Invention Grant
- Patent Title: Self-aligned dielectric liner structure for protection in MEMS comb actuator
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Application No.: US16801350Application Date: 2020-02-26
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Publication No.: US11387748B2Publication Date: 2022-07-12
- Inventor: Chiao-Chun Hsu , Chih-Ming Chen , Chung-Yi Yu , Lung Yuan Pan
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H02N1/00
- IPC: H02N1/00

Abstract:
In some embodiments, the present disclosure relates to a microelectromechanical system (MEMS) comb actuator including a comb structure. The comb structure includes a support layer having a first material and a plurality of protrusions extending away from a first surface of the support layer in a first direction. The plurality of protrusions are also made of the first material. The plurality of protrusions are separated along a second direction parallel to the first surface of the support layer. The MEMS comb actuator may further include a dielectric liner structure that continuously and completely covers the first surface of the support layer and outer surfaces of the plurality of protrusions. The dielectric liner structure includes a connective portion that continuously connects topmost surfaces of at least two of the plurality of protrusions.
Public/Granted literature
- US20210067058A1 SELF-ALIGNED DIELECTRIC LINER STRUCTURE FOR PROTECTION IN MEMS COMB ACTUATOR Public/Granted day:2021-03-04
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