公开(公告)号：US11387748B2

公开(公告)日：2022-07-12

申请号：US16801350

申请日：2020-02-26

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chiao-Chun Hsu ,  Chih-Ming Chen ,  Chung-Yi Yu ,  Lung Yuan Pan

IPC: H02N1/00

Abstract: In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.

公开(公告)号：US20210067058A1

公开(公告)日：2021-03-04

申请号：US16801350

申请日：2020-02-26

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chiao-Chun Hsu ,  Chih-Ming Chen ,  Chung-Yi Yu ,  Lung Yuan Pan

IPC: H02N1/00

Abstract: In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.