公开(公告)号：US08919277B2

公开(公告)日：2014-12-30

申请号：US13268230

申请日：2011-10-07

申请人： Takao Tokumoto ,  Sadao Natsu ,  Mitsuhiro Hida ,  Souichirou Iwasaki ,  Tsuyoshi Sato ,  Kenichi Ooshiro

发明人： Takao Tokumoto ,  Sadao Natsu ,  Mitsuhiro Hida ,  Souichirou Iwasaki ,  Tsuyoshi Sato ,  Kenichi Ooshiro

IPC分类号： B05B3/00 ,  B05B13/02 ,  B05C11/02 ,  H01L21/67 ,  B05C13/02 ,  B05D1/00 ,  B05D1/26

CPC分类号： H01L21/6715 ,  B05C13/02 ,  B05D1/002 ,  B05D1/26

摘要： A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.

摘要翻译： 具有扁平端部的圆柱形喷嘴放置在旋转的涂覆物体的上方。 通过在涂布喷嘴的端部排出涂布溶液，同时使涂布喷嘴相对于被涂物在与涂布体的旋转方向相交的方向移动，将涂布液涂布在涂布体的表面。 涂层喷嘴在其一端的一部分上形成有成角度的凹口。 旋转控制单元以涂覆喷嘴的凹口位于将涂布溶液供给到被旋转的涂布体的位置的上游位置的方式来控制涂布喷嘴的旋转。

公开(公告)号：US20120025145A1

公开(公告)日：2012-02-02

申请号：US13268230

申请日：2011-10-07

申请人： Takao Tokumoto ,  Sadao Natsu ,  Mitsuhiro Hida ,  Souichirou Iwasaki ,  Tsuyoshi Sato ,  Kenichi Ooshiro

发明人： Takao Tokumoto ,  Sadao Natsu ,  Mitsuhiro Hida ,  Souichirou Iwasaki ,  Tsuyoshi Sato ,  Kenichi Ooshiro

IPC分类号： B05D1/26 ,  B05C13/00 ,  H01B1/00 ,  B05B1/00

CPC分类号： H01L21/6715 ,  B05C13/02 ,  B05D1/002 ,  B05D1/26

摘要： A cylindrical coating nozzle having a flattened end is placed above a coating object being rotated. A coating solution is applied to a surface of the coating object by discharging the coating solution form a nozzle orifice at an end of the coating nozzle while moving the coating nozzle relative to the coating object in a direction intersecting a rotational direction of the coating object. The coating nozzle is formed with an angled notch at a part of the end thereof. A rotation control unit controls the rotation of the coating nozzle in a manner that the notch of the coating nozzle is positioned upstream from a position to feed the coating solution to the coating object being rotated.

摘要翻译： 具有扁平端部的圆柱形喷嘴放置在旋转的涂覆物体的上方。 通过在涂布喷嘴的端部排出涂布溶液，同时使涂布喷嘴相对于被涂物在与涂布体的旋转方向相交的方向移动，将涂布液涂布在涂布体的表面上。 涂层喷嘴在其一端的一部分上形成有成角度的凹口。 旋转控制单元以涂覆喷嘴的凹口位于将涂布溶液供给到被旋转的涂布体的位置的上游位置的方式来控制涂布喷嘴的旋转。