Method for improving spatial resolution and accuracy in scanning probe microscopy
    2.
    发明授权
    Method for improving spatial resolution and accuracy in scanning probe microscopy 失效
    提高扫描探针显微镜的空间分辨率和精度的方法

    公开(公告)号:US06210982B1

    公开(公告)日:2001-04-03

    申请号:US09116803

    申请日:1998-07-16

    IPC分类号: G01R3126

    摘要: A method and apparatus for generating a spatially improved and accurate dopant density profile of a doped material using scanning probe microscopy, wherein the new method utilizes an iterative process to approach a dopant density profile having a user definable accuracy by creating a new two-dimensional gradient model which accounts for gradients in doping concentrations within the doped material.

    摘要翻译: 一种用于使用扫描探针显微镜产生掺杂材料的空间改善且精确的掺杂物密度分布的方法和装置,其中所述新方法利用迭代过程来接近具有用户可定义精度的掺杂剂密度分布,通过产生新的二维梯度 考虑掺杂材料内掺杂浓度梯度的模型。