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公开(公告)号：US08373431B2
公开(公告)日：2013-02-12
申请号：US12054938
申请日：2008-03-25
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
CPC分类号： G11B11/007 , G01Q70/14 , G01Q80/00 , G11B9/1409
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。
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公开(公告)号：US07482826B2
公开(公告)日：2009-01-27
申请号：US11332137
申请日：2006-01-13
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G01R31/02
CPC分类号： G01Q70/14 , G01Q80/00 , G11B9/1409 , G11B11/007
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。
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公开(公告)号：US20090003188A1
公开(公告)日：2009-01-01
申请号：US12054938
申请日：2008-03-25
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G11B3/00
CPC分类号： G11B11/007 , G01Q70/14 , G01Q80/00 , G11B9/1409
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。
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公开(公告)号：US20100116038A1
公开(公告)日：2010-05-13
申请号：US12269249
申请日：2008-11-12
CPC分类号： G01Q20/02 , G01Q10/065 , G01Q20/04 , G01Q60/38
摘要： A method is provided for determining the topography of an object. A micro-cantilever with a scanning tip is provided. The micro-cantilever includes a thermal sensor. A biased voltage is applied across the thermal sensor. A resistance change of the thermal sensor is then identified. The bias voltage is then modulated, based on the resistance change to enhance the bandwidth and the sensitivity of the thermal sensor. Responsive to the scanning tip traversing a topographical variation on an object, the thermal sensor is vertically displaced with respect to the object, which induces a temperature change of the thermal sensor. A subsequent electrical resistance change of the thermal sensor is then identified, the subsequent electrical resistance change corresponding to a subsequent temperature change. The position of the object relative to the thermal sensor is then identified based on a difference between the initial electrical resistance and the subsequent electrical resistance. The topography of the object can then be determined based on the position of the object relative to the thermal sensor.
摘要翻译： 提供了一种用于确定对象的形貌的方法。 提供具有扫描尖端的微型悬臂。 微型悬臂包括一个热传感器。 偏置电压施加在热传感器上。 然后识别热传感器的电阻变化。 然后基于电阻变化来调制偏置电压，以增强热传感器的带宽和灵敏度。 响应于穿过物体上的地形变化的扫描尖端，热传感器相对于物体垂直移位，这导致热传感器的温度变化。 然后识别热传感器的后续电阻变化，随后的电阻变化对应于随后的温度变化。 然后基于初始电阻和随后的电阻之间的差异来识别物体相对于热传感器的位置。 然后可以基于物体相对于热传感器的位置来确定物体的形貌。
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