公开(公告)号：US4797939A

公开(公告)日：1989-01-10

申请号：US914863

申请日：1986-10-02

申请人： Tetsuo Hoki ,  Tetsuo Sano ,  Ryuji Kitakado ,  Yoshinori Sezaki ,  Tomiji Hotta ,  Hironobu Yano

发明人： Tetsuo Hoki ,  Tetsuo Sano ,  Ryuji Kitakado ,  Yoshinori Sezaki ,  Tomiji Hotta ,  Hironobu Yano

IPC分类号： G01N21/956 ,  G06T7/00 ,  G06K9/00

CPC分类号： G06T7/001 ,  G01N21/956 ,  G06T2207/30141

摘要： A binarized image data group of an inspected object for a plurality of pixels arrayed in the sub-scanning direction is sequentially created in order along the main scanning direction to determine whether or not the pattern of an inputted image corresponds to a standard through-hole pattern on the basis of the binarized image data group. When the determination is of yes, through-hole diameter masking data are sequentially created in order along the main scanning direction to sequentially perform masking processing on the binarized image data group of the inspected object arrayed in the sub-scanning direction. Thus, the through-hole pattern is automatically detected to be subjected to masking processing, whereby an inspected object having through-holes can be inspected by a pattern matching method.

摘要翻译： 沿着主扫描方向顺序地创建沿副扫描方向排列的多个像素的检查对象的二值化图像数据组，以确定输入图像的图案是否对应于标准通孔图案 在二值化图像数据组的基础上。 当确定为是时，沿着主扫描方向依次创建通孔直径掩蔽数据，以顺序对沿副扫描方向排列的被检查对象的二值化图像数据组执行掩蔽处理。 因此，通孔图案被自动检测以进行掩模处理，从而可以通过图案匹配方法检查具有通孔的检查对象。

公开(公告)号：US5039214A

公开(公告)日：1991-08-13

申请号：US333464

申请日：1989-04-05

申请人： Shin-ichi Nagata ,  Yoshinori Sezaki ,  Tomiji Hotta

发明人： Shin-ichi Nagata ,  Yoshinori Sezaki ,  Tomiji Hotta

IPC分类号： G02B21/00 ,  G02B21/08 ,  G02B27/28

CPC分类号： G02B21/082 ,  G02B21/00 ,  G02B27/28

摘要： A beam splitter, a first polarizing plate and a quarterwave plate are provided in that order on the optical axis of an image formation lens between an image formation plane and an objective lens. The first polarizing plate comprises a non-polarizing region for transmitting illuminating light and reflected light and a polarizing region provided to enclose the non-polarizing region for transmitting the illuminating light but limiting the reflected light which is rendered out of phase with the illuminating light by the quarterwave plate. Thus, the angular aperture of the illuminating light can be increased and an irradiated plane can be observed with no hindrance even if the same is inferior in flatness, while illuminance of the irradiated plane can be sufficiently ensured. At the same time, the angular aperture of the objective lens can be reduced, and the depth of focus Q is increased.

摘要翻译： 光束分离器，第一偏振板和四分之一波片在该图像形成透镜的光轴上在图像形成平面和物镜之间依次设置。 第一偏振板包括用于透射照明光和反射光的非偏振区域和偏振区域，该偏振区域被设置为包围用于透射照明光的非偏振区域，但是限制与照明光不同相位的反射光 四分之一波片。 因此，能够提高照明光的角度孔径，即使在平坦度上差的同时也能够无障碍地观察照射面，能够充分确保照射面的照度。 同时，可以减小物镜的角度孔径，并且增加焦点深度Q。

公开(公告)号：US5272762A

公开(公告)日：1993-12-21

申请号：US831898

申请日：1992-02-06

申请人： Yoshinori Sezaki ,  Tetsuo Hoki ,  Takao Kanai ,  Hitoshi Atsuta

发明人： Yoshinori Sezaki ,  Tetsuo Hoki ,  Takao Kanai ,  Hitoshi Atsuta

IPC分类号： G01N21/88 ,  G01N21/93 ,  G01N21/956 ,  G06T1/00 ,  G06T7/00 ,  H05K3/00 ,  G06K9/00

CPC分类号： G06T7/0004 ,  G06T2207/30141

摘要： The image of a wiring pattern provided on a printed board is obtained and binarized. A square pixel operator comprised of a matrix of pixels is applied to the pattern image. Pixel trains extending in different directions are extracted from the result of applying the square operator. The numbers of pixels having the binary value "1" on the pixel trains are counted to obtain the respective sizes of the pattern image on the pixel trains. Signals representing the respective sizes are subjected to timing adjustment operation and to obtain the width of the wiring pattern on an area larger than the square operator.

公开(公告)号：US5384711A

公开(公告)日：1995-01-24

申请号：US791063

申请日：1991-11-12

申请人： Takao Kanai ,  Hitoshi Atsuta ,  Yoshinori Sezaki ,  Ichirou Mandai

发明人： Takao Kanai ,  Hitoshi Atsuta ,  Yoshinori Sezaki ,  Ichirou Mandai

IPC分类号： G01B11/24 ,  G01N21/88 ,  G01N21/93 ,  G01N21/956 ,  G06T1/00 ,  G06T7/00 ,  G06T7/60 ,  H05K3/00 ,  G06K9/62 ,  G06F15/62

CPC分类号： G06T7/001 ,  G06T7/60 ,  G06T2207/30141

摘要： In order to correctly detect the width of wiring pattern on a printed board, a multiple train operator applied to image data. The multiple train operator consists of arms each having three unit arms. The binary data obtained by applying the multiple train operator to the image data is converted into a single horizontal arm and a single vertical arm. The combination of the horizontal and vertical arms corresponds to a single cross operator. The conversion into the single cross operator form is conducted through a logical operation on the binary data obtained by the multiple train operator, so that quantization errors are compensated and fine pattern defects can be detected. As a result, the width of the wiring pattern etc. are correctly obtained.

摘要翻译： 为了正确地检测印刷电路板上布线图案的宽度，应用于多列车操作员的图像数据。 多列车操作员由具有三个单元臂的臂构成。 通过将多列车操作者应用于图像数据而获得的二进制数据被转换为单个水平臂和单个垂直臂。 水平和垂直臂的组合对应于单个交叉算子。 通过对由多列车操作者获得的二进制数据的逻辑运算来进行到单个交叉运算符形式的转换，从而补偿量化误差并且可以检测到精细的图案缺陷。 结果，正确地获得了布线图形的宽度等。

公开(公告)号：US5367467A

公开(公告)日：1994-11-22

申请号：US795925

申请日：1991-11-20

申请人： Yoshinori Sezaki ,  Takao Kanai ,  Hitoshi Atsuta ,  Ichirou Mandai

发明人： Yoshinori Sezaki ,  Takao Kanai ,  Hitoshi Atsuta ,  Ichirou Mandai

IPC分类号： G01B11/02 ,  G06T7/00 ,  G06T7/60 ,  G01N23/04

CPC分类号： G06T7/0006 ,  G01B11/02 ,  G06T7/60 ,  G06T2207/30141

摘要： A cross operator is applied to the image of a wiring pattern provided on a printed board, to obtain respective sizes of the image in first and second directions. When the condition that the size of the wiring pattern in one of first and second directions is larger than a threshold value but the size in the other direction is smaller than the threshold value is satisfied, it is decided that the wiring pattern is a wiring line., The width of the wiring line is measured with the operator and is compared with a predetermined allowable range of the width. A land and a pin hole which may be present on the printed board do not satisfy the condition for detecting the wiring line and accurate inspection of the wiring line is attained.

摘要翻译： 将交叉算子应用于设置在印刷电路板上的布线图案的图像，以获得第一和第二方向上的图像的相应尺寸。 当第一和第二方向中的一个方向上的布线图案的尺寸大于阈值但是在另一个方向上的尺寸小于阈值的条件满足时，确定布线图案是布线 用操作者测量布线的宽度，并将其与预定的宽度范围进行比较。 可能存在于印刷电路板上的焊盘和针孔不满足用于检测布线的条件，并且可以精确地检查布线。

公开(公告)号：US5272761A

公开(公告)日：1993-12-21

申请号：US783615

申请日：1991-10-25

申请人： Takao Kanai ,  Yoshinori Sezaki ,  Hitoshi Atsuta

发明人： Takao Kanai ,  Yoshinori Sezaki ,  Hitoshi Atsuta

IPC分类号： G01B11/02 ,  G01N21/88 ,  G01N21/93 ,  G01N21/956 ,  G06T1/00 ,  H05K3/00 ,  G06K9/00

CPC分类号： G01B11/024

摘要： An operator for detecting the width of a wiring line on a printed board comprises plurality of arms. Pixels on each arm increase in size toward the end of the arm. When the width of a narrow wiring line is detected on small pixels, while the width of a wide line is detected on large pixels. The operater is obtained by converting a wiring pattern signal into a plurality of signals corresponding to different pixel sizes and then combining respective parts of the plurality of signals with each other.