公开(公告)号：US6139642A

公开(公告)日：2000-10-31

申请号：US86475

申请日：1998-05-28

申请人： Takashi Shimahara ,  Naoto Nakamura ,  Ichiro Sakamoto ,  Kiyohiko Maeda

发明人： Takashi Shimahara ,  Naoto Nakamura ,  Ichiro Sakamoto ,  Kiyohiko Maeda

IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/50 ,  H01L21/00 ,  H01L21/205 ,  H01L21/31 ,  C23C16/00

CPC分类号： C23C16/4401 ,  C23C16/4408 ,  C23C16/4412 ,  C23C16/45519

摘要： A substrate processing apparatus and method restrains outside air and gas-phase backward flow from entering the inside of a reaction chamber during a time period that the inside of the reaction chamber is opened to the outside through a substrate carrying-in/carrying-out opening. The substrate processing apparatus can comprise, for example, a vertical CVD apparatus having a gas supply system and a bypass line. The gas supply system supplies inert gas to a space between an outer tube and an inner tube of a reaction furnace during a boat loading period and a boat unloading period. The bypass line exhausts the atmosphere from the reaction chamber by a slow exhaust operation during the boat loading period and the boat unloading period.

摘要翻译： 基板处理装置和方法在反应室内部通过基板输入/输出开口向外部打开的时间段期间限制外部空气和气相逆流进入反应室内部 。 基板处理装置可以包括例如具有气体供给系统和旁路管线的立式CVD装置。 气体供给系统在船装载期间和船卸载期间，向反应炉的外管和内管之间的空间供给惰性气体。 旁路管路在船装载期间和卸船期间通过缓慢的排气操作从反应室排出气氛。

公开(公告)号：US06524650B1

公开(公告)日：2003-02-25

申请号：US09667244

申请日：2000-09-22

申请人： Takashi Shimahara ,  Naoto Nakamura ,  Ichiro Sakamoto ,  Kiyohiko Maeda

发明人： Takashi Shimahara ,  Naoto Nakamura ,  Ichiro Sakamoto ,  Kiyohiko Maeda

IPC分类号： C23C1600

CPC分类号： C23C16/4401 ,  C23C16/4408 ,  C23C16/4412 ,  C23C16/45519

摘要： Substrate processing apparatus and method, by which an outside air and a gas-phase backward flow are restrained from entering the inside of a reaction chamber during the inside of a reaction chamber is opened to the outside through a substrate carrying-in/carrying-out opening. This substrate processing apparatus, for example, a vertical CVD apparatus (200) has a gas supply system (240) and a bypass line (264). The gas supply system (240) supplies an inert gas to a space (3a) between an outer tube (1A) and an inner tube (2A) of a reaction furnace (211) in a boat loading term and a boat unloading term. The bypass line (264) exhausts an atmosphere from a reaction chamber (1a) by performing a slow exhaust operation in the boat loading term and the boat unloading term.

摘要翻译： 在反应室内部限制外部空气和气相逆流被阻止进入反应室内部的基板处理装置和方法通过基板搬入/排出向外部开口 开放 该衬底处理装置，例如垂直CVD装置（200）具有气体供给系统（240）和旁路管线（264）。 气体供给系统（240）以船装载期限和船卸载期间向惰性气体供给到反应炉（211）的外管（1A）和内管（2A）之间的空间（3a）。 旁路管线（264）通过在船装载期限和船卸载期间执行缓慢的排气操作从反应室（1a）排出气氛。

公开(公告)号：US5968593A

公开(公告)日：1999-10-19

申请号：US618769

申请日：1996-03-20

申请人： Ichiro Sakamoto ,  Naoto Nakamura

发明人： Ichiro Sakamoto ,  Naoto Nakamura

IPC分类号： H01L21/22 ,  C30B33/00 ,  H01L21/00 ,  H01L21/31 ,  C23C16/00

CPC分类号： H01L21/67109 ,  C30B33/005

摘要： A semiconductor manufacturing apparatus including a heating device; a reaction tube disposed within the heating device, the reaction tube having a gas inlet portion and an exhaust portion parted from each other by a predetermined distance in the longitudinal direction of the reaction tube; and a plurality of gas feed pipes extending along a side wall of the reaction tube from the exhaust portion side to the gas inlet portion, the plurality of gas feed pipes being parted from each other. The reaction gas is provided through the plurality of gas feed pipes into the reaction tube, thereby providing an improved uniform temperature distribution within the reaction tube and resulting in an improved uniform film thickness of the oxide film formed on the surface of the semiconductor wafer.

摘要翻译： 一种半导体制造装置，包括加热装置; 设置在加热装置内的反应管，反应管具有在反应管的长度方向上彼此分开预定距离的气体入口部分和排气部分; 以及多个气体供给管，其从所述排气部侧向所述气体导入部沿所述反应管的侧壁延伸，所述多个供气管相互分离。 反应气体通过多个气体供给管提供到反应管中，从而在反应管内提供改进的均匀的温度分布，并且导致在半导体晶片的表面上形成的氧化物膜的均匀膜厚度的改善。

公开(公告)号：US08509614B2

公开(公告)日：2013-08-13

申请号：US13253777

申请日：2011-10-05

申请人： Nobuhiko Hattori ,  Naoto Nakamura

发明人： Nobuhiko Hattori ,  Naoto Nakamura

IPC分类号： H04B10/08 ,  H04B17/00

CPC分类号： H04B10/272 ,  H04Q2213/1301

摘要： [Problem]This invention aims at solving the problem of how a subscriber premises-side optical network unit can be switched to an evaluation mode without the use of a jig board.[Means for Solving the Problem]The invention refers to a subscriber premises-side optical network unit (ONU 10) which is connected to a center-side optical network unit (OLT 1a) via an optical transmission line (optical fiber 2, 4) and to an external device (switch 6) via an electric signal line (electric signal line 5); comprising a memory (memory switch 15a) the stored content of which can be directly or indirectly rewritten by the external device; a detection part (CPU 15) for detecting that the content of the memory has been rewritten; and a control part (CPU 15) for performing, when the detection part detects that the stored content of the memory has been rewritten, a control whereby the optical sending part which sends optical signals to the optical transmission line is put into a continuous light emission state.

摘要翻译： 本发明旨在解决用户住宅侧光网络单元如何在不使用夹具板的情况下切换到评估模式的问题。 解决问题的手段本发明涉及经由光传输线路（光纤2,4）与中心侧光网络单元（OLT 1​​a）连接的用户住宅侧光网络单元（ONU10） 并通过电信号线（电信号线5）与外部装置（开关6）连接。 包括其存储内容可以由外部设备直接或间接重写的存储器（存储器开关15a）; 用于检测存储器的内容已经被重写的检测部分（CPU 15） 以及控制部（CPU15），用于当检测部检测到存储器的存储内容已被重写时，执行将向光传输线发送光信号的光发送部分进行连续发光的控制 州。

公开(公告)号：US08268731B2

公开(公告)日：2012-09-18

申请号：US11887347

申请日：2006-03-30

申请人： Naoto Nakamura ,  Iwao Nakamura ,  Ryota Sasajima

发明人： Naoto Nakamura ,  Iwao Nakamura ,  Ryota Sasajima

IPC分类号： H01L21/31

CPC分类号： H01L21/02238 ,  H01L21/31662 ,  H01L21/67109

摘要： Disclosed is a producing method of a semiconductor device, including: loading a substrate into a reaction tube; oxidizing the substrate under an atmospheric pressure by supplying a plurality of kinds of gases which react with each other and an inert gas into the reaction tube; and unloading, from the reaction tube, the substrate after the oxidizing, wherein in the oxidizing, a flow rate of the inert gas is varied in accordance with a variation of the atmospheric pressure to keep constant a partial pressure of an oxidizing gas or partial pressures of oxidizing gases in the reaction tube, and the flow rate of the inert gas is calculated based on a pre-calculated flow rate of a gas or pre-calculated flow rates of gases produced by reaction of the plurality of gases and a pre-calculated flow rate of a gas which is not consumed by the reaction and which remains or pre-calculated flow rates of gases which are not consumed by the reaction and which remain.

摘要翻译： 公开了一种半导体器件的制造方法，包括：将基板装载到反应管中; 通过将多种彼此反应的气体和惰性气体供应到反应管中，在大气压下氧化基板; 并且在氧化之后从反应管中卸载基板，其中在氧化中，惰性气体的流量根据大气压力的变化而变化，以保持氧化气体的分压或分压 的反应管中的氧化气体，并且惰性气体的流量基于气体的预先计算的流量或通过多个气体的反应产生的预先计算的气体流量和预先计算的 未被反应消耗的气体的流速，并且保留或预先计算的未被反应消耗并保留的气体的流速。

公开(公告)号：US20120087663A1

公开(公告)日：2012-04-12

申请号：US13253777

申请日：2011-10-05

申请人： Nobuhiko Hattori ,  Naoto Nakamura

发明人： Nobuhiko Hattori ,  Naoto Nakamura

IPC分类号： H04J14/00

CPC分类号： H04B10/272 ,  H04Q2213/1301

摘要： [Problem]This invention aims at solving the problem of how a subscriber premises-side optical network unit can be switched to an evaluation mode without the use of a jig board.[Means for Solving the Problem]The invention refers to a subscriber premises-side optical network unit (ONU 10) which is connected to a center-side optical network unit (OLT 1a) via an optical transmission line (optical fiber 2, 4) and to an external device (switch 6) via an electric signal line (electric signal line 5); comprising a memory (memory switch 15a) the stored content of which can be directly or indirectly rewritten by the external device; a detection part (CPU 15) for detecting that the content of the memory has been rewritten; and a control part (CPU 15) for performing, when the detection part detects that the stored content of the memory has been rewritten, a control whereby the optical sending part which sends optical signals to the optical transmission line is put into a continuous light emission state.

摘要翻译： 本发明旨在解决用户住宅侧光网络单元如何在不使用夹具板的情况下切换到评估模式的问题。 解决问题的手段本发明涉及经由光传输线路（光纤2,4）与中心侧光网络单元（OLT 1​​a）连接的用户住宅侧光网络单元（ONU10） 并通过电信号线（电信号线5）与外部装置（开关6）连接。 包括其存储内容可以由外部设备直接或间接重写的存储器（存储器开关15a）; 用于检测存储器的内容已经被重写的检测部分（CPU 15） 以及控制部（CPU15），用于当检测部检测到存储器的存储内容已被重写时，执行将向光传输线发送光信号的光发送部分进行连续发光的控制 州。

公开(公告)号：US07518141B2

公开(公告)日：2009-04-14

申请号：US11691682

申请日：2007-03-27

申请人： Naoto Nakamura

发明人： Naoto Nakamura

IPC分类号： H01L35/24

CPC分类号： H01L51/5265 ,  H01L27/3211

摘要： Provided is a multicolor organic light emitting apparatus having a plurality of organic light emitting devices formed on a substrate, for emitting two or more types of luminescent colors. A thickness of a layer formed between a light emitting layer and a reflection surface of a cathode is the same as that of each of first and second organic light emitting devices, and an optical distance between a light emitting surface of each of the light emitting layers and the reflection surface of the cathode is adjusted such that each thickness of the light emitting layers is varied to enhance light emitted from the light emitting layers by optical interference.

摘要翻译： 提供了一种多色有机发光装置，其具有形成在基板上的多个有机发光器件，用于发射两种或更多种类型的发光颜色。 在发光层和阴极的反射面之间形成的层的厚度与第一和第二有机发光器件的厚度相同，并且每个发光层的发光表面之间的光学距离 并且调整阴极的反射表面，使得发光层的每个厚度都被改变，以通过光学干涉来增强从发光层发射的光。

公开(公告)号：US20070228367A1

公开(公告)日：2007-10-04

申请号：US11691682

申请日：2007-03-27

申请人： Naoto Nakamura

发明人： Naoto Nakamura

IPC分类号： H01L29/08

CPC分类号： H01L51/5265 ,  H01L27/3211

摘要： Provided is a multicolor organic light emitting apparatus having a plurality of organic light emitting devices formed on a substrate, for emitting two or more types of luminescent colors. A thickness of a layer formed between a light emitting layer and a reflection surface of a cathode is the same as that of each of first and second organic light emitting devices, and an optical distance between a light emitting surface of each of the light emitting layers and the reflection surface of the cathode is adjusted such that each thickness of the light emitting layers is varied to enhance light emitted from the light emitting layers by optical interference.

摘要翻译： 提供了一种多色有机发光装置，其具有形成在基板上的多个有机发光器件，用于发射两种或更多种类型的发光颜色。 在发光层和阴极的反射面之间形成的层的厚度与第一和第二有机发光器件的厚度相同，并且每个发光层的发光表面之间的光学距离 并且调整阴极的反射表面，使得发光层的每个厚度都被改变，以通过光学干涉来增强从发光层发射的光。

公开(公告)号：US06705909B2

公开(公告)日：2004-03-16

申请号：US09987309

申请日：2001-11-14

申请人： Ichiro Nomura ,  Hidetoshi Suzuki ,  Tetsuya Kaneko ,  Shinya Mishina ,  Naoto Nakamura

发明人： Ichiro Nomura ,  Hidetoshi Suzuki ,  Tetsuya Kaneko ,  Shinya Mishina ,  Naoto Nakamura

IPC分类号： H01J902

CPC分类号： G09G3/22 ,  G09G2300/0426 ,  H01J1/316 ,  H01J29/028 ,  H01J29/864 ,  H01J31/127 ,  H01J2201/3165 ,  H01J2329/8625 ,  H01J2329/863 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8655

摘要： An image-forming device having, in an envelope, an electron-emitting element, an image-forming member for forming an image by irradiation of an electron beam emitted from the electron-emitting element, and an electroconductive supporting member for supporting the envelope. The potential of the supporting member is controlled to not be higher than the maximum potential applied to the electron-emitting element. The electron-emitting element and the image-forming member can be placed in juxtaposition on the same substrate, an electro-conductive substrate can be additionally provided in opposition to the face of the substrate, and the supporting member can be connected electrically to one of the electrodes and also to the electro-conductive substrate.

摘要翻译： 一种图像形成装置，在外壳中具有电子发射元件，用于通过照射从电子发射元件发射的电子束形成图像的图像形成部件和用于支撑外壳的导电支撑部件。 支撑构件的电位被控制为不高于施加到电子发射元件的最大电位。 电子发射元件和图像形成部件可以并置在同一基板上，可以相对于基板的表面另外设置导电基板，并且支撑部件可以电连接到 电极以及导电性基板。

公开(公告)号：US06593950B2

公开(公告)日：2003-07-15

申请号：US08418093

申请日：1995-04-06

申请人： Ichiro Nomura ,  Hidetoshi Suzuki ,  Takashi Noma ,  Yoshikazu Banno ,  Rie Ueno ,  Naoto Nakamura

发明人： Ichiro Nomura ,  Hidetoshi Suzuki ,  Takashi Noma ,  Yoshikazu Banno ,  Rie Ueno ,  Naoto Nakamura

IPC分类号： B41J2415

CPC分类号： H01J1/316 ,  B82Y10/00 ,  H01J31/127 ,  H01J2201/3165 ,  H01J2329/8625 ,  H01J2329/863

摘要： An electron-emitting device having an electron-emitting region between electrodes on a substrate where the electron-emitting region contains fine particles dispersed therein at an areal occupation ratio of the fine particles ranging from 20% to 75% of the electron-emitting region is disclosed. The other electron-emitting device where the electron-emitting region contains fine particles being arranged at gaps of from 5 Å to 100 Å and having average particle diameter of from 5 Å to 1000 Å is also disclosed. Electron beam-generating apparatus and image-forming apparatus comprise one of the electron-emitting regions and a modulation means for modulating the electron beams emitted from the electron-emitting devices in accordance with information signals.

摘要翻译： 电子发射器件在电子发射区域之间的电极之间具有电子发射区域，其中电子发射区域包含分散在其中的微粒子的电子发射区域以占电子发射区域的20％至75％的微小粒子的面积占有比率是 披露 还公开了其中电子发射区域包含细颗粒的其它电子发射器件，其布置在距离为5埃至100埃的间隔处，平均粒径为5埃至1000埃。 电子束产生装置和图像形成装置包括电子发射区域之一和用于根据信息信号调制从电子发射器件发射的电子束的调制装置。