摘要:
A plate-shaped board is arranged so that fluid passages are respectively formed at a sensor-element mounting surface side of the plate-shaped board and at a backside surface side thereof being opposed to the sensor-element mounting surface side, a curved passage portion is provided which is located upstream of the plate-shaped board and changes its direction so as to form a curved line, and the curved passage portion has an outer-side wall surface including a sloping portion that slopes so that, of two edge portions of the outer-side wall surface in a direction perpendicular to board surfaces of the plate-shaped board, the edge portion located on a sidewall surface, facing the sensor-element mounting surface, of the curved passage portion is positioned closer to an inner wall surface of the curved passage portion than the edge portion located on a sidewall surface opposed to the first sidewall surface, along the sidewall surfaces.
摘要:
A first sub passage portion and a second sub passage portion are configured so as to form layers on both sides of a separation wall, respectively. A linear passage portion of a third sub passage portion is formed so that a cross section thereof extends within a range across both sides of the separation wall in a direction perpendicular to a wall surface of the separation wall. The cross section is taken along a direction perpendicular to a flow direction of a fluid flowing through the linear passage portion. The separation wall separates the layer of the first sub passage portion and the layer of the second sub passage portion from each other. A first communication passage portion which allows the first sub passage portion to communicate with the third sub passage portion curves to make a directional change and connects a passage wall surface of the first sub passage portion to a side wall of the third sub passage portion by an inclined surface. The passage wall surface is defined by the separation wall. The side wall is located on a side of the second sub passage portion with respect to the separation wall. A through passage which passes through the separation wall is provided in a second communication passage portion which allows the second sub passage portion to communicate with the third sub passage portion.
摘要:
A first sub passage portion and a second sub passage portion are configured so as to form layers on both sides of a separation wall, respectively. A linear passage portion of a third sub passage portion is formed so that a cross section thereof extends within a range across both sides of the separation wall in a direction perpendicular to a wall surface of the separation wall. The cross section is taken along a direction perpendicular to a flow direction of a fluid flowing through the linear passage portion. The separation wall separates the layer of the first sub passage portion and the layer of the second sub passage portion from each other. A first communication passage portion which allows the first sub passage portion to communicate with the third sub passage portion curves to make a directional change and connects a passage wall surface of the first sub passage portion to a side wall of the third sub passage portion by an inclined surface. The passage wall surface is defined by the separation wall. The side wall is located on a side of the second sub passage portion with respect to the separation wall. A through passage which passes through the separation wall is provided in a second communication passage portion which allows the second sub passage portion to communicate with the third sub passage portion.
摘要:
An object of the present invention is to provide a structure which prevents a particulate contaminant and a liquid contaminant on which centrifugal separation hardly works, from arriving at a sensor element part. In order to attain the above described object, in a heat resistor type air flow rate measuring device which includes an auxiliary passage taking in a part of a fluid flowing in a main passage, and a plate-shaped sensor element installed in the aforesaid auxiliary passage and for detecting a flow rate of the fluid, and is a heat resistor type flow rate measuring device having an auxiliary passage formed along a curved line at 90° or more in an auxiliary passage portion at an upstream side from the plate-shaped sensor element, the aforesaid auxiliary passage is formed along a curved line at 90° or more on a phantom plane orthogonal to a sensor formation surface of the plate-shaped sensor element and parallel with a flow, and a sensor formation surface side and a rear side of the plate-shaped sensor element have gaps from an auxiliary passage wall surface.
摘要:
An object of the present invention is to provide a structure which prevents a particulate contaminant and a liquid contaminant on which centrifugal separation hardly works, from arriving at a sensor element part. In order to attain the above described object, in a heat resistor type air flow rate measuring device which includes an auxiliary passage taking in a part of a fluid flowing in a main passage, and a plate-shaped sensor element installed in the aforesaid auxiliary passage and for detecting a flow rate of the fluid, and is a heat resistor type flow rate measuring device having an auxiliary passage formed along a curved line at 90° or more in an auxiliary passage portion at an upstream side from the plate-shaped sensor element, the aforesaid auxiliary passage is formed along a curved line at 90° or more on a phantom plane orthogonal to a sensor formation surface of the plate-shaped sensor element and parallel with a flow, and a sensor formation surface side and a rear side of the plate-shaped sensor element have gaps from an auxiliary passage wall surface.
摘要:
An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.
摘要:
An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.
摘要:
Provided is a thermal fluid flow rate measurement device that inhibits the thermal fluid flow rate measurement device and peripheral parts from thermally affecting an intake air temperature detection element and measures an intake air temperature with high accuracy. The thermal fluid flow rate measurement device includes an auxiliary passage 8 that is inserted into a main passage 2 to acquire a part of an air flow 7 in the main passage, a base member 5 that forms a part of the auxiliary passage, a flow rate detection element 11 that is supported by the base member and disposed in the auxiliary passage to detect the flow rate of a fluid, and a circuit section 10 that is electrically connected to the flow rate detection element and housed in a circuit chamber 21 formed by a mold member 4 which is a part of the auxiliary passage. An intake air temperature detection element 9 is disposed outside the auxiliary passage and mounted on an upstream end face of the mold member relative to the air flow to detect the intake air temperature.
摘要:
Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).
摘要:
Technique of suppressing performance variations for each flow sensor is provided. In a flow sensor FS1 of the present invention, a part of a semiconductor chip CHP1 is configured to be covered with resin (MR) in a state in which a flow sensing unit (FDU) formed on a semiconductor chip CHP1 is exposed. Since an upper surface SUR(MR) of the resin (MR) is higher than an upper surface SUR(CHP) of the semiconductor chip (CHP1) by sealing the resin (MR) on a part of the upper surface SUR(CHP) of the semiconductor chip CHP1 in a direction parallel to an air flow direction, the air flow around the flow sensing unit (FDU) can be stabilized. Further, interface peeling between the semiconductor chip (CHP1) and the resin (MR) can be prevented by an increase of contact area between the semiconductor chip (CHP1) and the resin (MR).