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公开(公告)号：US20100302612A1
公开(公告)日：2010-12-02
申请号：US12745628
申请日：2009-02-20
CPC分类号： G02B26/105 , G02B26/085 , H03H9/02259 , H03H9/02362 , H03H9/2457 , H03H2009/02511 , Y10T74/18856
摘要： An oscillating structure includes a supporting member, a first oscillating member, second oscillating member, a first resilient supporting member configured to connect the supporting member and the first oscillating member and to support the first oscillating member for oscillatory motion around the supporting member as a central axis, and a second resilient supporting member configured to connect the first oscillating member and the second oscillating member and to support the second oscillating member movably relative to the first oscillating member, wherein the direction in which the first resilient supporting member extends from the supporting member to the first oscillating member and the direction in which the second resilient supporting member extends from the first oscillating member to the second oscillating member are opposite to each other.
摘要翻译： 振荡结构包括支撑构件，第一摆动构件，第二摆动构件，第一弹性支撑构件，构造成将支撑构件和第一摆动构件连接起来，并且支撑第一摆动构件作为中心的支撑构件周围的振荡运动 以及第二弹性支撑构件，其构造成连接第一摆动构件和第二摆动构件，并且相对于第一摆动构件可移动地支撑第二摆动构件，其中第一弹性支撑构件从支撑构件延伸的方向 并且第二弹性支撑构件从第一摆动构件延伸到第二摆动构件的方向彼此相反。
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2.发明授权Inspection apparatus, inspection system, inspection method of semiconductor devices, and manufacturing method of inspected semiconductor devices 有权检查装置，检查系统，半导体装置的检查方法以及检查的半导体装置的制造方法公开(公告)号：US09379029B2
公开(公告)日：2016-06-28
申请号：US14402951
申请日：2012-07-18
申请人： Yosuke Osanai , Takashi Ushijima
发明人： Yosuke Osanai , Takashi Ushijima
CPC分类号： H01L22/10 , G01R31/2601 , G01R31/2863 , H01L22/14 , H01L22/32
摘要： An inspection apparatus for inspecting output signal of a semiconductor device is provided with a monitor device configured to sense a signal on the monitor line and a plurality of inspection circuits connected to the monitor line. Each inspection circuit is provided with a semiconductor device support allowing a semiconductor device to be set thereon and including a signal terminal to which a signal is input from the set semiconductor device, a first resistor connected between the signal terminal and the monitor line, a selector terminal, and a first diode connected between the signal terminal and the selector terminal so that a cathode of the first diode is connected to a selector terminal side.
摘要翻译： 用于检查半导体器件的输出信号的检查装置设置有被配置为感测监视线上的信号的监视器装置和连接到监视器线路的多个检查电路。 每个检查电路设置有半导体器件支撑，允许半导体器件设置在其上，并且包括从组合半导体器件输入信号的信号端子，连接在信号端子和监视器线路之间的第一电阻器，选择器 端子和连接在信号端子和选择器端子之间的第一二极管，使得第一二极管的阴极连接到选择器端子侧。
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公开(公告)号：US08254004B2
公开(公告)日：2012-08-28
申请号：US12523122
申请日：2008-02-07
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0078 , B81B2201/047 , B81B2203/0118
摘要： An oscillating device includes an oscillator, an elastic supporting member for movably supporting the oscillator, a first supporting frame for supporting the elastic supporting member, and a second supporting frame extending along the elastic supporting member with a spacing maintained therebetween, the second supporting member extending from the first supporting frame, wherein the second supporting frame is provided in a cantilever shape relative to the first supporting frame.
摘要翻译： 振荡装置包括振荡器，用于可移动地支撑振荡器的弹性支撑构件，用于支撑弹性支撑构件的第一支撑框架和沿着弹性支撑构件延伸的间隔保持的第二支撑框架，第二支撑构件延伸 从所述第一支撑框架，其中所述第二支撑框架相对于所述第一支撑框架设置成悬臂形状。
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公开(公告)号：US07710129B2
公开(公告)日：2010-05-04
申请号：US11946520
申请日：2007-11-28
申请人： Toshiyuki Ogawa , Yoshitaka Zaitsu , Takashi Ushijima , Atsushi Kandori , Kaoru Noguchi , Kazuhiko Kato , Futoshi Hirose
发明人： Toshiyuki Ogawa , Yoshitaka Zaitsu , Takashi Ushijima , Atsushi Kandori , Kaoru Noguchi , Kazuhiko Kato , Futoshi Hirose
CPC分类号： G03G15/5037 , G01R29/12
摘要： A potential measurement apparatus is provided which can suitably maintain the oscillation state of an oscillator including a detection electrode and stably measure the potential of a measurement object. The potential measurement apparatus includes a bearing part, an elastic supporting part supported by the bearing part, an oscillator movably supported by the elastic supporting part, detection electrodes installed in the oscillator, a drive mechanism driving the oscillator and a signal detection unit. The signal detection unit is connected to the detection electrodes to detect electrical signals appearing in the detected electrodes. A stress detecting element for generating an electric signal according to the stress of the elastic suspension part 142 is provided.
摘要翻译： 提供了可以适当地保持包括检测电极的振荡器的振荡状态并稳定地测量测量对象的电位的电位测量装置。 电位测量装置包括轴承部，由轴承部支撑的弹性支撑部，由弹性支撑部可动地支撑的振动体，安装在振荡器中的检测电极，驱动振荡器的驱动机构和信号检测部。 信号检测单元连接到检测电极以检测出现在检测电极中的电信号。 提供了一种用于根据弹性悬挂部分142的应力产生电信号的应力检测元件。
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5.发明申请公开(公告)号：US20080116897A1
公开(公告)日：2008-05-22
申请号：US11924241
申请日：2007-10-25
申请人： Takashi Ushijima , Kaoru Noguchi , Atsushi Kandori , Yoshitaka Zaitsu , Kazuhiko Kato , Toshiyuki Ogawa , Futoshi Hirose
发明人： Takashi Ushijima , Kaoru Noguchi , Atsushi Kandori , Yoshitaka Zaitsu , Kazuhiko Kato , Toshiyuki Ogawa , Futoshi Hirose
IPC分类号： G01R29/12
CPC分类号： G01R29/12
摘要： A potential sensor is provided in which the adhesion of toner particles to the potential sensor is reduced or prevented from occurring, reducing or preventing the occurrence of a situation that accurate detection cannot be performed. The potential sensor has a movable member, detecting electrodes formed on the movable member, a support which movably supports the movable member, a driving mechanism which drives the movable member, and a stationary member which supports the support. Between the movable member and the stationary member, a first gap is so formed as to make the movable member 101 movable. The first gap has a part that is not larger in width than the maximum size of toner particles when the movable member is not elastically deformed and is at a neutral position.
摘要翻译： 提供了一种潜在的传感器，其中减少或防止了调色剂颗粒对电位传感器的粘附，减少或防止不能进行精确检测的情况。 电位传感器具有可移动部件，形成在可动部件上的检测电极，可移动地支撑可动部件的支撑体，驱动可动部件的驱动机构，以及支撑支撑体的静止部件。 在可动构件和固定构件之间，形成第一间隙以使可动构件101可移动。 第一间隙具有不大于当可移动部件没有弹性变形并处于中立位置时调色剂颗粒的最大尺寸的宽度的部分。
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公开(公告)号：US20060267578A1
公开(公告)日：2006-11-30
申请号：US11434780
申请日：2006-05-17
IPC分类号： G01R31/28
CPC分类号： G01R5/28
摘要： A potential measuring apparatus has a detection electrode on which an electric charge is induced according to a potential of a detection object, and a modulator for altering the generated quantity of the electric charge. The detection electrode has at least one depressed portion on a surface opposite to the detection object.
摘要翻译： 电位测量装置具有根据检测对象的电位感应电荷的检测电极和用于改变所产生的电荷量的调制器。 检测电极在与检测对象相反的表面上具有至少一个凹陷部分。
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公开(公告)号：US07049804B2
公开(公告)日：2006-05-23
申请号：US11178649
申请日：2005-07-11
IPC分类号： G01R31/02
CPC分类号： G01R29/12 , G03G15/5037
摘要： An electric potential measuring apparatus including a substrate disposed facing a measurement object, a detecting electrode provided insulated from the substrate, and a capacity modulating unit for modulating a coupling capacity between the detecting electrode and the measurement object. In the electric potential measuring apparatus, a region with a dielectric constant less than a dielectric constant of the substrate is formed in the substrate to achieve an increase in resistivity of a portion of the substrate between detecting electrodes, or a decrease in a stray capacity between the detecting electrode and the substrate.
摘要翻译： 一种电位测量装置，包括面向测量对象的衬底，与衬底绝缘的检测电极，以及用于调制检测电极和测量对象之间的耦合容量的电容调节单元。 在电位测量装置中，在衬底中形成介电常数小于衬底的介电常数的区域，以实现检测电极之间的衬底的一部分的电阻率的增加，或者在检测电极之间的杂散容量的降低 检测电极和基板。
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公开(公告)号：US06965239B2
公开(公告)日：2005-11-15
申请号：US10798315
申请日：2004-03-12
CPC分类号： G01D5/2412 , G01R29/12
摘要： Disclosed in a non-contacting electric potential sensor capable of being readily reduced in its size, which includes a detecting electrode, an electrically-conductive movable shutter, and a driving unit for driving the electrically-conductive movable shutter. The detecting electrode is to be placed facing a measurement object whose electric potential is to be measured. The electrically-conductive movable shutter is disposed so as to be movably located in a spacing formed between the detecting electrode and the measurement object when the detecting electrode is placed facing the measurement object, so that an exposure degree of the detecting electrode against the measurement object can be controlled. The driving unit includes a current injecting unit for selectively injecting current into the electrically-conductive movable shutter in a direction approximately perpendicular to a moving direction of the electrically-conductive movable shutter.
摘要翻译： 公开在能够容易地减小其尺寸的非接触电位传感器中，其包括检测电极，导电可移动快门以及用于驱动导电活动快门的驱动单元。 将检测电极放置成面向要测量其电位的测量对象。 当检测电极朝向测量对象放置时，导电可移动快门被设置成可移动地位于检测电极和测量对象之间形成的间隔中，使得检测电极对测量对象的曝光度 可以控制。 驱动单元包括电流注入单元，用于沿大致垂直于导电活动活门的移动方向的方向选择性地将电流注入到导电可移动活门中。
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公开(公告)号：US20050029111A1
公开(公告)日：2005-02-10
申请号：US10930959
申请日：2004-09-01
CPC分类号： G02B3/0025 , G02B3/0012 , G02B3/0031 , G02B3/0056 , Y10S428/901 , Y10T428/24917
摘要： In a method of fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electroplating or electrodeposition. A second plated layer is further formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroless plating to reduce a size distribution of microstructures over the array.
摘要翻译： 在制造微结构阵列的方法中，提供具有导电部分的衬底，在衬底的导电部分上形成绝缘掩模层，在绝缘掩模层中形成多个开口以露出 导电部分和第一电镀或电沉积层通过电镀或电沉积沉积在开口中和绝缘掩模层上。 在第一镀层或电沉积层上和通过无电镀处理导电部分上进一步形成第二镀层，以减小阵列上微结构的尺寸分布。
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10.发明授权Microstructure array, and apparatus and method for forming the microstructure array, and a mold for fabricating a microstructure array 有权微结构阵列，用于形成微结构阵列的装置和方法，以及用于制造微结构阵列的模具公开(公告)号：US06436265B1
公开(公告)日：2002-08-20
申请号：US09534341
申请日：2000-03-24
IPC分类号： C25D502
CPC分类号： G02B3/0056 , G02B3/0012 , G02B3/0043
摘要： A fabrication method of fabricating an array of microstructures is provided. The method includes the step of preparing a substrate with a surface including a usable region and a dummy region continuously set around the usable region, at least the usable region and the dummy region of the substrate are electrically conductive and have a conductive portion. The method also includes the steps of forming a first insulating layer on the conductive portion, and forming a plurality of openings in the first insulating layer, the openings being arranged in a predetermined array pattern. Additionally, the method includes the step of performing one of electroplating and electrodeposition using the conductive portion as an electrode to form a first plated or electrodeposited layer in the openings and on the first insulating layer in both the usable region and the dummy region.
摘要翻译： 提供了一种制造微结构阵列的制造方法。 该方法包括制备具有包括可用区域和连续设置在可用区域周围的虚拟区域的表面的衬底的步骤，至少衬底的可用区域和虚拟区域是导电的并且具有导电部分。 该方法还包括以下步骤：在导电部分上形成第一绝缘层，并在第一绝缘层中形成多个开口，开口以预定阵列图案布置。 此外，该方法包括使用导电部分作为电极进行电镀和电沉积之一的步骤，以在可用区域和虚拟区域中的开口中和第一绝缘层上形成第一电镀或电沉积层。
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