公开(公告)号：US20230411193A1

公开(公告)日：2023-12-21

申请号：US17843228

申请日：2022-06-17

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chun-Jung HUANG ,  Y.Y. LEE ,  Kuang Huan HSU ,  Li-Hsin CHU ,  Jen-Ti WANG ,  Chieh HSU

IPC: H01L21/677

CPC classification number: H01L21/67724

Abstract: When there is an interruption in power to an area of an integrated circuit manufacturing facility, product may be stranded in a vehicle mounted to an automated material handling system. An automated rescue vehicle can be deployed to retrieve the stranded vehicle so that a payload carried by that vehicle can be recovered and processing can resume. The rescue vehicle can carry a battery payload. The battery payload provides backup power while the rescue operation is performed. With such an automated system, no human intervention is needed to recover product during a power outage. In addition to improving wafer throughput during the power outage, such a rescue operation may prevent quality degradation for time-critical sequences of processing operations.