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公开(公告)号：US08373431B2
公开(公告)日：2013-02-12
申请号：US12054938
申请日：2008-03-25
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
CPC分类号： G11B11/007 , G01Q70/14 , G01Q80/00 , G11B9/1409
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。
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公开(公告)号：US07482826B2
公开(公告)日：2009-01-27
申请号：US11332137
申请日：2006-01-13
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo E. Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G01R31/02
CPC分类号： G01Q70/14 , G01Q80/00 , G11B9/1409 , G11B11/007
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。
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公开(公告)号：US20090003188A1
公开(公告)日：2009-01-01
申请号：US12054938
申请日：2008-03-25
申请人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo Rothuizen , Dorothea W. Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs T. Duerig , Mark Lantz , Hugo Rothuizen , Dorothea W. Wiesmann Rothuizen
IPC分类号： G11B3/00
CPC分类号： G11B11/007 , G01Q70/14 , G01Q80/00 , G11B9/1409
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。
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公开(公告)号：US20080013437A1
公开(公告)日：2008-01-17
申请号：US11332137
申请日：2006-01-13
申请人： Thomas Albrecht , Michel Despont , Urs Duerig , Mark Lantz , Hugo Rothuizen , Dorothea Wiesmann Rothuizen
发明人： Thomas Albrecht , Michel Despont , Urs Duerig , Mark Lantz , Hugo Rothuizen , Dorothea Wiesmann Rothuizen
IPC分类号： G11B3/00
CPC分类号： G01Q70/14 , G01Q80/00 , G11B9/1409 , G11B11/007
摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.
摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。
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公开(公告)号：US20080011814A1
公开(公告)日：2008-01-17
申请号：US10596349
申请日：2004-11-08
CPC分类号： B81C3/002 , H05K3/3436 , H05K2201/094 , H05K2201/09418 , H05K2201/2036 , H05K2203/048 , Y02P70/613
摘要： A method and system for efficiently self-aligning parts of a MEMS during manufacturing, as well as controlling distance between these parts, are disclosed. According to the invention each MEMS part comprises at least one pad that is aligned so as to form a pair of pads. In a preferred embodiment, each part comprises three pads. The pad shape of two pairs of pads is rectangular, one pair being rotated of an angle approximately equal to 90° from the other, and the pad shape of the third pair is annular. Therefore, one of the pair of pads allows alignment according to a first direction, a second pair of pads allows alignment according to a second direction, and the third pair of pads allows rotational alignment.
摘要翻译： 公开了一种用于在制造期间有效地对准MEMS部件的方法和系统，以及控制这些部件之间的距离。 根据本发明，每个MEMS部件包括至少一个对准以形成一对焊盘的焊盘。 在优选实施例中，每个部分包括三个焊盘。 两对焊盘的焊盘形状是矩形的，一对由另一对旋转大约等于90°的角度，第三对的焊盘形状是环形的。 因此，一对衬垫之一允许根据第一方向进行对准，第二对衬垫允许根据第二方向对准，并且第三对衬垫允许旋转对准。
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公开(公告)号：US08707553B2
公开(公告)日：2014-04-29
申请号：US11571811
申请日：2005-05-17
CPC分类号： B81C1/00269 , B81C3/005 , B81C2203/054 , B81C2203/055 , B82Y10/00 , G11B9/1436 , H01L2924/00013 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599
摘要： A method and system for improving alignment precision of a pair of MEMS parts. The method involves stacking the two parts such that at least one rolling element is between facing surfaces of said two parts, and each rolling element has a first diameter and an axis of rotation parallel to the facing surfaces. The first and second of a pair of MEMS parts respectively include a first alignment pad and a second alignment pad and a liquid drop formed in contact with both alignment pads can align the two parts which can then be locked together by solidification of solder while remaining spaced by the first diameter.
摘要翻译： 一种用于提高一对MEMS部件的对准精度的方法和系统。 该方法包括堆叠两个部分，使得至少一个滚动元件位于所述两个部件的相对表面之间，并且每个滚动元件具有平行于相对表面的第一直径和旋转轴线。 一对MEMS部件中的第一和第二部分分别包括第一对准焊盘和第二对准焊盘，并且与两个对准焊盘接触形成的液滴可以对准两个部分，然后可以通过焊料固化将其锁定在一起，同时保持间隔 按第一个直径。
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公开(公告)号：US20090211087A1
公开(公告)日：2009-08-27
申请号：US11571811
申请日：2005-05-05
IPC分类号： H05K3/30
CPC分类号： B81C1/00269 , B81C3/005 , B81C2203/054 , B81C2203/055 , B82Y10/00 , G11B9/1436 , H01L2924/00013 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , H01L2224/13099 , H01L2224/13599 , H01L2224/05599 , H01L2224/05099 , H01L2224/29099 , H01L2224/29599
摘要： A method and system for improving alignment precision of MEMS parts during manufacturing are disclosed. According to the invention at least one of the MEMS parts comprises a cavity wherein a sphere or bearing is centered and preferably temporary blocked with a temperature dissipative material. When MEMS parts are in contact of the sphere or bearing, the temperature dissipative material is evaporated, offering a very low friction against two facing MEMS parts moving in different directions, enabling a very precise positioning.
摘要翻译： 公开了一种在制造过程中提高MEMS部件的对准精度的方法和系统。 根据本发明，MEMS部件中的至少一个包括空腔，其中球体或轴承居中并且优选地用温度耗散材料临时阻挡。 当MEMS部件与球体或轴承接触时，温度耗散材料被蒸发，对于在不同方向上移动的两个面对的MEMS部件提供非常低的摩擦，从而能够进行非常精确的定位。
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公开(公告)号：US08387160B2
公开(公告)日：2013-02-26
申请号：US12899817
申请日：2010-10-07
申请人： Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
发明人： Michel Despont , Urs T. Duerig , Jane E. Frommer , Bernd W. Gotsmann , James L. Hedrick , Craig Jon Hawker , Robert D. Miller
IPC分类号： G01Q60/24
CPC分类号： G03F7/0002 , G01Q80/00 , Y10S977/849 , Y10S977/85 , Y10S977/851 , Y10S977/855 , Y10S977/857
摘要： A resist medium in which features are lithographically produced by scanning a surface of the medium with an AFM probe positioned in contact therewith. The resist medium comprises a substrate; and a polymer resist layer within which features are produced by mechanical action of the probe. The polymer contains thermally reversible crosslinkages. Also disclosed are methods that generally includes scanning a surface of the polymer resist layer with an AFM probe positioned in contact with the resist layer, wherein heating the probe and a squashing-type mechanical action of the probe produces features in the layer by thermally reversing the crosslinkages.
摘要翻译： 抗蚀剂介质，其特征是通过用与其接触的AFM探针扫描介质的表面来光刻制造。 抗蚀剂介质包括基底; 以及聚合物抗蚀剂层，其中通过探针的机械作用产生特征。 聚合物含有热可逆交联。 还公开了通常包括用定位成与抗蚀剂层接触的AFM探针扫描聚合物抗蚀剂层的表面的方法，其中加热探针和探针的挤压型机械作用通过热反转来产生该层中的特征 交联。
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公开(公告)号：US07351604B2
公开(公告)日：2008-04-01
申请号：US10501516
申请日：2002-11-21
申请人： Graham Cross , Michel Despont , Urs T. Duerig , Grégoire Genolet , Reto Schlittler , Peter Vettiger
发明人： Graham Cross , Michel Despont , Urs T. Duerig , Grégoire Genolet , Reto Schlittler , Peter Vettiger
IPC分类号： H01L21/00
CPC分类号： G11C23/00 , G01Q70/06 , G01Q70/12 , G01Q70/16 , G11B9/1409 , G11B9/1418 , G11C13/025 , G11C2213/81 , Y10S977/732 , Y10S977/733
摘要： A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.
摘要翻译： 描述了形成微结构的方法。 该方法包括：将种子材料沉积在基底上; 从种子材料生长纳米管; 将微结构材料沉积在衬底上以将纳米管嵌入微结构材料中; 并且分离基板以释放微结构。 所得到的微结构包括主体部分和嵌入在主体部分中的纳米管。
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10.发明授权Microsystem and method for positioning a second element with respect to a first element in a microsystem 有权用于相对于微系统中的第一元件定位第二元件的微系统和方法公开(公告)号：US07906887B2
公开(公告)日：2011-03-15
申请号：US11577331
申请日：2005-09-29
申请人： Bernd Gotsmann , Michel Despont , Urs T. Duerig
发明人： Bernd Gotsmann , Michel Despont , Urs T. Duerig
IPC分类号： H02N10/00
CPC分类号： B81B3/0018 , F03G7/06 , F03G7/065 , H01H2037/008
摘要： A microsystem, comprising a first static element (1), a second, movable and unattached element (2), an actuator (3) for effecting a force between the first and the second element (1, 2), which actuator (3) is designed for controlling a temperature (T1, T2) of one of the first element (1) and the second element (2). A corresponding method for positioning a second element (2) with respect to a first element (1) in a microsystem is introduced.
摘要翻译： 一种微系统，包括第一静态元件（1），第二可移动和未附接元件（2），用于在第一和第二元件（1,2）之间产生力的致动器（3），该致动器（3） 被设计用于控制第一元件（1）和第二元件（2）之一的温度（T1，T2）。 引入了相对于在微系统中相对于第一元件（1）定位第二元件（2）的方法。
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