool; stopping pod transit to the first fabrication tool; or halting production by the first fabrication tool.
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公开(公告)号：US20200350488A1
公开(公告)日：2020-11-05
申请号：US16935066
申请日：2020-07-21
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Mingyuan SONG , Chwen YU , Shy-Jay LIN
Abstract: A device is provided that includes a semiconductor substrate on which a free magnetic element is positioned, which has first and second magnetic domains separated by a domain wall. A first magnet is positioned on the substrate near a first end of the free magnetic element, and has a first polarity and a first value of coercivity. A second magnet is positioned on the substrate near a second end of the free magnetic element, and has a second polarity, antiparallel relative to the first polarity, and a second value of coercivity different from the first value of coercivity.
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