公开(公告)号：US07963161B2

公开(公告)日：2011-06-21

申请号：US12261862

申请日：2008-10-30

申请人： Takeshi Morino ,  Yuki Okamoto ,  Naoki Saito ,  Hiroshi Hirayama ,  Takahiro Miki

发明人： Takeshi Morino ,  Yuki Okamoto ,  Naoki Saito ,  Hiroshi Hirayama ,  Takahiro Miki

IPC分类号： G01F1/68

CPC分类号： G01F1/6842 ,  G01F5/00

摘要： An object of the present invention is to provide a structure which prevents a particulate contaminant and a liquid contaminant on which centrifugal separation hardly works, from arriving at a sensor element part. In order to attain the above described object, in a heat resistor type air flow rate measuring device which includes an auxiliary passage taking in a part of a fluid flowing in a main passage, and a plate-shaped sensor element installed in the aforesaid auxiliary passage and for detecting a flow rate of the fluid, and is a heat resistor type flow rate measuring device having an auxiliary passage formed along a curved line at 90° or more in an auxiliary passage portion at an upstream side from the plate-shaped sensor element, the aforesaid auxiliary passage is formed along a curved line at 90° or more on a phantom plane orthogonal to a sensor formation surface of the plate-shaped sensor element and parallel with a flow, and a sensor formation surface side and a rear side of the plate-shaped sensor element have gaps from an auxiliary passage wall surface.

摘要翻译： 本发明的目的是提供一种防止离心分离几乎不起作用的颗粒污染物和液体污染物到达传感器元件部分的结构。 为了达到上述目的，在一种热电阻式空气流量测量装置中，该热阻电阻式空气流量测量装置包括一个辅助通路，该辅助通道占据了在主通道中流动的一部分流体，以及一个安装在上述辅助通道中的板状传感器元件 并且用于检测流体的流量，并且是一种热电阻式流量测量装置，其具有在板形传感器元件的上游侧的辅助通道部分中沿着曲线在90°或更大的曲线形成的辅助通道 上述辅助通道在垂直于板状传感器元件的传感器形成表面的幻影平面上以90°或更大的曲线形成，并且与流动平行，并且传感器形成表面侧和后侧 板状传感器元件具有从辅助通道壁表面的间隙。

公开(公告)号：US20090173151A1

公开(公告)日：2009-07-09

申请号：US12261862

申请日：2008-10-30

申请人： Takeshi Morino ,  Yuki Okamoto ,  Naoki Saito ,  Hiroshi Hirayama ,  Takahiro Miki

发明人： Takeshi Morino ,  Yuki Okamoto ,  Naoki Saito ,  Hiroshi Hirayama ,  Takahiro Miki

IPC分类号： G01F1/68

CPC分类号： G01F1/6842 ,  G01F5/00

摘要： An object of the present invention is to provide a structure which prevents a particulate contaminant and a liquid contaminant on which centrifugal separation hardly works, from arriving at a sensor element part. In order to attain the above described object, in a heat resistor type air flow rate measuring device which includes an auxiliary passage taking in a part of a fluid flowing in a main passage, and a plate-shaped sensor element installed in the aforesaid auxiliary passage and for detecting a flow rate of the fluid, and is a heat resistor type flow rate measuring device having an auxiliary passage formed along a curved line at 90° or more in an auxiliary passage portion at an upstream side from the plate-shaped sensor element, the aforesaid auxiliary passage is formed along a curved line at 90° or more on a phantom plane orthogonal to a sensor formation surface of the plate-shaped sensor element and parallel with a flow, and a sensor formation surface side and a rear side of the plate-shaped sensor element have gaps from an auxiliary passage wall surface.

摘要翻译： 本发明的目的是提供一种防止离心分离几乎不起作用的颗粒污染物和液体污染物到达传感器元件部分的结构。 为了达到上述目的，在一种热电阻式空气流量测量装置中，该热阻电阻式空气流量测量装置包括一个辅助通路，该辅助通道占据了在主通道中流动的一部分流体，以及一个安装在上述辅助通道中的板状传感器元件 并且用于检测流体的流量，并且是一种热电阻式流量测量装置，其具有在板形传感器元件的上游侧的辅助通道部分中沿着曲线在90°或更大的曲线形成的辅助通道 上述辅助通道在垂直于板状传感器元件的传感器形成表面的幻影平面上以90°或更大的曲线形成，并且与流动平行，并且传感器形成表面侧和后侧 板状传感器元件具有从辅助通道壁表面的间隙。

公开(公告)号：US07942053B2

公开(公告)日：2011-05-17

申请号：US12261700

申请日：2008-10-30

申请人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

发明人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F5/00 ,  G01F15/12

摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.

摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。

公开(公告)号：US08347706B2

公开(公告)日：2013-01-08

申请号：US12850338

申请日：2010-08-04

申请人： Yuki Okamoto ,  Takeshi Morino ,  Naoki Saito ,  Masayuki Hio

发明人： Yuki Okamoto ,  Takeshi Morino ,  Naoki Saito ,  Masayuki Hio

IPC分类号： G01F1/68

CPC分类号： G01F1/6842 ,  G01F5/00

摘要： A plate-shaped board is arranged so that fluid passages are respectively formed at a sensor-element mounting surface side of the plate-shaped board and at a backside surface side thereof being opposed to the sensor-element mounting surface side, a curved passage portion is provided which is located upstream of the plate-shaped board and changes its direction so as to form a curved line, and the curved passage portion has an outer-side wall surface including a sloping portion that slopes so that, of two edge portions of the outer-side wall surface in a direction perpendicular to board surfaces of the plate-shaped board, the edge portion located on a sidewall surface, facing the sensor-element mounting surface, of the curved passage portion is positioned closer to an inner wall surface of the curved passage portion than the edge portion located on a sidewall surface opposed to the first sidewall surface, along the sidewall surfaces.

摘要翻译： 在板状基板的传感器元件安装面侧和与传感器元件安装面侧相对的背面侧分别形成有流路，形成有板状的基板，弯曲的通路部 设置在所述板状基板的上游侧并改变其方向以形成曲线，并且所述弯曲通道部分具有​​外侧壁表面，所述外侧壁表面包括倾斜部分，所述倾斜部分的两个边缘部分 弯曲通道部分的与板状板的板表面垂直的方向的外侧壁表面位于靠近传感器元件安装表面的侧壁表面上的边缘部分位于更靠近内壁表面 弯曲的通道部分比位于与第一侧壁表面相对的侧壁表面上的边缘部分沿着侧壁表面。

公开(公告)号：US20090126477A1

公开(公告)日：2009-05-21

申请号：US12261700

申请日：2008-10-30

申请人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

发明人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

IPC分类号： G01F1/69

CPC分类号： G01F1/6845 ,  G01F5/00 ,  G01F15/12

摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.

摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。

公开(公告)号：US08640538B2

公开(公告)日：2014-02-04

申请号：US13393155

申请日：2011-09-13

申请人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

发明人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

IPC分类号： G01F1/68

CPC分类号： G01F1/383 ,  G01F1/34 ,  G01F1/6845 ,  G01F1/692 ,  G01F1/698 ,  G01F5/00 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/10157 ,  H01L2924/15151 ,  H01L2924/15153

摘要： Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).

摘要翻译： 提供了抑制每个流量传感器的性能变化的技术。 在本发明的流量传感器FS1中，半导体芯片CHP1的一部分被配置为在形成在半导体芯片CHP1上的流量检测单元（FDU）暴露的状态下被树脂（MR）覆盖。 由于树脂（MR）的上表面SUR（MR）高于半导体芯片（CHP1）的上表面SUR（CHP），所以通过在上表面SUR（CHP）的一部分上密封树脂 半导体芯片CHP1在与空气流动方向平行的方向上，可以使流量检测单元（FDU）周围的空气流稳定。 此外，通过增加半导体芯片（CHP1）和树脂（MR）之间的接触面积，可以防止半导体芯片（CHP1）和树脂（MR）之间的界面剥离。

公开(公告)号：US20130192388A1

公开(公告)日：2013-08-01

申请号：US13393155

申请日：2011-09-13

申请人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

发明人： Tsutomu Kono ,  Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Noboru Tokuyasu ,  Shinobu Tashiro

IPC分类号： G01F1/34

CPC分类号： G01F1/383 ,  G01F1/34 ,  G01F1/6845 ,  G01F1/692 ,  G01F1/698 ,  G01F5/00 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/10157 ,  H01L2924/15151 ,  H01L2924/15153

摘要： Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).

摘要翻译： 提供了抑制每个流量传感器的性能变化的技术。 在本发明的流量传感器FS1中，半导体芯片CHP1的一部分被配置为在形成在半导体芯片CHP1上的流量检测单元（FDU）暴露的状态下被树脂（MR）覆盖。 由于树脂（MR）的上表面SUR（MR）高于半导体芯片（CHP1）的上表面SUR（CHP），所以通过在上表面SUR（CHP）的一部分上密封树脂 半导体芯片CHP1在与空气流动方向平行的方向上，可以使流量检测单元（FDU）周围的空气流稳定。 此外，通过增加半导体芯片（CHP1）和树脂（MR）之间的接触面积，可以防止半导体芯片（CHP1）和树脂（MR）之间的界面剥离。

公开(公告)号：USD660192S1

公开(公告)日：2012-05-22

申请号：US29385385

申请日：2011-02-14

申请人： Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Ryo Sato ,  Yasuo Onose

设计人： Keiji Hanzawa ,  Takeshi Morino ,  Yuki Okamoto ,  Ryo Sato ,  Yasuo Onose

公开(公告)号：US07523659B2

公开(公告)日：2009-04-28

申请号：US11743979

申请日：2007-05-03

申请人： Yuki Okamoto ,  Shinya Igarashi ,  Chihiro Kobayashi ,  Masatomo Ide ,  Takeshi Morino

发明人： Yuki Okamoto ,  Shinya Igarashi ,  Chihiro Kobayashi ,  Masatomo Ide ,  Takeshi Morino

IPC分类号： G01F1/68

CPC分类号： G01F1/72 ,  G01F1/6842 ,  G01F5/00

摘要： In a thermal type flow rate measurement apparatus comprising a sub-passage having a detour passage and a hole just before a flow rate measuring part, for preventing its output value from falling onto a negative side when the flow rate is abruptly changed, a slit is formed downstream of a flow rate detecting element located after the detour passage. The slit hole may be arranged between the flow rate detecting element and the outlet port part, and may be opened between a wall surface side and a recess part. Thereby, it is possible to prevent the output value from falling in the negative side upon rise-up thereof.

摘要翻译： 在热式流量测量装置中，包括具有迂回通道和恰好在流量测量部分之前的孔的子通道，当流量急剧变化时，为防止其输出值落在负侧， 形成在位于绕行通道之后的流量检测元件的下游。 狭缝孔可以布置在流量检测元件和出口部之间，并且可以在壁表面侧和凹部之间打开。 由此，能够防止在上升时负极侧的输出值下降。

公开(公告)号：US20070256493A1

公开(公告)日：2007-11-08

申请号：US11743979

申请日：2007-05-03

申请人： Yuki OKAMOTO ,  Shinya Igarashi ,  Chihiro Kobayashi ,  Masatomo Ide ,  Takeshi Morino

发明人： Yuki OKAMOTO ,  Shinya Igarashi ,  Chihiro Kobayashi ,  Masatomo Ide ,  Takeshi Morino

IPC分类号： G01F1/68

CPC分类号： G01F1/72 ,  G01F1/6842 ,  G01F5/00

摘要： In a thermal type flow rate measurement apparatus comprising a sub-passage having a detour passage and a hole just before a flow rate measuring part, for preventing its output value from falling onto a negative side when the flow rate is abruptly changed, a slit is formed downstream of a flow rate detecting element located after the detour passage. The slit hole may be arranged between the flow rate detecting element and the outlet port part, and may be opened between a wall surface side and a recess part. Thereby, it is possible to prevent the output value from falling in the negative side upon rise-up thereof.

摘要翻译： 在热式流量测量装置中，包括具有迂回通道和恰好在流量测量部分之前的孔的子通道，当流量急剧变化时，为防止其输出值落在负侧， 形成在位于绕行通道之后的流量检测元件的下游。 狭缝孔可以布置在流量检测元件和出口部之间，并且可以在壁表面侧和凹部之间打开。 由此，能够防止在上升时负极侧的输出值下降。