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公开(公告)号：US20100302680A1
公开(公告)日：2010-12-02
申请号：US12457089
申请日：2009-06-01
IPC分类号： G11B5/23
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/315
摘要： A perpendicular magnetic write head includes: a magnetic pole having an end face on an air bearing surface; and side shield layers each having an end face on the air bearing surface, and arranged on both sides, in a write track width direction, of the magnetic pole with a side gap in between. The end face of the magnetic pole has a geometry in which a width at a trailing edge is larger than a width at a leading edge. Relationship D1
摘要翻译： 垂直磁写头包括：磁极，其在空气轴承表面上具有端面; 以及侧面屏蔽层，其各自具有位于空气轴承表面上的端面，并且布置在磁极的写入磁道宽度方向的两侧，其间具有侧面间隙。 磁极的端面具有几何形状，其中后缘处的宽度大于前缘处的宽度。 在空气轴承表面中满足关系D1
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公开(公告)号：US08559133B2
公开(公告)日：2013-10-15
申请号：US12457089
申请日：2009-06-01
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/315
摘要： A perpendicular magnetic write head includes: a magnetic pole having an end face on an air bearing surface; and side shield layers each having an end face on the air bearing surface, and arranged on both sides, in a write track width direction, of the magnetic pole with a side gap in between. The end face of the magnetic pole has a geometry in which a width at a trailing edge is larger than a width at a leading edge. Relationship D1
摘要翻译： 垂直磁写头包括：磁极，其在空气轴承表面上具有端面; 以及侧面屏蔽层，其各自具有位于空气轴承表面上的端面，并且布置在磁极的写入磁道宽度方向的两侧，其间具有侧面间隙。 磁极的端面具有几何形状，其中后缘处的宽度大于前缘处的宽度。 在空气轴承表面中满足关系D1
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3.发明授权公开(公告)号：US08472137B2
公开(公告)日：2013-06-25
申请号：US12845349
申请日：2010-07-28
申请人： Kei Hirata , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
发明人： Kei Hirata , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
CPC分类号： G11B5/6082 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： The present invention relates to a magnetic head, a manufacturing method therefor, a head assembly, and a magnetic recording/reproducing apparatus. According to the present invention, it includes a magnetic pole layer, a non-magnetic layer, a trailing gap layer, and a trailing shield layer. The magnetic pole layer has a pole tip exposed on a magnetic medium-facing surface. The non-magnetic layer is laid on the magnetic pole layer. The trailing shield layer is exposed on the magnetic medium-facing surface and laid over the magnetic pole layer and the non-magnetic layer with the trailing gap layer between. The magnetic pole layer and the non-magnetic layer have a continuous tapered face opposed to a lower side of the trailing shield layer. Moreover, the tapered face extends from a trailing edge of the pole tip at a constant inclination angle.
摘要翻译： 磁头及其制造方法技术领域本发明涉及一种磁头及其制造方法，磁头组件以及磁记录/重放装置。 根据本发明，它包括磁极层，非磁性层，后隙层和后屏蔽层。 磁极层具有暴露在面向磁介质的表面上的极尖。 非磁性层铺设在磁极层上。 后屏蔽层暴露在面向磁介质的表面上，并铺设在磁极层和非磁性层之间，后隙间隔在其间。 磁极层和非磁性层具有与后屏蔽层的下侧相对的连续锥形面。 此外，锥形面从极尖的后缘以恒定的倾斜角度延伸。
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4.发明申请公开(公告)号：US20120026629A1
公开(公告)日：2012-02-02
申请号：US12845349
申请日：2010-07-28
申请人： Kei HIRATA , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
发明人： Kei HIRATA , Kenkichi Anagawa , Michitaka Nishiyama , Hideyuki Yatsu , Shin Narushima , Hisayoshi Watanabe , Tatsuhiro Nojima
CPC分类号： G11B5/6082 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： The present invention relates to a magnetic head, a manufacturing method therefor, a head assembly, and a magnetic recording/reproducing apparatus. According to the present invention, it includes a magnetic pole layer, a non-magnetic layer, a trailing gap layer, and a trailing shield layer. The magnetic pole layer has a pole tip exposed on a magnetic medium-facing surface. The non-magnetic layer is laid on the magnetic pole layer. The trailing shield layer is exposed on the magnetic medium-facing surface and laid over the magnetic pole layer and the non-magnetic layer with the trailing gap layer between. The magnetic pole layer and the non-magnetic layer have a continuous tapered face opposed to a lower side of the trailing shield layer. Moreover, the tapered face extends from a trailing edge of the pole tip at a constant inclination angle.
摘要翻译： 磁头及其制造方法技术领域本发明涉及一种磁头及其制造方法，磁头组件以及磁记录/重放装置。 根据本发明，它包括磁极层，非磁性层，后隙层和后屏蔽层。 磁极层具有暴露在面向磁介质的表面上的极尖。 非磁性层铺设在磁极层上。 后屏蔽层暴露在面向磁介质的表面上，并铺设在磁极层和非磁性层之间，后隙间隔在其间。 磁极层和非磁性层具有与后屏蔽层的下侧相对的连续锥形面。 此外，锥形面从极尖的后缘以恒定的倾斜角度延伸。
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5.发明授权公开(公告)号：US08102622B2
公开(公告)日：2012-01-24
申请号：US12318645
申请日：2009-01-05
申请人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
发明人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： In a perpendicular magnetic write head manufacturing method a magnetic layer is formed on a substrate. On the magnetic layer, first and second nonmagnetic layers are formed with different materials. A mask pattern is formed on the second nonmagnetic layer, and the second nonmagnetic layer in a region not covered with the mask pattern is removed. Thereby, the patterned second nonmagnetic layer is formed while leaving the first nonmagnetic layer. The mask pattern is removed and a milling process is selectively performed on the first nonmagnetic layer and the magnetic layer with the patterned second nonmagnetic layer as a mask to remove all of the first nonmagnetic layer in an exposed region and to dig down the magnetic layer in the exposed region, thereby forming a main magnetic pole layer having an inclined part whose thickness decreases with distance from an edge position of the patterned second nonmagnetic layer.
摘要翻译： 在垂直磁性写入头制造方法中，在衬底上形成磁性层。 在磁性层上，第一和第二非磁性层由不同的材料形成。 在第二非磁性层上形成掩模图案，并且去除未被掩模图案覆盖的区域中的第二非磁性层。 由此，形成图案化的第二非磁性层，同时离开第一非磁性层。 去除掩模图案，并且在第一非磁性层和具有图案化的第二非磁性层的磁性层上选择性地进行研磨工艺作为掩模，以去除暴露区域中的所有第一非磁性层，并将 从而形成具有倾斜部分的主磁极层，该倾斜部分的厚度随着距图案化的第二非磁性层的边缘位置的距离而减小。
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6.发明申请公开(公告)号：US20100172054A1
公开(公告)日：2010-07-08
申请号：US12318645
申请日：2009-01-05
申请人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
发明人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： In a perpendicular magnetic write head manufacturing method a magnetic layer is formed on a substrate. On the magnetic layer, first and second nonmagnetic layers are formed with different materials. A mask pattern is formed on the second nonmagnetic layer, and the second nonmagnetic layer in a region not covered with the mask pattern is removed Thereby, the patterned second nonmagnetic layer is formed while leaving the first nonmagnetic layer. The mask pattern is removed and a milling process is selectively performed on the first nonmagnetic layer and the magnetic layer with the patterned second nonmagnetic layer as a mask to remove all of the first nonmagnetic layer in an exposed region and to dig down the magnetic layer in the exposed region, thereby forming a main magnetic pole layer having an inclined part whose thickness decreases with distance from an edge position of the patterned second nonmagnetic layer.
摘要翻译： 在垂直磁性写入头制造方法中，在衬底上形成磁性层。 在磁性层上，第一和第二非磁性层由不同的材料形成。 掩模图案形成在第二非磁性层上，并且未被掩模图案覆盖的区域中的第二非磁性层被去除。由此，在离开第一非磁性层的同时形成图案化的第二非磁性层。 去除掩模图案，并且在第一非磁性层和具有图案化的第二非磁性层的磁性层上选择性地进行研磨工艺作为掩模，以去除暴露区域中的所有第一非磁性层，并将 从而形成具有倾斜部分的主磁极层，该倾斜部分的厚度随着距图案化的第二非磁性层的边缘位置的距离而减小。
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7.发明申请SHAPING METHOD OF THIN FILM AND MANUFACTURING METHOD OF PERPENDICULAR RECORDING MAGNETIC HEAD USING THE SAME 有权薄膜的成形方法及其使用的全息记录磁头的制造方法公开(公告)号：US20100213163A1
公开(公告)日：2010-08-26
申请号：US12389688
申请日：2009-02-20
申请人： Hisayoshi Watanabe , Toshiomi Yokoyama , Nobuyuki Mori , Akihiro Kaneko , Michitaka Nishiyama , Kenji Yokoyama
发明人： Hisayoshi Watanabe , Toshiomi Yokoyama , Nobuyuki Mori , Akihiro Kaneko , Michitaka Nishiyama , Kenji Yokoyama
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： The present invention relates to a shaping method of a thin film layer and a manufacturing method of a perpendicular recording magnetic head using the same. In the thin film layer shaping method according to the present invention, since a second thin film of a lower etching rate is etched by a preliminary etching amount allowing for a difference between the etching rate of the second thin film and an etching rate of a first thin film in side-by-side relationship with each other, both the first and second thin films can be etched by the same etching amount through a subsequent etching step, so that the thin film layer can be shaped into a given shape. Thus, the surface of the thin film layer can be planarized.
摘要翻译： 本发明涉及薄膜层的成形方法和使用该薄膜层的垂直记录磁头的制造方法。 在根据本发明的薄膜层成形方法中，由于通过初步蚀刻量蚀刻蚀刻速率较低的第二薄膜，从而允许第二薄膜的蚀刻速率与第一薄膜的蚀刻速率之间的差异 薄膜彼此并排关系，通过后续的蚀刻步骤可以通过相同的蚀刻量来蚀刻第一和第二薄膜，使得薄膜层可以成形为给定的形状。 因此，可以平坦化薄膜层的表面。
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8.发明授权公开(公告)号：US08080167B2
公开(公告)日：2011-12-20
申请号：US12389688
申请日：2009-02-20
申请人： Hisayoshi Watanabe , Toshiomi Yokoyama , Nobuyuki Mori , Akihiro Kaneko , Michitaka Nishiyama , Kenji Yokoyama
发明人： Hisayoshi Watanabe , Toshiomi Yokoyama , Nobuyuki Mori , Akihiro Kaneko , Michitaka Nishiyama , Kenji Yokoyama
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： The present invention relates to a shaping method of a thin film layer and a manufacturing method of a perpendicular recording magnetic head using the same. In the thin film layer shaping method according to the present invention, since a second thin film of a lower etching rate is etched by a preliminary etching amount allowing for a difference between the etching rate of the second thin film and an etching rate of a first thin film in side-by-side relationship with each other, both the first and second thin films can be etched by the same etching amount through a subsequent etching step, so that the thin film layer can be shaped into a given shape. Thus, the surface of the thin film layer can be planarized.
摘要翻译： 本发明涉及薄膜层的成形方法和使用该薄膜层的垂直记录磁头的制造方法。 在根据本发明的薄膜层成形方法中，由于通过初步蚀刻量蚀刻蚀刻速率较低的第二薄膜，从而允许第二薄膜的蚀刻速率与第一薄膜的蚀刻速率之间的差异 薄膜彼此并排关系，通过后续的蚀刻步骤可以通过相同的蚀刻量来蚀刻第一和第二薄膜，使得薄膜层可以成形为给定的形状。 因此，可以平坦化薄膜层的表面。
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9.发明申请METHOD OF FORMING MASK FOR DRY ETCHING AND MANUFACTURING METHOD OF MAGNETIC HEAD USING THE SAME METHOD 失效使用相同方法形成干蚀刻掩模的方法和磁头的制造方法公开(公告)号：US20100078316A1
公开(公告)日：2010-04-01
申请号：US12241667
申请日：2008-09-30
IPC分类号： C25F3/02
CPC分类号： G11B5/1278 , G11B5/3163
摘要： The present invention relates to a method for forming a dry etching mask. A plurality of aluminum oxide films are sequentially sputtered on a material to be dry etched in such a manner that etching rate with respect to reactive ion etching increases toward a lower layer. On a laminated film of the plurality of aluminum oxide films, there is formed a first mask that has etching resistance with respect to the reactive ion etching. Reactive ion etching is performed from above the first mask to form a second mask of the laminated film.
摘要翻译： 本发明涉及一种形成干蚀刻掩模的方法。 将多个氧化铝膜依次溅射在待干蚀刻的材料上，使得相对于反应离子蚀刻的蚀刻速率向下层增加。 在多个氧化铝膜的层叠膜上形成有相对于反应离子蚀刻具有耐腐蚀性的第一掩模。 从第一掩模上方进行反应离子蚀刻，以形成层压膜的第二掩模。
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公开(公告)号：US20100084262A1
公开(公告)日：2010-04-08
申请号：US12244298
申请日：2008-10-02
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： The present invention relates to a method for manufacturing a perpendicular recording magnetic head. The method for manufacturing a perpendicular recording magnetic head according to the present invention includes first to third steps. At the first step, a main magnetic pole layer is formed on a foundation layer. At the second step, a main magnetic pole forming mask whose recording-medium-facing surface is of an inverted trapezoidal shape is formed on the main magnetic pole layer. At the third step, a main magnetic pole whose recording-medium-facing surface is of an inverted trapezoidal shape is formed by performing ion milling on a laminated structure including the foundation layer and the main magnetic pole layer from a direction which makes a given angle with a lamination direction according to a bevel angle of the inverted trapezoidal shape.
摘要翻译： 本发明涉及一种用于制造垂直记录磁头的方法。 根据本发明的用于制造垂直记录磁头的方法包括第一至第三步骤。 在第一步骤中，在基础层上形成主磁极层。 在第二步骤中，在主磁极层上形成有记录介质相对表面为倒梯形形状的主磁极形成掩模。 在第三步骤中，通过对包括基础层和主磁极层的叠层结构进行离子铣削，形成具有倒梯形形状的记录介质相对表面的主磁极， 具有根据倒梯形形状的斜角的层叠方向。
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