公开(公告)号：US20190157378A1

公开(公告)日：2019-05-23

申请号：US15940075

申请日：2018-03-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guo-Jyun LUO ,  Shiuan-Jeng LIN ,  Chiu-Hua CHUNG ,  Chen-Chien CHANG ,  Han-Zong PAN

IPC: H01L49/02 ,  H01L27/06 ,  H01L21/285

Abstract: A semiconductor device structure and the formation method thereof are provided. The semiconductor device structure includes a semiconductor substrate and a first capacitor and a second capacitor over the semiconductor substrate. The first capacitor has a first capacitor dielectric layer, and the second capacitor has a second capacitor dielectric layer. The first capacitor dielectric layer is between the second capacitor dielectric layer and the semiconductor substrate. The first capacitor and the second capacitor are electrically connected in parallel. The first capacitor has a first linear temperature coefficient and a first quadratic voltage coefficient. The second capacitor has a second linear temperature coefficient and a second quadratic voltage coefficient. One or both of a first ratio of the first linear temperature coefficient to the second linear temperature coefficient and a second ratio of the first quadratic voltage coefficient to the second quadratic voltage coefficient is negative.

公开(公告)号：US20180143244A1

公开(公告)日：2018-05-24

申请号：US15355446

申请日：2016-11-18

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Kai-Di CHUANG ,  Tien-Chung LEE ,  Chiu-Hua CHUNG ,  Kang-Tai PENG

IPC: G01R31/28 ,  G01R1/073

CPC classification number: G01R31/2891 ,  G01R1/07342

Abstract: A method for probe card alignment is provided. The method includes providing a probe card with a plurality of probe needles having their distal ends on a reference plane. The method further includes providing a light from both the upper side and lower side of the reference plane. The method also includes using a camera to image the probe needles. In addition, the method includes performing a probe card alignment process according to the image generated by the camera.