公开(公告)号：US20230408393A1

公开(公告)日：2023-12-21

申请号：US17749056

申请日：2022-05-19

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： En Tian LIN ,  Chih-Chiang TSENG ,  Chwen YU ,  Chiao-Ling WENG

IPC: G01N15/08 ,  H01L21/67 ,  B01D65/02 ,  B01D65/10 ,  B01D63/06

CPC classification number: G01N15/08 ,  H01L21/67017 ,  B01D65/02 ,  B01D65/10 ,  B01D63/067 ,  B01D2321/2058 ,  B01D2313/44 ,  B01D2313/18 ,  B01D2313/50 ,  B01D2321/04 ,  B01D2321/40 ,  G01N2015/084

Abstract: The present disclosure is directed to various methods and systems for monitoring real time efficiency of filters as well as testing the filters with tests that are similar to real world use of the filters to update technical specifications of the filters. The methods and systems monitoring the real time efficiency of the filters may utilize one or more particle counters to monitor their efficiency in real time. The data collected by the particle counters may be utilized to determine whether respective ones of the filters need to be replaced or regenerated by a backwash regeneration process. The updated technical specifications from the real world testing of the filters may be utilized in determining whether respective ones of the filters need to be replaced or regenerated. These real world testing and real time monitoring reduces the likelihood that workpieces are exposed to contaminant particles reducing scrap costs.

公开(公告)号：US20240382877A1

公开(公告)日：2024-11-21

申请号：US18789263

申请日：2024-07-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： En Tian LIN ,  Chiao Ling WENG

IPC: B01D35/06 ,  B01D29/66 ,  B01D35/30 ,  C02F1/469

Abstract: The present disclosure is directed to at least one embodiment of a filter that is configured to remove contaminants utilizing a first conductive mesh (e.g., first electrode) and a second conductive mesh (e.g., second electrode) that extends around the first conductive mesh. For example, the first conductive mesh may receive a first electrical signal and the second conductive mesh may receive a second electrical signal such that the first and second conductive meshes are oppositely charged from each other (e.g., the first conductive mesh is positively charged and the second conductive mesh is negatively charged). Anions that are present within the fluid or generated by an electrical field between the first and second conductive meshes may interact with the contaminants such that the contaminants are attracted to at least one of the first and second conductive meshes, respectively.

公开(公告)号：US20230398475A1

公开(公告)日：2023-12-14

申请号：US17839343

申请日：2022-06-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： En Tian LIN ,  Chiao Ling WENG

IPC: B01D35/06 ,  B01D35/30 ,  B01D29/00

CPC classification number: B01D35/06 ,  B01D35/30 ,  B01D2201/58 ,  B01D2221/14 ,  B01D2201/30 ,  B01D29/0079

Abstract: The present disclosure is directed to at least one embodiment of a filter that is configured to remove contaminants utilizing a first conductive mesh (e.g., first electrode) and a second conductive mesh (e.g., second electrode) that extends around the first conductive mesh. For example, the first conductive mesh may receive a first electrical signal and the second conductive mesh may receive a second electrical signal such that the first and second conductive meshes are oppositely charged from each other (e.g., the first conductive mesh is positively charged and the second conductive mesh is negatively charged). Anions that are present within the fluid or generated by an electrical field between the first and second conductive meshes may interact with the contaminants such that the contaminants are attracted to at least one of the first and second conductive meshes, respectively.