摘要:
The present invention is to provide a thin film magnetic head intended to increase precision of and to narrow a width which determines a track width of a write thin film magnetic head and to supply a stably high output substantially free from write blurring on a disk, and a method for manufacturing the same. The thin film magnetic head consisting of a magnetic circuit comprising a read head to read information, a lower magnetic film, a magnetic gap and an upper magnetic film formed with a magnetic gap between it and the lower magnetic film; and of a write head comprising a coil positioned between the upper magnetic film and the lower magnetic film and an insulating film for insulting the coil and the upper magnetic film from each other, wherein the upper magnetic film is configured of an upper first magnetic film, an upper second magnetic film and an upper third magnetic film, and the upper first magnetic film is connected to the upper third magnetic film via the upper second magnetic film.
摘要:
A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.
摘要:
Disclosed is a magnetic disk apparatus including a magnetic reproducing head portion, and a magnetic recording head including an upper magnetic core having a end portion and a rear portion. As a resist for a frame which is used for forming the rear portion, a negative resist or an electron beam resist is used, whereby the frame is formed without any adverse effect of halation from a coil insulating film. That is, it is possible to manufacture a magnetic recording head in which the rear portion of an upper magnetic core is not emerged at the face opposed to a medium, and hence to obtain a magnetic disk apparatus exhibiting an areal recording density of 5 Gbit/in2 or more by mounting a magnetic recording/reproducing head including such a magnetic recording head.
摘要:
Disclosed is a magnetic disk apparatus including a magnetic reproducing head portion, and a magnetic recording head including an upper magnetic core having a end portion and a rear portion. As a resist for a frame which is used for forming the rear portion, a negative resist or an electron beam resist is used, whereby the frame is formed without any adverse effect of halation from a coil insulating film. That is, it is possible to manufacture a magnetic recording head in which the rear portion of an upper magnetic core is not emerged at the face opposed to a medium, and hence to obtain a magnetic disk apparatus exhibiting an areal recording density of 5 Gbit/in2 or more by mounting a magnetic recording/reproducing head including such a magnetic recording head.
摘要:
Disclosed is a magnetic disk apparatus including a magnetic reproducing head portion, and a magnetic recording head including an upper magnetic core having a end portion and a rear portion. As a resist for a frame which is used for forming the rear portion, a negative resist or an electron beam resist is used, whereby the frame is formed without any adverse effect of halation from a coil insulating film. That is, it is possible to manufacture a magnetic recording head in which the rear portion of an upper magnetic core is not emerged at the face opposed to a medium, and hence to obtain a magnetic disk apparatus exhibiting an areal recording density of 5 Gbit/in2 or more by mounting a magnetic recording/reproducing head including such a magnetic recording head.
摘要:
Disclosed is a magnetic disk apparatus including a magnetic reproducing head portion, and a magnetic recording head including an upper magnetic core having a end portion and a rear portion. As a resist for a frame which is used for forming the rear portion, a negative resist or an electron beam resist is used, whereby the frame is formed without any adverse effect of halation from a coil insulating film. That is, it is possible to manufacture a magnetic recording head in which the rear portion of an upper magnetic core is not emerged at the face opposed to a medium, and hence to obtain a magnetic disk apparatus exhibiting an areal recording density of 5 Gbit/in2 or more by mounting a magnetic recording/reproducing head including such a magnetic recording head.
摘要:
A magnetic disk apparatus includes a magnetic reproducing head portion, and a magnetic recording head including a lower magnetic core and an upper magnetic core having a end portion and a rear portion. The rear portion is formed using a negative resist or an electron beam resist to form a frame for plating above the end portion of the upper magnetic core head.
摘要:
Disclosed is a magnetic disk apparatus including a magnetic reproducing head portion, and a magnetic recording head including an upper magnetic core having a en d portion and a rear portion. As a resist for a frame which is used for forming the rear portion, a negative resist or an electron beam resist is used, whereby the frame is formed without any adverse effect of halation from a coil insulating film. That is, it is possible to manufacture a magnetic recording head in which the rear portion of an upper magnetic core is not emerged at the face opposed to a medium, and hence to obtain a magnetic disk apparatus exhibiting an areal recording density of 5 Gbit/in2 or more by mounting a magnetic recording/reproducing head including such a magnetic recording head.
摘要:
A method of forming a thin film pattern on a base having a step portion. This method comprises a first step of forming a thin film of given material on the base, a second step of forming a predetermined pattern of a first photoresist film on said thin film at one of a first portion including a lower part of the step portion and a second portion including an upper part of the step portion, a third step of forming a predetermined pattern of a second photoresist film on said thin film at the other of the first and second portions and a fourth step of applying ion-milling to said thin film of given material using masks said first and second photoresist film patterns formed on said thin film at the first and second portions.
摘要:
In one embodiment, a thin-film magnetic head with a write head has a lower core member made of a soft magnetic film, a planar upper core member made of a soft magnetic film, and a coil conductor positioned between the lower and upper core members. The rear end is equipped with a magnetic body, which at least magnetically joins the lower and upper core members. A magnetic pole piece is in contact with the lower core member and positioned toward an air bearing surface, which faces a recording medium. A first nonmagnetic film is provided between a pedestal magnetic pole piece and upper core member. The write head is structured so that the first nonmagnetic film constitutes a write gap. A second nonmagnetic film is provided above or below the first nonmagnetic film. The edge of the second nonmagnetic film is retracted from the air bearing surface. The upper core member's flare point is positioned toward the air bearing surface rather than the edge of the second nonmagnetic film.