公开(公告)号：US20230335422A1

公开(公告)日：2023-10-19

申请号：US18341496

申请日：2023-06-26

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang Yin SHEN

IPC: H01L21/677 ,  B65D81/02 ,  H01L21/67

CPC classification number: H01L21/67733 ,  B65D81/022 ,  H01L21/67271 ,  H01L21/67706 ,  H01L21/67724 ,  H01L21/6773

Abstract: A support member system is described for association with an overhead transport system. The support member system provides a safety feature to the overhead transport system by which the overhead transport system is able to avoid damage to wafers that are contained within a wafer cassette that is unintentionally released by the overhead transport system. The support member system is able to prevent such released cassettes from impacting the ground or tools located under the overhead transport system. The support member system targets wafer cassettes that have dimensions which are different than the dimensions of wafer cassettes for which the overhead transport system was originally designed to transport. Stocker systems for receiving, storing and delivering different types of wafer cassettes are also described.

公开(公告)号：US20250079218A1

公开(公告)日：2025-03-06

申请号：US18955678

申请日：2024-11-21

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang Yin SHEN

IPC: H01L21/677 ,  B65D81/02 ,  H01L21/67

Abstract: A support member system is described for association with an overhead transport system. The support member system provides a safety feature to the overhead transport system by which the overhead transport system is able to avoid damage to wafers that are contained within a wafer cassette that is unintentionally released by the overhead transport system. The support member system is able to prevent such released cassettes from impacting the ground or tools located under the overhead transport system. The support member system targets wafer cassettes that have dimensions which are different than the dimensions of wafer cassettes for which the overhead transport system was originally designed to transport. Stocker systems for receiving, storing and delivering different types of wafer cassettes are also described.

公开(公告)号：US20210098275A1

公开(公告)日：2021-04-01

申请号：US16808166

申请日：2020-03-03

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guancyun LI ,  Ching-Jung Chang ,  Chi-Feng Tung ,  Hsiang Yin Shen

IPC: H01L21/677 ,  H01L21/67

Abstract: A support member system is described for association with an overhead transport system. The support member system provides a safety feature to the overhead transport system by which the overhead transport system is able to avoid damage to wafers that are contained within a wafer cassette that is unintentionally released by the overhead transport system. The support member system is able to prevent such released cassettes from impacting the ground or tools located under the overhead transport system. The support member system targets wafer cassettes that have dimensions which are different than the dimensions of wafer cassettes for which the overhead transport system was originally designed to transport. Stocker systems for receiving, storing and delivering different types of wafer cassettes are also described.

公开(公告)号：US20250068088A1

公开(公告)日：2025-02-27

申请号：US18946633

申请日：2024-11-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: G03F7/00 ,  G05B19/4155 ,  G06N20/00

Abstract: An EUV stocker and an EUV pod device is disclosed. The EUV stocker includes an AI driven dynamic control circuitry, an AI controlled safety interlock, and an independent air return control device. The EUV stocker includes a Mass Flow Control (MFC) that operates in conjunction with one or more valves. The EUV stocker further includes a hydrocarbon detecting assembly, oxygen detecting assembly, pressure detecting assembly, and temperature detecting assembly and more to maintain the required condition within the EUV stocker. The EUV stocker also includes automated transportation devices such as AMHS, OHT, MR, AGV, RGV, or the like to provide a safe EUV mask storage environment for operators.

公开(公告)号：US20230066297A1

公开(公告)日：2023-03-02

申请号：US17461703

申请日：2021-08-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: G03F7/20 ,  G06N20/00 ,  G05B19/4155

Abstract: An EUV stocker and an EUV pod device is disclosed. The EUV stocker includes an AI driven dynamic control circuitry, an AI controlled safety interlock, and an independent air return control device. The EUV stocker includes a Mass Flow Control (MFC) that operates in conjunction with one or more valves. The EUV stocker further includes a hydrocarbon detecting assembly, oxygen detecting assembly, pressure detecting assembly, and temperature detecting assembly and more to maintain the required condition within the EUV stocker. The EUV stocker also includes automated transportation devices such as AMHS, OHT, MR, AGV, RGV, or the like to provide a safe EUV mask storage environment for operators.

公开(公告)号：US20220289492A1

公开(公告)日：2022-09-15

申请号：US17384360

申请日：2021-07-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chieh HSU ,  Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: B65G43/02 ,  G01C9/06 ,  G01H1/00 ,  G01B21/22 ,  B61B3/00 ,  H01L21/677

Abstract: An overhead transport system is provided capable of absorbing abnormal vibration and determining a source of the abnormal vibration. The overhead transport system in accordance with various embodiments of the present disclosure includes a processor, an overhead rail, a plurality of hangers that support the overhead rail, a vibration meter measuring vibration from the overhead rail, and a damper included in each of the hangers. The processor is configured to change a property of the damper in response to a determination that the measured vibration by the vibration meter is indicative of an abnormal vibration.