公开(公告)号：US07097709B2

公开(公告)日：2006-08-29

申请号：US10305339

申请日：2002-11-27

申请人： Tatsuki Okamoto ,  Tetsuya Ogawa ,  Yukio Sato ,  Junichi Nishimae

发明人： Tatsuki Okamoto ,  Tetsuya Ogawa ,  Yukio Sato ,  Junichi Nishimae

IPC分类号： C30B1/08

CPC分类号： C30B13/24 ,  C30B1/00 ,  C30B29/06 ,  Y10S117/904 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008 ,  Y10T117/1016 ,  Y10T117/102

摘要： A laser annealing apparatus for crystallizing a semiconductor film with a linearly radiating laser beam including a laser oscillator and laser optical systems for forming a laser beam radiated from the laser oscillator linearly, for application to a semiconductor film. Each linearly radiating laser beam from each laser optical system radiated onto the semiconductor film is arrayed almost linearly in a length direction, with an interval on the semiconductor film.

摘要翻译： 一种用于使用包括激光振荡器的线性辐射激光束和用于形成从激光振荡器辐射的激光束的激光光学系统使半导体膜结晶化的激光退火装置，用于半导体膜。 辐射到半导体膜上的每个激光光学系统的每个线性辐射激光束在半导体膜上以间隔几乎在长度方向上线性排列。

公开(公告)号：US06884699B1

公开(公告)日：2005-04-26

申请号：US10148562

申请日：2000-10-06

申请人： Tetsuya Ogawa ,  Hidetada Tokioka ,  Junichi Nishimae ,  Tatsuki Okamoto ,  Yukio Sato ,  Mitsuo Inoue ,  Mitsutoshi Miyasaka ,  Hiroaki Jiroku

发明人： Tetsuya Ogawa ,  Hidetada Tokioka ,  Junichi Nishimae ,  Tatsuki Okamoto ,  Yukio Sato ,  Mitsuo Inoue ,  Mitsutoshi Miyasaka ,  Hiroaki Jiroku

IPC分类号： C23C14/58 ,  H01L21/20 ,  H01L21/336 ,  H01L21/00 ,  H01L21/331 ,  H01L21/26

CPC分类号： C23C14/5813 ,  B23K26/0604 ,  B23K26/0738 ,  B23K26/0838 ,  B23K26/352 ,  B23K2101/40 ,  B23K2103/52 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02691 ,  H01L29/66757 ,  Y10S438/969

摘要： A process for making a polycrystalline silicon film includes forming, on a glass substrate, an amorphous silicon film having a first region and a second region that contacts the first region, forming a first polycrystalline portion by irradiating the first region of the amorphous silicon film with laser light having a wavelength not less than 390 nm and not more than 640 nm and forming a second polycrystalline portion that contacts the first polycrystalline portion by irradiating the second region and the portion of the region of the first polycrystalline portion that contacts the second region of the amorphous silicon film with the laser light.

摘要翻译： 一种制造多晶硅膜的方法包括在玻璃基板上形成具有与第一区域接触的第一区域和第二区域的非晶硅膜，通过用非晶硅膜的第一区域照射非晶硅膜形成第一多晶部分， 具有不小于390nm且不大于640nm的波长的激光，并且通过照射第二区域和形成与第一多晶部分接触的第二多晶部分的区域的部分形成第二多晶部分， 具有激光的非晶硅膜。

公开(公告)号：US06717105B1

公开(公告)日：2004-04-06

申请号：US10305168

申请日：2002-11-27

申请人： Tatsuki Okamoto ,  Tetsuya Ogawa ,  Yukio Sato ,  Junichi Nishimae

发明人： Tatsuki Okamoto ,  Tetsuya Ogawa ,  Yukio Sato ,  Junichi Nishimae

IPC分类号： B23K2600

CPC分类号： B23K26/0738 ,  B23K2101/40

摘要： A laser optical system includes a linear beam forming member for forming laser beams radiated from laser oscillators into a linear beam shape on a silicon film on a substrate. The laser optical system is arranged so that the optical axes of laser beams from the laser oscillators to the linear beam forming member are in substantially the same plane and substantially perpendicular to the substrate. Each laser beam is reflected from a reflecting mirror and applied to the silicon film on the substrate. Since the laser beams are applied to the substrate at the same time, the area irradiated can be increased, while each radiating laser beam maintains a required radiation intensity, resulting in high productivity.

摘要翻译： 激光光学系统包括线性波束形成构件，用于将从激光振荡器辐射的激光束形成为在基板上的硅膜上的线形束。 激光光学系统被布置成使得来自激光振荡器的激光束到线性光束形成部件的光轴基本上在相同的平面上并且基本上垂直于衬底。 每个激光束从反射镜反射并施加到衬底上的硅膜上。 由于激光束同时被施加到基板上，所以可以增加照射的面积，同时每个辐射激光束保持所需的辐射强度，导致高的生产率。

公开(公告)号：US06437284B1

公开(公告)日：2002-08-20

申请号：US09599645

申请日：2000-06-23

申请人： Tatsuki Okamoto ,  Tetsuya Ogawa ,  Keisuke Furuta ,  Hidetada Tokioka ,  Tomohiro Sasagawa ,  Junichi Nishimae ,  Mitsuo Inoue ,  Yukio Sato

发明人： Tatsuki Okamoto ,  Tetsuya Ogawa ,  Keisuke Furuta ,  Hidetada Tokioka ,  Tomohiro Sasagawa ,  Junichi Nishimae ,  Mitsuo Inoue ,  Yukio Sato

IPC分类号： B23K2606

CPC分类号： B23K26/0732 ,  B23K2101/40 ,  H01L21/02675 ,  H01L21/2026

摘要： An optical system that controls laser beam spot profile for forming a high performance thin film by a laser heat treatment process is provided. In the optical system that irradiates a rectangular laser beam on a film formed on a substrate, intensity distribution forming, apparatus makes the intensity distribution uniform in the longitudinal direction while maintaining the properties of the laser beam 2 such as directivity in the direction of shorter side, making it possible to concentrate the light to a limit permitted by the nature of the laser beam and achieve the maximum intensity gradient on the film disposed on the substrate. Thus a steep temperature distribution can be generated on the film disposed on the substrate and, as a result, high performance thin film can be formed.

摘要翻译： 提供了通过激光热处理工艺控制用于形成高性能薄膜的激光束光斑轮廓的光学系统。 在形成在基板上的膜上照射矩形激光束的光学系统中，强度分布形成装置使得强度分布沿长度方向均匀，同时保持激光束2的特性，例如沿短边方向的方向性 ，使得可以将光集中到由激光束的性质允许的极限，并且在设置在基板上的膜上实现最大强度梯度。 因此，可以在设置在基板上的膜上产生陡峭的温度分布，结果，可以形成高性能的薄膜。

公开(公告)号：US06414749B1

公开(公告)日：2002-07-02

申请号：US09459925

申请日：1999-12-14

申请人： Tatsuki Okamoto ,  Yukio Sato ,  Junichi Nishimae ,  Hiroyuki Kawano

发明人： Tatsuki Okamoto ,  Yukio Sato ,  Junichi Nishimae ,  Hiroyuki Kawano

IPC分类号： G06K974

CPC分类号： G06K9/00046

摘要： An uneven-pattern reading apparatus includes a detecting prism having a detecting surface on which an uneven pattern is placed, an incident surface upon which an incident light beam for illuminating the uneven pattern is incident, and an emergent surface from which a light beam reflected from the uneven pattern on the detecting surface is emergent, angles between the respective detecting, incident, and emergent surfaces providing that the incident light beam is applied to the uneven pattern and the light reflected from the detecting surface is emergent from the emergent surface; an incident-light-beam converger for causing an incident light beam from a light source to be incident upon the incident surface after collimating or converging the incident light beam; an imaging device for detecting a reflected image emergent from the detecting prism; a converging optical system for collimating or converging the emergent light beam emergent from the emergent surface; and a processing device for identifying the uneven pattern on the basis of the image picked up by the imaging device, wherein an imaging surface of the imaging device is located closer to an emergent surface side than a focusing position of the converging optical system.

摘要翻译： 不均匀图案读取装置包括：检测棱镜，其具有设置有不平坦图案的检测面，入射面，用于照射不均匀图案的入射光束入射的入射面;以及出射表面， 检测表面上的不均匀图案出现，使得入射光束被施加到不均匀图案并且从检测表面反射的光的各个检测入射和出射表面之间的角度从出射表面出射; 用于使来自光源的入射光束在入射光束准直或会聚之后入射到入射面上的入射光束会聚; 用于检测从所述检测棱镜出射的反射图像的成像装置; 用于使出射光束从出射表面出射的准直或会聚的会聚光学系统; 以及处理装置，用于基于由成像装置拾取的图像来识别不均匀图案，其中，成像装置的成像表面位于比会聚光学系统的聚焦位置更靠近出射表面侧。

公开(公告)号：US06912300B1

公开(公告)日：2005-06-28

申请号：US09621553

申请日：2000-07-21

申请人： Tatsuki Okamoto ,  Yukio Sato ,  Junichi Nishimae ,  Hiroyuki Kawano

发明人： Tatsuki Okamoto ,  Yukio Sato ,  Junichi Nishimae ,  Hiroyuki Kawano

IPC分类号： G02B5/04 ,  G06K9/00

CPC分类号： G06K9/00046

摘要： An object of the invention is to achieve a small and thin irregular pattern reader comprising: a prism possessing a detection surface on which a subject to be detected having an irregular pattern is put and an incident plane having a first angle of inclination to the detection surface and emitting a light reflected on the detection surface corresponding to an incident light incident upon the incident plane; a first optical system possessing a light source and causing a light from the light source to be incident upon the incident plane of the prism with its optical axis substantially in parallel to the detection surface; and a second optical system for transmitting the emission light emitted from the prism to an image pick-up device.

摘要翻译： 本发明的目的是实现一种小而薄的不规则图案读取器，其包括：具有检测表面的棱镜，待检测物体具有不规则图案，并且具有与检测表面具有第一倾斜角的入射平面 并发射与入射到入射面上的入射光对应的检测面反射的光; 第一光学系统具有光源并使来自光源的光入射到棱镜的入射平面上，其光轴基本上与检测表面平行; 以及第二光学系统，用于将从棱镜发射的发射光传输到图像拾取装置。

公开(公告)号：US08482813B2

公开(公告)日：2013-07-09

申请号：US12668908

申请日：2008-03-26

申请人： Hiroyuki Kawano ,  Tatsuki Okamoto ,  Tomotaka Katsura ,  Junichi Nishimae

发明人： Hiroyuki Kawano ,  Tatsuki Okamoto ,  Tomotaka Katsura ,  Junichi Nishimae

IPC分类号： H04N1/04

CPC分类号： G03B27/50 ,  G02B3/005 ,  G02B5/10 ,  H04N1/02845 ,  H04N1/03 ,  H04N1/0305 ,  H04N1/0306 ,  H04N1/193 ,  H04N1/1934 ,  H04N1/1935

摘要： An image-scanning device wherein plural images of an object are picked up inverted and reduced in size by image-forming optical systems arranged to be adjacent to each other, and then restored by an image processing system. Each optical system includes a first optical element having a first focal length; an aperture member located at a focus position in a rear side of the first optical element; and a second optical element provided in a rear side of the aperture member and having a second focal length shorter than the first focal length, respectively disposed from a side of the object being picked up to a side of the image pickup device. In between optical systems, corresponding image pick up devices thereof are arranged to be adjacent to each other, the image pickup devices including a region in which the images picked up by the image pickup devices are overlapped.

摘要翻译： 一种图像扫描装置，其中通过被布置为彼此相邻的图像形成光学系统来拾取物体的多个图像被反转并减小尺寸，然后由图像处理系统恢复。 每个光学系统包括具有第一焦距的第一光学元件; 位于所述第一光学元件的后侧的聚焦位置处的光阑元件; 以及第二光学元件，设置在所述光圈构件的后侧，并且具有比所述第一焦距短的第二焦距，所述第二焦距分别从被拾取的物体的一侧被提取到所述图像拾取装置的一侧。 在光学系统之间，其相应的图像拾取装置被布置为彼此相邻，图像拾取装置包括由图像拾取装置拾取的图像重叠的区域。

公开(公告)号：US06724546B2

公开(公告)日：2004-04-20

申请号：US10267797

申请日：2002-10-10

申请人： Junichi Nishimae ,  Akira Sekiguchi ,  Tomohiro Sasagawa ,  Yoshiyuki Goto ,  Kohei Teramoto ,  Hiroyuki Kawano ,  Tatsuki Okamoto ,  Yukio Satou ,  Atsuhiro Sono

发明人： Junichi Nishimae ,  Akira Sekiguchi ,  Tomohiro Sasagawa ,  Yoshiyuki Goto ,  Kohei Teramoto ,  Hiroyuki Kawano ,  Tatsuki Okamoto ,  Yukio Satou ,  Atsuhiro Sono

IPC分类号： G02B900

CPC分类号： H04N9/3152 ,  G02B26/008 ,  G02B26/0816 ,  H04N5/7458 ,  H04N9/3114

摘要： Lengths of both sides of each end plane of a light-intensity distribution uniformizing element receiving a light flux and having an F-number of 1 are set to ½ of those of a reflecting surface of a reflecting optical-spatial modulator element, position information of uniformed light fluxes output from the light-intensity distribution uniformizing element is Fourier-transformed into diverging angle information indicated by incident light fluxes output from a first group of lenses, a relay deformed diaphragm intercepts an interference component of each incident light flux, which is expected to interfere with an outgoing light flux, to produce asymmetric light fluxes, the asymmetric light fluxes are incident on the reflecting optical-spatial modulator element, a projection lens deformed diaphragm removes stray light from outgoing light fluxes output from the reflecting optical-spatial modulator element, and an image is displayed according to the outgoing light fluxes.

摘要翻译： 接收光束并且F数为1的光强度分布均匀化元件的每个端面的两侧的长度被设置为反射光学 - 空间调制器元件的反射表面的一半的位置信息 从光强分布均匀化元件输出的均匀光束被傅立叶变换为由第一组透镜输出的入射光束所指示的发散角度信息，继电器变形光阑拦截每个入射光通量的干涉分量，这是预期的 为了产生不对称光束，产生不对称光束，不对称光束入射到反射光空间调制元件上，投影透镜变形光阑从反射光空间调制元件输出的出射光束中去除杂散光 ，并根据出射光束显示图像。

公开(公告)号：US20100284045A1

公开(公告)日：2010-11-11

申请号：US12668908

申请日：2008-03-26

申请人： Hiroyuki Kawano ,  Tatsuki Okamoto ,  Tomotaka Katsura ,  Junichi Nishimae

发明人： Hiroyuki Kawano ,  Tatsuki Okamoto ,  Tomotaka Katsura ,  Junichi Nishimae

IPC分类号： H04N1/04

CPC分类号： G03B27/50 ,  G02B3/005 ,  G02B5/10 ,  H04N1/02845 ,  H04N1/03 ,  H04N1/0305 ,  H04N1/0306 ,  H04N1/193 ,  H04N1/1934 ,  H04N1/1935

摘要： An image-scanning device having a large depth of field and being small in size. The image-scanning device includes a plurality of cells and an image pickup device that is located so as to correspond to the cells and that picks-up the formed images. Each cell includes a first lens having a first focal length; an aperture member located at the first focal length from the first lens; and a second lens located at a second focal length shorter than the first focal length, with respect to the image pickup device.

摘要翻译： 具有大景深且尺寸小的图像扫描装置。 图像扫描装置包括多个单元和位于与单元相对应并且拾取形成的图像的图像拾取装置。 每个单元包括具有第一焦距的第一透镜; 位于距第一透镜的第一焦距的光圈元件; 以及相对于图像拾取装置位于比第一焦距短的第二焦距的第二透镜。

公开(公告)号：US06698902B2

公开(公告)日：2004-03-02

申请号：US10267031

申请日：2002-10-09

申请人： Hiroyuki Kawano ,  Junichi Nishimae ,  Tatsuki Okamoto ,  Yukio Satou ,  Atsuhiro Sono

发明人： Hiroyuki Kawano ,  Junichi Nishimae ,  Tatsuki Okamoto ,  Yukio Satou ,  Atsuhiro Sono

IPC分类号： G03B2114

CPC分类号： G02B5/04 ,  G02B26/0841 ,  H04N5/7458

摘要： A digital mirror dence chip has a substrate, micro-mirrors disposed on the substrate, and a glass cover plate disposed over the micro-mirrors. Each micro-mirror is inclined by +10 degrees or −10 degrees with respect to the substrate to be set to an on-state or an off-state. Incident light produced in a lighting source system is totally reflected in a total internal reflection prism and is incident on the micro-mirrors through the glass cover plate. Outgoing light reflected by micro-minors in the on-state passes through a projection lens and is projected onto a screen to form an image on the screen. Also, outgoing light reflected by micro-mirrors in the off-state passes out of the projection lens. The glass cover plate is not parallel to the substrate. Therefore, light specularly reflected by a surface of the glass cover plate passes out of the projection lens.

摘要翻译： 数字反射镜芯片具有基板，设置在基板上的微反射镜和设置在微反射镜上的玻璃盖板。 每个微镜相对于衬底倾斜±10度或-10度，以被设置为导通状态或截止状态。 在光源系统中产生的入射光全反射在全内反射棱镜中，并通过玻璃盖板入射到微镜上。 在导通状态下由微型未成年人反射的出射光通过投影透镜并投影到屏幕上以在屏幕上形成图像。 此外，在关闭状态下由微反射镜反射的出射光通过投影透镜。 玻璃盖板不平行于基板。 因此，由玻璃盖板的表面镜面反射的光从投影透镜出来。