公开(公告)号：US20220289492A1

公开(公告)日：2022-09-15

申请号：US17384360

申请日：2021-07-23

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chieh HSU ,  Guancyun LI ,  Ching-Jung CHANG ,  Chi-Feng TUNG ,  Hsiang-Yin SHEN

IPC: B65G43/02 ,  G01C9/06 ,  G01H1/00 ,  G01B21/22 ,  B61B3/00 ,  H01L21/677

Abstract: An overhead transport system is provided capable of absorbing abnormal vibration and determining a source of the abnormal vibration. The overhead transport system in accordance with various embodiments of the present disclosure includes a processor, an overhead rail, a plurality of hangers that support the overhead rail, a vibration meter measuring vibration from the overhead rail, and a damper included in each of the hangers. The processor is configured to change a property of the damper in response to a determination that the measured vibration by the vibration meter is indicative of an abnormal vibration.

公开(公告)号：US20230411193A1

公开(公告)日：2023-12-21

申请号：US17843228

申请日：2022-06-17

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chun-Jung HUANG ,  Y.Y. LEE ,  Kuang Huan HSU ,  Li-Hsin CHU ,  Jen-Ti WANG ,  Chieh HSU

IPC: H01L21/677

CPC classification number: H01L21/67724

Abstract: When there is an interruption in power to an area of an integrated circuit manufacturing facility, product may be stranded in a vehicle mounted to an automated material handling system. An automated rescue vehicle can be deployed to retrieve the stranded vehicle so that a payload carried by that vehicle can be recovered and processing can resume. The rescue vehicle can carry a battery payload. The battery payload provides backup power while the rescue operation is performed. With such an automated system, no human intervention is needed to recover product during a power outage. In addition to improving wafer throughput during the power outage, such a rescue operation may prevent quality degradation for time-critical sequences of processing operations.