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1.发明授权Variable capacitive element, variable capacitive device, and method for driving the variable capacitive element 有权可变电容元件，可变电容器件和驱动可变电容元件的方法公开(公告)号：US08363381B2
公开(公告)日：2013-01-29
申请号：US12910267
申请日：2010-10-22
IPC分类号： H01G5/01
摘要： A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.
摘要翻译： 可变电容元件包括彼此绝缘的第一固定电极和第二固定电极，布置成面对第一固定电极和第二固定电极的可动电极，设置在可动电极和第一固定电极之间的电介质层 以及第二固定电极，相对于可动电极的电位向第一固定电极施加第一驱动电压的第一配线部，以及用于向第二固定电极施加第二驱动电压的第二配线部， 参考可动电极的电位，第二驱动电压具有与第一驱动电压的极性不同的极性。
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公开(公告)号：US20110216469A1
公开(公告)日：2011-09-08
申请号：US13037762
申请日：2011-03-01
摘要： There is provided a method for fabricating a device, preferably for a micro electro electro mechanical system. The method includes forming a first electrode on a substrate, where the first electrode has a first sloped end at least at one end thereof; forming a sacrificial layer on the first electrode, where the sacrificial layer has a first sloped edge, the first sloped edge and the first sloped end are overlapped each other so that a thickness of the first sloped edge decreases as a thickness of the first sloped end increases; forming a first spacer on the first electrode, where the first spacer has contact with the first sloped edge; forming a beam electrode on the sacrificial layer and the first spacer; and removing the sacrificial layer after the forming the beam electrode.
摘要翻译： 提供了一种制造器件的方法，优选用于微机电系统。 该方法包括在基底上形成第一电极，其中第一电极至少在其一端具有第一倾斜端; 在所述第一电极上形成牺牲层，其中所述牺牲层具有第一倾斜边缘，所述第一倾斜边缘和所述第一倾斜端部彼此重叠，使得所述第一倾斜边缘的厚度随着所述第一倾斜端部的厚度而减小 增加 在所述第一电极上形成第一间隔物，其中所述第一间隔件与所述第一倾斜边缘接触; 在所述牺牲层和所述第一间隔物上形成束电极; 并且在形成束电极之后去除牺牲层。
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公开(公告)号：US07932900B2
公开(公告)日：2011-04-26
申请号：US11604693
申请日：2006-11-28
IPC分类号： G09G5/00
CPC分类号： G06F3/0436
摘要： Surface acoustic waves are propagated in a lower-left oblique direction and a lower-right oblique direction from an excitation element located on the upper side of a non-piezoelectric substrate and then received by receiving elements located on the left side and the right side, while surface acoustic waves are propagated in an upper-left oblique direction and an upper-right oblique direction from an excitation element located on the lower side of the non-piezoelectric substrate and then received by the receiving elements located on the left side and the right side. Based on the received results at the two receiving elements, a position of an object in contact with the non-piezoelectric substrate is detected. The sensitivity in a region near the diagonal, which is influenced largely by propagation loss of the surface acoustic waves, is improved by increasing the widths of the electrode fingers of the excitation elements and/or the receiving elements, the number of pairs of the electrode fingers, or the aperture width of comb-like electrodes, according to an increase in the propagation distances of the surface acoustic waves, i.e., toward the region near the diagonal.
摘要翻译： 表面声波从位于非压电基板的上侧的激励元件沿左下斜方向和右下斜方向传播，然后由位于左侧和右侧的接收元件接收， 同时表面声波从位于非压电基板的下侧的激励元件沿左上方倾斜方向和右上斜方向传播，然后由位于左侧和右侧的接收元件接收 侧。 基于两个接收元件的接收结果，检测与非压电基板接触的物体的位置。 通过增加激发元件和/或接收元件的电极指的宽度，电极对的数量来改善受到表面声波的传播损耗很大影响的对角线附近区域的灵敏度 手指或梳状电极的孔径宽度，根据表面声波的传播距离的增加，即朝向对角线附近的区域的增加。
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公开(公告)号：US07667694B2
公开(公告)日：2010-02-23
申请号：US10696037
申请日：2003-10-30
IPC分类号： G09G5/00
CPC分类号： G06F3/0436
摘要： A burst wave is applied to an excitation element of a touch panel main body from an oscillation section so as to excite surface acoustic waves, and the excited surface acoustic waves are received by a receiving element of the touch panel main body. The received signals are A/D converted by a receiving section, and a control section calculates the contact position and the contact width of the object in contact with the touch panel main body, based on time-series changes in the received strength. Based on the received strength of surface acoustic waves, the control section controls the wave number of the burst wave to be applied to the excitation element.
摘要翻译： 突发波从振荡部分施加到触摸面板主体的激励元件，以激发表面声波，并且激发的表面声波由触摸面板主体的接收元件接收。 所接收的信号由接收部分进行A / D转换，控制部分根据接收强度的时间序列变化来计算与触摸面板主体接触的物体的接触位置和接触宽度。 基于接收的表面声波的强度，控制部分控制施加到激励元件的脉冲波的波数。
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公开(公告)号：US20080210007A1
公开(公告)日：2008-09-04
申请号：US12010249
申请日：2008-01-23
申请人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
发明人： Takayuki Yamaji , Hiroshi Ishikawa , Yuji Takahashi , Takashi Katsuki , Fumihiko Nakazawa , Hiroaki Inoue
IPC分类号： G01P9/04
CPC分类号： G01C19/5712 , G01C19/5628
摘要： An angular velocity sensor includes: a first tuning-fork vibrator having a first base and first aims extending from the first base in a first direction; a second tuning-fork vibrator having a second bass and second arms extending from the second base in a second direction; and a double gimbal portion mat has a drive gimbal portion vibrating about an axis extending in a fourth direction, and a sense gimbal portion vibrating about an axis extending in a fifth direction and senses an angular velocity about an axis extending in a third direction.
摘要翻译： 角速度传感器包括：第一音叉振子，具有第一基座和第一目标，从第一基座沿第一方向延伸; 具有第二低音和第二臂的第二音叉振子，所述第二音叉和第二臂在第二方向上从所述第二基座延伸; 并且双云母部分垫具有绕围绕第四方向延伸的轴线振动的驱动万向节部分和围绕沿第五方向延伸的轴线振动的感测万向节部分，并感测围绕在第三方向延伸的轴线的角速度。
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公开(公告)号：US20070091079A1
公开(公告)日：2007-04-26
申请号：US11604693
申请日：2006-11-28
IPC分类号： G09G5/00
CPC分类号： G06F3/0436
摘要： Surface acoustic waves are propagated in a lower-left oblique direction and a lower-right oblique direction from an excitation element located on the upper side of a non-piezoelectric substrate and then received by receiving elements located on the left side and the right side, while surface acoustic waves are propagated in an upper-left oblique direction and an upper-right oblique direction from an excitation element located on the lower side of the non-piezoelectric substrate and then received by the receiving elements located on the left side and the right side. Based on the received results at the two receiving elements, a position of an object in contact with the non-piezoelectric substrate is detected. The sensitivity in a region near the diagonal, which is influenced largely by propagation loss of the surface acoustic waves, is improved by increasing the widths of the electrode fingers of the excitation elements and/or the receiving elements, the number of pairs of the electrode fingers, or the aperture width of comb-like electrodes, according to an increase in the propagation distances of the surface acoustic waves, i.e., toward the region near the diagonal.
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公开(公告)号：US07176903B2
公开(公告)日：2007-02-13
申请号：US10781791
申请日：2004-02-20
IPC分类号： G09G5/00
CPC分类号： H03H3/08 , G06F3/0436 , H01L41/047 , H01L41/0477
摘要： A piezoelectric element includes a substrate, a lower electrode on the substrate, a piezoelectric layer on the lower electrode, and an upper electrode on the piezoelectric layer. The upper electrode includes a common base and a plurality of parallel branches extending from the base. The branches are arranged at a regular interval or pitch λ1. The lower electrode faces the branches of the upper electrode via the piezoelectric layer. The thickness h of the piezoelectric layer and the branch pitch λ1 are determined to satisfy an inequality 0.005≦h/λ1≦0.1. The lower electrode has a hillock occurrence rate which is no greater than 0.1%.
摘要翻译： 压电元件包括衬底，衬底上的下电极，下电极上的压电层和压电层上的上电极。 上电极包括公共基座和从基座延伸的多个平行分支。 分支以规则间隔或间距λ1排列。 下电极经由压电层面对上电极的分支。 压电层的厚度h和分支间距λ1确定为满足不等式0.005 <= H /λ1 <= 0.1。 下电极具有不大于0.1％的小丘发生率。
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公开(公告)号：US07079120B2
公开(公告)日：2006-07-18
申请号：US10446153
申请日：2003-05-28
IPC分类号： G09G5/00
CPC分类号： G06F3/0436
摘要： Each of excitation elements and receiving elements placed in a frame region of a non-piezoelectric substrate is constructed by forming a comb-like electrode on the front face of a piezoelectric body and forming a plate electrode (solid electrode) on the rear face thereof. The comb-like electrode is composed of a bus electrode and a plurality of V-shaped electrode fingers extended from the bus electrode. Drawn-round wires are provided to connect the comb-like electrode (bus electrode) and plate electrode to external circuits. Surface acoustic waves from the excitation elements located on the upper side and the lower side are simultaneously propagated in two directions respectively and the propagated surface acoustic waves are received by receiving elements located on the left side and the right side respectively.
摘要翻译： 放置在非压电基板的框架区域中的每个激励元件和接收元件通过在压电体的前表面上形成梳状电极并在其后表面上形成平板电极（固体电极）而构成。 梳状电极由总线电极和从总线电极延伸的多个V形电极指构成。 提供拉制圆线以将梳状电极（总线电极）和平板电极连接到外部电路。 来自位于上侧和下侧的激励元件的表面声波分别在两个方向上同时传播，并且传播的声表面波分别由位于左侧和右侧的接收元件接收。
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公开(公告)号：US06951175B2
公开(公告)日：2005-10-04
申请号：US10642930
申请日：2003-08-18
申请人： Yuji Otake , Takahiro Fukagawa , Takashi Katsuki
发明人： Yuji Otake , Takahiro Fukagawa , Takashi Katsuki
IPC分类号： G01N21/956 , H05K1/02 , H05K3/12 , B41F21/12
CPC分类号： H05K3/1216 , B41F33/0036 , B41F33/0081 , B41P2233/50 , B41P2233/52 , G01N21/956 , G01N21/95607 , H05K1/0269 , H05K2203/163
摘要： It is an object of the invention to provide a method for forming printing inspection data in which the use of a mask plate makes it possible to simply and efficiently form the inspecting data.In a method for forming printing inspection data for obtaining mask opening data from an image got by picking-up the image of a mask plate to form the inspecting data, when an image pick-up visual field 20a is sequentially moved to visual field positions having a grid-shaped arrangement to obtain a plurality of images, if incomplete opening parts 16b (X) and (Y) in which parts of the opening parts protrude are detected, ranges BX2 and BY2 which are excluded from an object of data in this image are determined based on these sizes BY1 and BY2. When the image pick-up visual field is moved to an adjacent visual field position, the image pick-up visual field is overlapped on the adjacent image pick-up visual field by BX2, BY2 to include these opening parts in the adjacent image pick-up visual field. Thus, an inconvenience that the opening parts protrude in the image is eliminated so that the inspecting data can be simply and efficiently formed.
摘要翻译： 本发明的目的是提供一种用于形成打印检查数据的方法，其中使用掩模板使得可以简单且有效地形成检查数据。 在形成用于从通过拾取掩模板的图像获得的图像获得掩模开口数据以形成检查数据的打印检查数据的形成方法中，当将图像拾取视野20a依次移动到视野位置 具有网格布置以获得多个图像，如果检测到部分开口部分突出的不完整的开口部分16b（X）和（Y）的范围BX 2和BY 2，其从 基于这些尺寸BY 1和BY 2确定该图像中的数据。 当摄像视野被移动到相邻的视野位置时，通过BX 2，BY 2将图像拾取视野重叠在相邻的摄像视野上，以在相邻的图像中包括这些开口部分 拾起视野。 因此，消除了图像中的开口部分突出的不便，从而可以简单且有效地形成检查数据。
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公开(公告)号：US08283735B2
公开(公告)日：2012-10-09
申请号：US12688302
申请日：2010-01-15
CPC分类号： B32B37/12 , B32B2309/027 , B32B2309/68 , B32B2310/0806 , B32B2457/00 , B81B2207/096 , B81C1/00301 , B81C2203/0118 , B81C2203/019 , H01L23/10 , H01L2924/0002 , H01L2924/00
摘要： A packaged device includes a device substrate and a packaging unit. The device substrate includes a first surface and a device formed in the device substrate. The packaging unit includes an insulating layer which faces the device substrate. The insulating layer includes a second surface bonded to the first surface. A metal concentration of at least part of a peripheral surface in the insulating layer is higher than a metal concentration of an end surface on the device substrate side in the insulating layer. An outline of the first surface is retreated inward from an outline of the second surface.
摘要翻译： 包装装置包括装置基板和包装单元。 器件衬底包括形成在器件衬底中的第一表面和器件。 包装单元包括面向设备基板的绝缘层。 绝缘层包括结合到第一表面的第二表面。 绝缘层中的外围表面的至少一部分的金属浓度高于绝缘层中的器件基板侧的端面的金属浓度。 第一表面的轮廓从第二表面的轮廓向内退回。
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