Thin film magnetic head having multiple layered films determining track width imbedded in an insulating film and method of manufacturing the same
    1.
    发明授权
    Thin film magnetic head having multiple layered films determining track width imbedded in an insulating film and method of manufacturing the same 失效
    具有确定嵌入绝缘膜中的轨道宽度的多层膜的薄膜磁头及其制造方法

    公开(公告)号:US06898057B2

    公开(公告)日:2005-05-24

    申请号:US10372803

    申请日:2003-02-26

    摘要: The present invention is to provide a thin film magnetic head intended to increase precision of and to narrow a width which determines a track width of a write thin film magnetic head and to supply a stably high output substantially free from write blurring on a disk, and a method for manufacturing the same. The thin film magnetic head consisting of a magnetic circuit comprising a read head to read information, a lower magnetic film, a magnetic gap and an upper magnetic film formed with a magnetic gap between it and the lower magnetic film; and of a write head comprising a coil positioned between the upper magnetic film and the lower magnetic film and an insulating film for insulting the coil and the upper magnetic film from each other, wherein the upper magnetic film is configured of an upper first magnetic film, an upper second magnetic film and an upper third magnetic film, and the upper first magnetic film is connected to the upper third magnetic film via the upper second magnetic film.

    摘要翻译: 本发明提供一种薄膜磁头,其旨在提高确定写入薄膜磁头的磁道宽度的精度并缩小宽度,并提供基本上没有写入模糊的稳定的高输出,并且 其制造方法。 由包括用于读取信息的读取头的磁路,下部磁性膜,磁隙和在其与下部磁性膜之间形成有磁隙的上部磁性膜组成的薄膜磁头; 以及包括位于上磁性膜和下磁性膜之间的线圈的写入头和用于使线圈和上磁性膜彼此污染的绝缘膜,其中上磁性膜由上部第一磁性膜构成, 上部第二磁性膜和上部第三磁性膜,并且上部第一磁性膜经由上部第二磁性膜连接到上部第三磁性膜。

    Magnetic recording head and method for manufacturing
    2.
    发明授权
    Magnetic recording head and method for manufacturing 失效
    磁记录头及制造方法

    公开(公告)号:US07333301B2

    公开(公告)日:2008-02-19

    申请号:US10650832

    申请日:2003-08-29

    IPC分类号: G11B5/127

    摘要: A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.

    摘要翻译: 提供元件温度上升较小,散热好,磁路长度短(窄线圈间距)及其制造方法的薄膜磁头。 为了形成薄膜磁头的线圈,首先形成下线圈,在形成氧化铝和含有氧化铝的无机化合物之后,通过反应离子蚀刻形成用于上部线圈的沟槽。 此时,下线圈允许均匀刻蚀,起到膜的作用,以防止在反应离子蚀刻期间发生的负载效应。 然后将该沟槽镀铜并进行化学机械平面化以形成上层线圈作为本发明的双层线圈。 来自线圈的热量通过氧化铝和含有良好热传播的氧化铝的无机化合物有效地朝向基板辐射。 可以通过反应离子蚀刻来选择下层线圈中的氧化铝或含有氧化铝的无机化合物的比例,从而可以可靠地形成用作蚀刻停止层的上部线圈沟槽,以形成稳定的线圈膜厚度和短的磁路长度。

    Magnetic write head
    10.
    发明申请
    Magnetic write head 失效
    磁写头

    公开(公告)号:US20050122622A1

    公开(公告)日:2005-06-09

    申请号:US10956976

    申请日:2004-09-30

    IPC分类号: G11B5/31 G11B5/147

    CPC分类号: G11B5/147

    摘要: In one embodiment, a thin-film magnetic head with a write head has a lower core member made of a soft magnetic film, a planar upper core member made of a soft magnetic film, and a coil conductor positioned between the lower and upper core members. The rear end is equipped with a magnetic body, which at least magnetically joins the lower and upper core members. A magnetic pole piece is in contact with the lower core member and positioned toward an air bearing surface, which faces a recording medium. A first nonmagnetic film is provided between a pedestal magnetic pole piece and upper core member. The write head is structured so that the first nonmagnetic film constitutes a write gap. A second nonmagnetic film is provided above or below the first nonmagnetic film. The edge of the second nonmagnetic film is retracted from the air bearing surface. The upper core member's flare point is positioned toward the air bearing surface rather than the edge of the second nonmagnetic film.

    摘要翻译: 在一个实施例中,具有写头的薄膜磁头具有由软磁膜制成的下芯构件,由软磁膜制成的平面上芯构件和位于下芯体和上芯体之间的线圈导体 。 后端配备有至少磁性地连接下部和上部芯部构件的磁性体。 磁极片与下芯部件接触并朝向面向记录介质的空气轴承表面定位。 第一非磁性膜设置在基座磁极片和上芯部件之间。 写头被构造成使得第一非磁性膜构成写入间隙。 在第一非磁性膜的上方或下方设置第二非磁性膜。 第二非磁性膜的边缘从空气支承表面缩回。 上芯体的扩口位于空气轴承表面而不是第二非磁性膜的边缘。