摘要:
Provided are a ring-opening metathesis polymer and a hydrogenated product thereof that are useful as materials for an optical component, and a method for preparation thereof. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0.
摘要:
A process for synthesizing an organic transition metal complex compound with an atom group having an electron-donor ability, in an industrially and economically advantageous manner, without a compound having a proton-donor ability being a metal salt, and a metathesis catalyst produced with the use of the above process, are provided. A process for producing an organic transition metal complex compound in which an atom group having an electron-withdrawing ability can be converted into an atom group having a stronger electron-donor ability, by contacting an compound having a proton-donor ability with the organic transition metal complex compound with an atom group having an electron-withdrawing ability, in the presence of an basic compound, and a metathesis catalyst of which the content of an alkali metal is reduced, and which is obtainable with the use of the above process, are provided.
摘要:
Provided are a ring-opening metathesis polymer and a hydrogenated product thereof that are useful as materials for an optical component, and a method for preparation thereof. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0.
摘要:
A process for synthesizing an organic transition metal complex compound with an atom group having an electron-donor ability, in an industrially and economically advantageous manner, without a compound having a proton-donor ability being a metal salt, and a metathesis catalyst produced with the use of the above process, are provided. A process for producing an organic transition metal complex compound in which an atom group having an electron-withdrawing ability can be converted into an atom group having a stronger electron-donor ability, by contacting an compound having a proton-donor ability with the organic transition metal complex compound with an atom group having an electron-withdrawing ability, in the presence of an basic compound, and a metathesis catalyst of which the content of an alkali metal is reduced, and which is obtainable with the use of the above process, are provided.
摘要:
[Problem] Provided is a resin having an alicyclic structure in a main chain, which is excellent in etching resistance and developing property, a resist composition for exposure with a high energy radiation using the resin, and a method for forming a pattern using the resist composition. [Means to Solve] Also provided is a hydrogenated ring-opening metathesis polymer which is comprised of alicyclic skeleton-containing structural units [A], [B] and a structural unit [C] selected from the following general formula [5] and/or [6]: wherein, e and f represent respectively an integer of 0 to 3, wherein the at least one of X1 of the general formula [1] of the structural unit [A], X of the general formula [3] and X3 of the general formula [4] of the structural unit [B] is —O—, and wherein the molar ratio of the structural units [A], [B] and [C] satisfies simultaneously that [A]/([B]+[C]) is from 20/80 to 98/2, ([A]+[B])/[C] is from 99/1 to 50/50, and ([A]+[C])/[B] is from 99/1 to 21/79. Also, a resist composition comprising the same and a method for forming a pattern are provided.
摘要:
A hydrogenated ring-opening metathesis polymer containing at least structural units of the general formula [3] and/or the general formula [4] and the weight-average molecular weight Mw to the number-average molecular weight Mn (Mw/Mn) is more than 2.0 and less than 5.0: wherein R8 to R11 and R13 to R16 represent a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, X2s and X3s are the same or different and represent —O— or —CR122— wherein R12 represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, one of Y1 and Y2 represents —(C═O)— and the other of Y1 and Y2 represents —CR182— wherein R18 represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and m and n represent an integer of 0 or 1 to 3.
摘要:
A polymer having a rate of dissolution in an alkaline developer that increases under the action of acid is provided. The polymer is prepared by reacting a hydrogenated ROMP polymer with an O-alkylating agent in the presence of a base.
摘要:
Resist compositions comprising a hydrogenated ring-opening metathesis polymer bearing an alicyclic structure in its backbone and comprising structural units having an oxygen atom incorporated as part of the cyclic structure exhibit a high resolution and minimal proximity bias upon ArF excimer laser lithography and have high etching resistance.
摘要:
Disclosed is a method for purifying a polymer in which a solution containing a cyclic olefin polymer having at least a repeating structural unit [A] represented by the general formula (1) and a metal component is brought into contact with an organic compound having a basic functional group and an acidic functional group, and then the resulting solution is brought into contact with a basic adsorbent to remove the metal component contained in the solution.
摘要:
Provided is a resin having an alicyclic structure in a main chain, which is excellent in etching resistance and developing property, a resist composition for exposure with a high energy radiation using the resin, and a method for forming a pattern using the resist composition.Also provided is a hydrogenated ring-opening metathesis polymer which is comprised of alicyclic skeleton-containing structural units [A], [B] and a structural unit [C] selected from the following general formula [5] and/or [6]: wherein, e and f represent respectively an integer of 0 to 3, wherein the at least one of X1 of the general formula [1] of the structural unit [A], X2 of the general formula [3] and X3 of the general formula [4] of the structural unit [B] is —O—, and wherein the molar ratio of the structural units [A], [B] and [C] satisfies simultaneously that [A]/([B]+[C]) is from 20/80 to 98/2, ([A]+[B])/[C] is from 99/1 to 50/50, and ([A]+[C])/[B] is from 99/1 to 21/79. Also, a resist composition comprising the same and a method for forming a pattern are provided.