公开(公告)号：US20200043762A1

公开(公告)日：2020-02-06

申请号：US16233701

申请日：2018-12-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu Kai CHEN ,  Chia-Hung CHUNG ,  Ko-Bin KAO ,  Shi-Ming WANG ,  Su-Yu YEH ,  Li-Jen WU ,  Oliver YU ,  Wen-Shiung CHEN

IPC: H01L21/67 ,  G03F7/16

Abstract: The present disclosure describes a container for placing an object therein. The container includes a container body and a lid over the container body, a collision-preventing portion attached to one or more of the container body and the lid and configured to buffer an impact force, a pairing recognition mechanism configured to detect an object placed in the container body, and a liquid-detecting sensor configured to detect a leakage from the object.

公开(公告)号：US20210086368A1

公开(公告)日：2021-03-25

申请号：US17113371

申请日：2020-12-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver YU ,  Huei-Chi CHIU ,  Shi-Ming WANG ,  Li-Jen Wu ,  Yu Kai Chen ,  Sharon Yang

IPC: B25J11/00 ,  G03F7/00 ,  B25J15/08 ,  B25J13/00 ,  G05D1/02

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.

公开(公告)号：US20200016761A1

公开(公告)日：2020-01-16

申请号：US16034886

申请日：2018-07-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Oliver YU ,  Huei-Chi CHIU ,  Shi-Ming WANG ,  Li-Jen WU ,  Yu Kai CHEN ,  Sharon YANG

IPC: B25J11/00 ,  G03F7/00 ,  G05D1/02 ,  B25J15/08 ,  B25J13/00

Abstract: The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.