Ring-opening metathesis polymer, hydrogenated product thereof, method for preparing the same, and use thereof
    2.
    发明授权
    Ring-opening metathesis polymer, hydrogenated product thereof, method for preparing the same, and use thereof 有权
    开环易位聚合物,其氢化产物,其制备方法及其用途

    公开(公告)号:US08211984B2

    公开(公告)日:2012-07-03

    申请号:US12374281

    申请日:2007-01-17

    摘要: Provided are a ring-opening metathesis polymer and a hydrogenated product thereof that are useful as materials for an optical component, and a method for preparation thereof. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0.

    摘要翻译: 提供可用作光学部件的材料的开环易位聚合物及其氢化产物及其制备方法。 本发明涉及至少包含由以下通式[1]表示的重复结构单元[A]和由以下通式[2]表示的重复结构单元[B]的开环易位聚合物,其结构摩尔比 [A] / [B]为0.1 / 99.9至100/0。 本发明涉及至少包含由以下通式[1]表示的重复结构单元[A]和由以下通式[2]表示的重复结构单元[B]的开环易位聚合物,其结构摩尔比 [A] / [B]为0.1 / 99.9至100/0。

    RING-OPENING METATHESIS POLYMER, HYDROGENATED PRODUCT THEREOF, METHOD FOR PREPARING THE SAME, AND USE THEREOF
    3.
    发明申请
    RING-OPENING METATHESIS POLYMER, HYDROGENATED PRODUCT THEREOF, METHOD FOR PREPARING THE SAME, AND USE THEREOF 有权
    开环元件聚合物,其氢化产物,其制备方法及其用途

    公开(公告)号:US20090215974A1

    公开(公告)日:2009-08-27

    申请号:US12374281

    申请日:2007-07-17

    IPC分类号: C08F36/00

    摘要: Provided are a ring-opening metathesis polymer and a hydrogenated product thereof that are useful as materials for an optical component, and a method for preparation thereof. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0. The present invention relates to a ring-opening metathesis polymer comprising at least repeating structural units [A] represented by the following General Formula [1] and repeating structural units [B] represented by the following General Formula [2] at a constitutional molar ratio [A]/[B] of 0.1/99.9 to 100/0.

    摘要翻译: 提供可用作光学部件的材料的开环易位聚合物及其氢化产物及其制备方法。 本发明涉及至少包含由以下通式[1]表示的重复结构单元[A]和由以下通式[2]表示的重复结构单元[B]的开环易位聚合物,其结构摩尔比 [A] / [B]为0.1 / 99.9至100/0。 本发明涉及至少包含由以下通式[1]表示的重复结构单元[A]和由以下通式[2]表示的重复结构单元[B]的开环易位聚合物,其结构摩尔比 [A] / [B]为0.1 / 99.9至100/0。

    METHOD FOR PURIFYING POLYMER AND POLYMER
    5.
    发明申请
    METHOD FOR PURIFYING POLYMER AND POLYMER 有权
    纯化聚合物和聚合物的方法

    公开(公告)号:US20120208976A1

    公开(公告)日:2012-08-16

    申请号:US13502789

    申请日:2010-10-15

    摘要: Disclosed is a method for purifying a polymer in which a solution containing a cyclic olefin polymer having at least a repeating structural unit [A] represented by the general formula (1) and a metal component is brought into contact with an organic compound having a basic functional group and an acidic functional group, and then the resulting solution is brought into contact with a basic adsorbent to remove the metal component contained in the solution.

    摘要翻译: 公开了一种纯化聚合物的方法,其中含有至少具有由通式(1)表示的重复结构单元[A]和金属组分的环状烯烃聚合物的溶液与具有碱性的有机化合物接触 官能团和酸性官能团,然后将所得溶液与碱性吸附剂接触以除去溶液中所含的金属组分。

    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method
    6.
    发明授权
    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method 有权
    氢化开环易位聚合物,包含其的抗蚀剂组合物和图案化方法

    公开(公告)号:US07794915B2

    公开(公告)日:2010-09-14

    申请号:US11902775

    申请日:2007-09-25

    IPC分类号: G03F7/004 G03F7/30 C08F232/08

    摘要: Provided is a resin having an alicyclic structure in a main chain, which is excellent in etching resistance and developing property, a resist composition for exposure with a high energy radiation using the resin, and a method for forming a pattern using the resist composition.Also provided is a hydrogenated ring-opening metathesis polymer which is comprised of alicyclic skeleton-containing structural units [A], [B] and a structural unit [C] selected from the following general formula [5] and/or [6]: wherein, e and f represent respectively an integer of 0 to 3, wherein the at least one of X1 of the general formula [1] of the structural unit [A], X2 of the general formula [3] and X3 of the general formula [4] of the structural unit [B] is —O—, and wherein the molar ratio of the structural units [A], [B] and [C] satisfies simultaneously that [A]/([B]+[C]) is from 20/80 to 98/2, ([A]+[B])/[C] is from 99/1 to 50/50, and ([A]+[C])/[B] is from 99/1 to 21/79. Also, a resist composition comprising the same and a method for forming a pattern are provided.

    摘要翻译: 本发明提供一种具有优异的耐蚀刻性和显影性的主链中具有脂环结构的树脂,使用该树脂用高能量辐射曝光的抗蚀剂组合物,以及使用该抗蚀剂组合物形成图案的方法。 还提供了一种氢化开环易位聚合物,其由含脂环骨架的结构单元[A],[B]和选自以下通式[5]和/或[6]的结构单元[C]组成: 其中,e和f分别表示0〜3的整数,式中结构单元[A]的通式[1]的X1,通式[3]的X2和通式 结构单元[B]的[4]为-O-,其中结构单元[A],[B]和[C]的摩尔比同时满足[A] /([B] + [C] )为20/80〜98/2,([A] + [B])/ [C]为99/1〜50/50,([A] + [C])/ [B] 99/1至21/79。 此外,提供了包含该抗蚀剂组合物的抗蚀剂组合物和形成图案的方法。

    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method
    8.
    发明申请
    Hydrogenated ring-opening metathesis polymer, resist composition comprising the same and patterning method 有权
    氢化开环易位聚合物,包含其的抗蚀剂组合物和图案化方法

    公开(公告)号:US20080085470A1

    公开(公告)日:2008-04-10

    申请号:US11902775

    申请日:2007-09-25

    IPC分类号: G03C5/00 C08G65/00

    摘要: [Problem] Provided is a resin having an alicyclic structure in a main chain, which is excellent in etching resistance and developing property, a resist composition for exposure with a high energy radiation using the resin, and a method for forming a pattern using the resist composition. [Means to Solve] Also provided is a hydrogenated ring-opening metathesis polymer which is comprised of alicyclic skeleton-containing structural units [A], [B] and a structural unit [C] selected from the following general formula [5] and/or [6]: wherein, e and f represent respectively an integer of 0 to 3, wherein the at least one of X1 of the general formula [1] of the structural unit [A], X of the general formula [3] and X3 of the general formula [4] of the structural unit [B] is —O—, and wherein the molar ratio of the structural units [A], [B] and [C] satisfies simultaneously that [A]/([B]+[C]) is from 20/80 to 98/2, ([A]+[B])/[C] is from 99/1 to 50/50, and ([A]+[C])/[B] is from 99/1 to 21/79. Also, a resist composition comprising the same and a method for forming a pattern are provided.

    摘要翻译: [问题]提供一种主链中具有优异的耐腐蚀性和显影性的具有脂环结构的树脂,使用该树脂用高能量辐射曝光的抗蚀剂组合物,以及使用该抗蚀剂形成图案的方法 组成。 [解决方法]还提供了由含脂环骨架的结构单元[A],[B]和选自以下通式[5]的结构单元[C]组成的氢化开环易位聚合物和/ 或[6]:其中,e和f分别表示0〜3的整数,其中,结构单元[A]的通式[1]的X 1〜X 1中的至少一个,X 的结构单元[B]的通式[3]和X 3的通式[4]的结构单元[A],[ B]和[C]同时满足[A] /([B] + [C])为20/80〜98/2,([A] + [B])/ [C]为99/1 至50/50,([A] + [C])/ [B]为99/1〜21/79。 此外,提供了包含该抗蚀剂组合物的抗蚀剂组合物和形成图案的方法。

    Hydrogenated ring-opening metathesis polymer and process for producing the same
    9.
    发明授权
    Hydrogenated ring-opening metathesis polymer and process for producing the same 有权
    氢化开环复分解聚合物及其制备方法

    公开(公告)号:US07081501B2

    公开(公告)日:2006-07-25

    申请号:US10996468

    申请日:2004-11-26

    IPC分类号: C08G61/06 C08F8/04

    摘要: A hydrogenated ring-opening metathesis polymer containing at least structural units of the general formula [3] and/or the general formula [4] and the weight-average molecular weight Mw to the number-average molecular weight Mn (Mw/Mn) is more than 2.0 and less than 5.0: wherein R8 to R11 and R13 to R16 represent a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, X2s and X3s are the same or different and represent —O— or —CR122— wherein R12 represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, one of Y1 and Y2 represents —(C═O)— and the other of Y1 and Y2 represents —CR182— wherein R18 represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, and m and n represent an integer of 0 or 1 to 3.

    摘要翻译: 含有至少具有通式[3]和/或通式[4]的结构单元和数均分子量Mn(Mw / Mn)的重均分子量Mw的氢化开环易位聚合物是 大于2.0且小于5.0:其中R 8至R 11和R 13至R 16表示一个 氢原子或碳原子数为1〜10的烷基,X 2和X 3相同或不同,表示-O-或-CR 12其中R 12表示氢原子或具有1-10个碳原子的烷基,Y 1, 和Y 2表示 - (CO) - ,Y 1和Y 2中的另一个表示-CR 18, 其中R 18表示氢原子或碳原子数1〜10的烷基,m和n表示0或1〜3的整数。